[go: up one dir, main page]

FR2870638B1 - Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques - Google Patents

Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques

Info

Publication number
FR2870638B1
FR2870638B1 FR0450973A FR0450973A FR2870638B1 FR 2870638 B1 FR2870638 B1 FR 2870638B1 FR 0450973 A FR0450973 A FR 0450973A FR 0450973 A FR0450973 A FR 0450973A FR 2870638 B1 FR2870638 B1 FR 2870638B1
Authority
FR
France
Prior art keywords
encapsulation
micromechanical devices
micromechanical
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0450973A
Other languages
English (en)
Other versions
FR2870638A1 (fr
Inventor
Claude Drevon
Olivier Vendier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel SA filed Critical Alcatel SA
Priority to FR0450973A priority Critical patent/FR2870638B1/fr
Priority to PCT/FR2005/050328 priority patent/WO2005114721A1/fr
Publication of FR2870638A1 publication Critical patent/FR2870638A1/fr
Application granted granted Critical
Publication of FR2870638B1 publication Critical patent/FR2870638B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • H01L23/06Containers; Seals characterised by the material of the container or its electrical properties
    • H01L23/08Containers; Seals characterised by the material of the container or its electrical properties the material being an electrical insulator, e.g. glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261Processes for packaging MEMS devices
    • B81C1/00333Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16152Cap comprising a cavity for hosting the device, e.g. U-shaped cap

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
FR0450973A 2004-05-18 2004-05-18 Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques Expired - Fee Related FR2870638B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0450973A FR2870638B1 (fr) 2004-05-18 2004-05-18 Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques
PCT/FR2005/050328 WO2005114721A1 (fr) 2004-05-18 2005-05-16 Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0450973A FR2870638B1 (fr) 2004-05-18 2004-05-18 Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques

Publications (2)

Publication Number Publication Date
FR2870638A1 FR2870638A1 (fr) 2005-11-25
FR2870638B1 true FR2870638B1 (fr) 2006-08-18

Family

ID=34945685

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0450973A Expired - Fee Related FR2870638B1 (fr) 2004-05-18 2004-05-18 Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques

Country Status (2)

Country Link
FR (1) FR2870638B1 (fr)
WO (1) WO2005114721A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19961578A1 (de) * 1999-12-21 2001-06-28 Bosch Gmbh Robert Sensor mit zumindest einer mikromechanischen Struktur und Verfahren zur Herstellung
FR2834283B1 (fr) * 2001-12-28 2005-06-24 Commissariat Energie Atomique Procede et zone de scellement entre deux substrats d'une microstructure
US6902656B2 (en) * 2002-05-24 2005-06-07 Dalsa Semiconductor Inc. Fabrication of microstructures with vacuum-sealed cavity

Also Published As

Publication number Publication date
FR2870638A1 (fr) 2005-11-25
WO2005114721A1 (fr) 2005-12-01

Similar Documents

Publication Publication Date Title
EP1710696A4 (fr) Dispositif a semi-conducteurs et procede d'activation de celui-ci
EP1733522A4 (fr) Procede et dispositif d'extraction folliculaire
EP1687931A4 (fr) Procede et dispositif pour la production verifiable de cles publiques
EP1652475A4 (fr) Dispositif ultrasonographique et procede ultrasonographique
EP1760334A4 (fr) Dispositif antichute et antidesserrage pour écrou
FR2851154B1 (fr) Dispositif inter-epineux pour freiner les mouvements de deux vertebres successives, et procede de fabrication d'un coussin lui etant destine
FR2910616B1 (fr) Dispositif et procede d'assistance au choix d'aeroports de deroutement
FR2863070B1 (fr) Procede et dispositif d'interface homme - machine
EP1765158A4 (fr) Dispositif d'introduction
EP1939556A4 (fr) Structure enveloppante pour dispositif refrigerant et procede d'etancheification associe
FR2858257B1 (fr) Procede et dispositif de solidification dirigee
EP1852850A4 (fr) Dispositif et procede d'encodage evolutif
FR2874907B1 (fr) Dispositif d'entrainement, notamment pour mecanisme horloger
FR2854393B1 (fr) Dispositif de lestage pour grue
EP1801754A4 (fr) Procede et dispositif de retablissement d'information de degradation
AU2003209528A1 (en) Method and device for activating bluetooth devices through signaling
EP1637276A4 (fr) Dispositif et procede de compression d'anneau
EP1656701A4 (fr) Dispositif a semi-conducteur et procede associe
FR2862834B1 (fr) Procede et dispositif de video-projection
EP1710929A4 (fr) Dispositif de communication et procede de communication
EP1625938A4 (fr) Dispositif pour jet de liquide et procede de jet de liquide
EP1801753A4 (fr) Procede et dispositif de retablissement d'information de degradation
FR2891908B1 (fr) Dispositif et procede pour la realisation d'essais sur des materiaux
EP1708494A4 (fr) Dispositif d'imagerie et procede d'imagerie
EP1768106A4 (fr) Dispositif et procédé d'encodage audio

Legal Events

Date Code Title Description
CD Change of name or company name
PLFP Fee payment

Year of fee payment: 13

ST Notification of lapse

Effective date: 20180131