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FR2860841B3 - Perfectionnements apportes a l'efficacite d'un systeme de pompage - Google Patents

Perfectionnements apportes a l'efficacite d'un systeme de pompage

Info

Publication number
FR2860841B3
FR2860841B3 FR0410735A FR0410735A FR2860841B3 FR 2860841 B3 FR2860841 B3 FR 2860841B3 FR 0410735 A FR0410735 A FR 0410735A FR 0410735 A FR0410735 A FR 0410735A FR 2860841 B3 FR2860841 B3 FR 2860841B3
Authority
FR
France
Prior art keywords
efficiency
pumping system
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0410735A
Other languages
English (en)
Other versions
FR2860841A3 (fr
Inventor
Derek Graeme Madgwick Savidge
Phillip North
Alan Lindsey Purvis
Nigel Paul Schofield
David Wong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Publication of FR2860841A3 publication Critical patent/FR2860841A3/fr
Application granted granted Critical
Publication of FR2860841B3 publication Critical patent/FR2860841B3/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
FR0410735A 2003-10-14 2004-10-12 Perfectionnements apportes a l'efficacite d'un systeme de pompage Expired - Fee Related FR2860841B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0324067A GB2407132A (en) 2003-10-14 2003-10-14 Multiple vacuum pump system with additional pump for exhaust flow

Publications (2)

Publication Number Publication Date
FR2860841A3 FR2860841A3 (fr) 2005-04-15
FR2860841B3 true FR2860841B3 (fr) 2005-08-26

Family

ID=29559274

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0410735A Expired - Fee Related FR2860841B3 (fr) 2003-10-14 2004-10-12 Perfectionnements apportes a l'efficacite d'un systeme de pompage

Country Status (7)

Country Link
JP (1) JP3108228U (fr)
KR (1) KR200372323Y1 (fr)
CN (1) CN2767710Y (fr)
DE (1) DE202004015599U1 (fr)
FR (1) FR2860841B3 (fr)
GB (1) GB2407132A (fr)
TW (1) TWM279740U (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2940322B1 (fr) * 2008-12-19 2011-02-11 Alcatel Lucent Procede de descente en pression dans un sas de chargement et de dechargement et equipement associe
GB2492065A (en) * 2011-06-16 2012-12-26 Edwards Ltd Noise reduction of a vacuum pumping system
CN104066989B (zh) * 2011-12-14 2017-03-01 斯特林工业咨询有限公司 用于排空腔室并净化从所述腔室抽取的气体的装置和方法
GB2508396B (en) * 2012-11-30 2015-10-07 Edwards Ltd Improvements in and relating to vacuum conduits
JP6113022B2 (ja) * 2013-08-13 2017-04-12 株式会社ディスコ プラズマエッチング装置
CN106321435A (zh) * 2016-09-09 2017-01-11 武汉华星光电技术有限公司 降低干泵功耗的系统及方法
GB2579360A (en) 2018-11-28 2020-06-24 Edwards Ltd Multiple chamber vacuum exhaust system
CN111336093A (zh) * 2018-12-18 2020-06-26 夏泰鑫半导体(青岛)有限公司 真空排气系统及其控制方法
GB2581503A (en) 2019-02-20 2020-08-26 Edwards Ltd Vacuum pumping
CN110594127B (zh) * 2019-09-23 2021-02-23 阿特拉斯·科普柯(无锡)压缩机有限公司 一种真空负压机组及其控制方法
CN112032022B (zh) * 2020-09-10 2024-04-26 北京通嘉宏瑞科技有限公司 一种无死角吹扫气体的干式真空泵及其使用方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000297799A (ja) * 1999-04-12 2000-10-24 Air Liquide Japan Ltd 小型急速排気装置及びそれを用いたガス充填装置
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
JP2003083248A (ja) * 2001-09-06 2003-03-19 Ebara Corp 真空排気システム
JP3982673B2 (ja) * 2001-10-31 2007-09-26 株式会社アルバック 真空排気装置の運転方法
JP4365059B2 (ja) * 2001-10-31 2009-11-18 株式会社アルバック 真空排気装置の運転方法

Also Published As

Publication number Publication date
GB0324067D0 (en) 2003-11-19
GB2407132A (en) 2005-04-20
DE202004015599U1 (de) 2005-02-17
CN2767710Y (zh) 2006-03-29
KR200372323Y1 (ko) 2005-01-10
FR2860841A3 (fr) 2005-04-15
TWM279740U (en) 2005-11-01
JP3108228U (ja) 2005-04-14

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20070629