FR2898740B1 - INTERDIGITED FRAME DEVICE CONSISTING OF A FIRST FRAME AND A SECOND FRAME, MOBILE TO ONE ANOTHER - Google Patents
INTERDIGITED FRAME DEVICE CONSISTING OF A FIRST FRAME AND A SECOND FRAME, MOBILE TO ONE ANOTHERInfo
- Publication number
- FR2898740B1 FR2898740B1 FR0602387A FR0602387A FR2898740B1 FR 2898740 B1 FR2898740 B1 FR 2898740B1 FR 0602387 A FR0602387 A FR 0602387A FR 0602387 A FR0602387 A FR 0602387A FR 2898740 B1 FR2898740 B1 FR 2898740B1
- Authority
- FR
- France
- Prior art keywords
- frame
- interdigited
- mobile
- another
- device consisting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0602387A FR2898740B1 (en) | 2006-03-17 | 2006-03-17 | INTERDIGITED FRAME DEVICE CONSISTING OF A FIRST FRAME AND A SECOND FRAME, MOBILE TO ONE ANOTHER |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0602387A FR2898740B1 (en) | 2006-03-17 | 2006-03-17 | INTERDIGITED FRAME DEVICE CONSISTING OF A FIRST FRAME AND A SECOND FRAME, MOBILE TO ONE ANOTHER |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2898740A1 FR2898740A1 (en) | 2007-09-21 |
FR2898740B1 true FR2898740B1 (en) | 2010-12-17 |
Family
ID=37395847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0602387A Expired - Fee Related FR2898740B1 (en) | 2006-03-17 | 2006-03-17 | INTERDIGITED FRAME DEVICE CONSISTING OF A FIRST FRAME AND A SECOND FRAME, MOBILE TO ONE ANOTHER |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2898740B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2955096B1 (en) | 2010-01-12 | 2012-01-06 | Flowdit | MICRO-ELECTROMECHANICAL ACTUATOR MADE IN A SUBSTRATE AND MICROVALVE USING THE ACTUATOR |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3960502B2 (en) * | 1999-03-16 | 2007-08-15 | 学校法人立命館 | Capacitive sensor |
US6307298B1 (en) * | 2000-03-20 | 2001-10-23 | Motorola, Inc. | Actuator and method of manufacture |
US6612029B2 (en) * | 2000-03-24 | 2003-09-02 | Onix Microsystems | Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
US6771001B2 (en) * | 2001-03-16 | 2004-08-03 | Optical Coating Laboratory, Inc. | Bi-stable electrostatic comb drive with automatic braking |
-
2006
- 2006-03-17 FR FR0602387A patent/FR2898740B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2898740A1 (en) | 2007-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20141128 |