FR2870638B1 - Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques - Google Patents
Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniquesInfo
- Publication number
- FR2870638B1 FR2870638B1 FR0450973A FR0450973A FR2870638B1 FR 2870638 B1 FR2870638 B1 FR 2870638B1 FR 0450973 A FR0450973 A FR 0450973A FR 0450973 A FR0450973 A FR 0450973A FR 2870638 B1 FR2870638 B1 FR 2870638B1
- Authority
- FR
- France
- Prior art keywords
- encapsulation
- micromechanical devices
- micromechanical
- devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005538 encapsulation Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/06—Containers; Seals characterised by the material of the container or its electrical properties
- H01L23/08—Containers; Seals characterised by the material of the container or its electrical properties the material being an electrical insulator, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00333—Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16152—Cap comprising a cavity for hosting the device, e.g. U-shaped cap
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Micromachines (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0450973A FR2870638B1 (fr) | 2004-05-18 | 2004-05-18 | Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques |
PCT/FR2005/050328 WO2005114721A1 (fr) | 2004-05-18 | 2005-05-16 | Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0450973A FR2870638B1 (fr) | 2004-05-18 | 2004-05-18 | Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2870638A1 FR2870638A1 (fr) | 2005-11-25 |
FR2870638B1 true FR2870638B1 (fr) | 2006-08-18 |
Family
ID=34945685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0450973A Expired - Fee Related FR2870638B1 (fr) | 2004-05-18 | 2004-05-18 | Procede et dispositif d'encapsulation, notamment pour dispositifs micromecaniques |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2870638B1 (fr) |
WO (1) | WO2005114721A1 (fr) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19961578A1 (de) * | 1999-12-21 | 2001-06-28 | Bosch Gmbh Robert | Sensor mit zumindest einer mikromechanischen Struktur und Verfahren zur Herstellung |
FR2834283B1 (fr) * | 2001-12-28 | 2005-06-24 | Commissariat Energie Atomique | Procede et zone de scellement entre deux substrats d'une microstructure |
US6902656B2 (en) * | 2002-05-24 | 2005-06-07 | Dalsa Semiconductor Inc. | Fabrication of microstructures with vacuum-sealed cavity |
-
2004
- 2004-05-18 FR FR0450973A patent/FR2870638B1/fr not_active Expired - Fee Related
-
2005
- 2005-05-16 WO PCT/FR2005/050328 patent/WO2005114721A1/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
FR2870638A1 (fr) | 2005-11-25 |
WO2005114721A1 (fr) | 2005-12-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
CD | Change of name or company name | ||
PLFP | Fee payment |
Year of fee payment: 13 |
|
ST | Notification of lapse |
Effective date: 20180131 |