[go: up one dir, main page]

FR2962065B1 - Mecanisme etanche de transmission de mouvements pour enceinte confinee et enceinte pourvue d'un tel mecanisme. - Google Patents

Mecanisme etanche de transmission de mouvements pour enceinte confinee et enceinte pourvue d'un tel mecanisme.

Info

Publication number
FR2962065B1
FR2962065B1 FR1055334A FR1055334A FR2962065B1 FR 2962065 B1 FR2962065 B1 FR 2962065B1 FR 1055334 A FR1055334 A FR 1055334A FR 1055334 A FR1055334 A FR 1055334A FR 2962065 B1 FR2962065 B1 FR 2962065B1
Authority
FR
France
Prior art keywords
enclosure
movement transmission
confined
transmission sealing
sealing mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1055334A
Other languages
English (en)
Other versions
FR2962065A1 (fr
Inventor
Bruno Gallas
Gilbert Rigaud
Stephane Chenot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Pierre et Marie Curie
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Pierre et Marie Curie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Pierre et Marie Curie filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1055334A priority Critical patent/FR2962065B1/fr
Priority to PCT/FR2011/051536 priority patent/WO2012001318A1/fr
Publication of FR2962065A1 publication Critical patent/FR2962065A1/fr
Application granted granted Critical
Publication of FR2962065B1 publication Critical patent/FR2962065B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J21/00—Chambers provided with manipulation devices
    • B25J21/005—Clean rooms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J1/00—Manipulators positioned in space by hand
    • B25J1/08—Manipulators positioned in space by hand movably mounted in a wall
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2005—Seal mechanisms
    • H01J2237/2006—Vacuum seals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20207—Tilt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20214—Rotation

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manipulator (AREA)
FR1055334A 2010-07-01 2010-07-01 Mecanisme etanche de transmission de mouvements pour enceinte confinee et enceinte pourvue d'un tel mecanisme. Expired - Fee Related FR2962065B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1055334A FR2962065B1 (fr) 2010-07-01 2010-07-01 Mecanisme etanche de transmission de mouvements pour enceinte confinee et enceinte pourvue d'un tel mecanisme.
PCT/FR2011/051536 WO2012001318A1 (fr) 2010-07-01 2011-06-30 Mecanisme etanche de transmission de mouvements pour enceinte confinee et systeme pour deposer sous vide du materiau sur un substrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1055334A FR2962065B1 (fr) 2010-07-01 2010-07-01 Mecanisme etanche de transmission de mouvements pour enceinte confinee et enceinte pourvue d'un tel mecanisme.

Publications (2)

Publication Number Publication Date
FR2962065A1 FR2962065A1 (fr) 2012-01-06
FR2962065B1 true FR2962065B1 (fr) 2012-08-10

Family

ID=43626998

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1055334A Expired - Fee Related FR2962065B1 (fr) 2010-07-01 2010-07-01 Mecanisme etanche de transmission de mouvements pour enceinte confinee et enceinte pourvue d'un tel mecanisme.

Country Status (2)

Country Link
FR (1) FR2962065B1 (fr)
WO (1) WO2012001318A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017173387A1 (fr) * 2016-04-01 2017-10-05 Delaware Capital Formation, Inc. Manipulateur doté d'un moteur ayant un arbre d'entraînement flexible
DE102017102653B4 (de) 2017-02-10 2024-10-31 Schunk Gmbh & Co. Kg Spann- Und Greiftechnik Stabkinematik

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE613497A (fr) * 1961-02-24
IE56166B1 (en) * 1985-02-15 1991-05-08 Tekscan Ltd Manipulator means
FR2610562B1 (fr) * 1987-02-05 1993-12-03 Euritech Pince d'intervention articulee a cinq degres de liberte
JPH0982780A (ja) * 1995-09-18 1997-03-28 Kokusai Electric Co Ltd 基板搬送装置

Also Published As

Publication number Publication date
FR2962065A1 (fr) 2012-01-06
WO2012001318A1 (fr) 2012-01-05

Similar Documents

Publication Publication Date Title
FR2967656B1 (fr) Dispositif de bouchage d'un recipient et recipient equipe d'un tel dispositif
TWI372993B (en) Cover lens with touch-sensing function and method for fabricating the same
EG25248A (en) Can opening device.
ZA201006497B (en) Antibody against the csf-1 r
EP1918597A4 (fr) Dispositif de guidage de mouvement
FR2972514B1 (fr) Dispositif de compensation d'usure pour engrenage.
FR2939015B1 (fr) Ouvrant vitre pour enceinte climatique
FR2954787B1 (fr) Vantail pour porte busquee et porte busquee comprenant un tel vantail
EP2517594A4 (fr) Curseur pour fermeture à glissière
FR2955369B1 (fr) Dispositif pour commander le mouvement d'une vanne-fourreau de machine hydraulique et machine hydraulique comportant un tel dispositif
FR2985501B1 (fr) Joint d'etancheite pour pylone et nacelle de turboreacteur et ensemble de pylone et nacelle de turboreacteur incorporant un tel joint d'etancheite
FR2971720B1 (fr) Hotte equipee d'au moins un sas donnant acces a une enceinte a flux laminaire.
EP2517596A4 (fr) Elément d'arrêt pour fermeture à glissière
FR2951516B1 (fr) Perfectionnements aux systemes de transfert entre une enceinte et un conteneur.
FR2995647B1 (fr) Boitier de transmission et engin equipe d'un tel boitier de transmission
FR2973439B1 (fr) Ensemble de joint d'etancheite anti-feu et nacelle comprenant un tel joint
FR2965094B1 (fr) Dispositif a piece de contact double pour l'interruption du courant ainsi que sectionneur utilisant le dispositif
FR2948504B1 (fr) Systeme de verrouillage pour chemins de cables et chemins de cables munis d'un tel systeme
FR2962888B1 (fr) Applicateur et dispositif de conditionnement et d'application comportant un tel applicateur.
TWI372295B (en) A border-hidden display with an optics wave guide and the optics waveguide thereof
FR2962065B1 (fr) Mecanisme etanche de transmission de mouvements pour enceinte confinee et enceinte pourvue d'un tel mecanisme.
FR2978699B1 (fr) Dispositif d'etancheite tournant et bague d'etancheite pour un tel dispositif
FR2970996B1 (fr) Joint pour ouvrant et ouvrant equipe d'un tel joint.
FR3007137B1 (fr) Dispositif d'echantillonnage de solide a partir d'une enceinte fermee et procede pour utiliser un tel dispositif.
FR3001742B1 (fr) Chassis d'hydrolienne comprenant un ensemble de lestage et ensemble de lestage pour un tel chassis

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 6

PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 8

PLFP Fee payment

Year of fee payment: 9

PLFP Fee payment

Year of fee payment: 10

ST Notification of lapse

Effective date: 20210305