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FR2825150B1 - Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinie - Google Patents

Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinie

Info

Publication number
FR2825150B1
FR2825150B1 FR0106917A FR0106917A FR2825150B1 FR 2825150 B1 FR2825150 B1 FR 2825150B1 FR 0106917 A FR0106917 A FR 0106917A FR 0106917 A FR0106917 A FR 0106917A FR 2825150 B1 FR2825150 B1 FR 2825150B1
Authority
FR
France
Prior art keywords
optical networks
spatial frequency
characterizing
preset spatial
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0106917A
Other languages
English (en)
Other versions
FR2825150A1 (fr
Inventor
Yves Jourlin
Olivier Parriaux
Marc Andre Pierre Bonis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite Jean Monnet
Original Assignee
Universite Jean Monnet
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universite Jean Monnet filed Critical Universite Jean Monnet
Priority to FR0106917A priority Critical patent/FR2825150B1/fr
Priority to PCT/EP2002/005712 priority patent/WO2002097375A1/fr
Priority to EP02750974A priority patent/EP1395794A1/fr
Priority to US10/479,045 priority patent/US20040174536A1/en
Priority to CA002448823A priority patent/CA2448823A1/fr
Publication of FR2825150A1 publication Critical patent/FR2825150A1/fr
Application granted granted Critical
Publication of FR2825150B1 publication Critical patent/FR2825150B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR0106917A 2001-05-28 2001-05-28 Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinie Expired - Fee Related FR2825150B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0106917A FR2825150B1 (fr) 2001-05-28 2001-05-28 Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinie
PCT/EP2002/005712 WO2002097375A1 (fr) 2001-05-28 2002-05-22 Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefine
EP02750974A EP1395794A1 (fr) 2001-05-28 2002-05-22 Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefine
US10/479,045 US20040174536A1 (en) 2001-05-28 2002-05-22 Device for characterising optical gratings and method for making optical gratings with predefined spatial frequency
CA002448823A CA2448823A1 (fr) 2001-05-28 2002-05-22 Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0106917A FR2825150B1 (fr) 2001-05-28 2001-05-28 Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinie

Publications (2)

Publication Number Publication Date
FR2825150A1 FR2825150A1 (fr) 2002-11-29
FR2825150B1 true FR2825150B1 (fr) 2003-09-26

Family

ID=8863673

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0106917A Expired - Fee Related FR2825150B1 (fr) 2001-05-28 2001-05-28 Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinie

Country Status (5)

Country Link
US (1) US20040174536A1 (fr)
EP (1) EP1395794A1 (fr)
CA (1) CA2448823A1 (fr)
FR (1) FR2825150B1 (fr)
WO (1) WO2002097375A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004042670B4 (de) 2003-09-02 2018-07-12 CiS Forschungsinstitut für Mikrosensorik GmbH Mikrooptisches Strahler- und Empfängersystem
EP1966636A2 (fr) * 2005-12-22 2008-09-10 Université Jean-Monnet Structure miroir et dispositif laser comprenant une telle structure miroir
US7636165B2 (en) * 2006-03-21 2009-12-22 Asml Netherlands B.V. Displacement measurement systems lithographic apparatus and device manufacturing method
DE102012221566A1 (de) * 2012-11-26 2014-05-28 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP6696748B2 (ja) * 2014-10-21 2020-05-20 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 光学式エンコーダ
WO2017190905A1 (fr) * 2016-05-04 2017-11-09 Asml Netherlands B.V. Procédé et appareil lithographiques
US11982521B2 (en) * 2017-02-23 2024-05-14 Nikon Corporation Measurement of a change in a geometrical characteristic and/or position of a workpiece
CN108918433B (zh) * 2018-07-26 2021-01-26 京东方科技集团股份有限公司 一种微流体检测装置
WO2020019809A1 (fr) 2018-07-26 2020-01-30 Boe Technology Group Co., Ltd. Appareil microfluidique, procédé de détection de substance dans un appareil microfluidique et spectromètre
CN119437056A (zh) * 2025-01-10 2025-02-14 中国科学院长春光学精密机械与物理研究所 一种基于超声光栅的高精度位移测量系统及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62172203A (ja) * 1986-01-27 1987-07-29 Agency Of Ind Science & Technol 相対変位測定方法
US5283434A (en) * 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics
EP0590163B1 (fr) * 1992-09-21 1996-01-03 Dr. Johannes Heidenhain GmbH Dispositif de mesure de longueurs ou d'angles
EP0741282A3 (fr) * 1995-05-04 1998-06-17 CSEM Centre Suisse d'Electronique et de Microtechnique S.A. - Recherche et Développement Dispositif optique de mesure d'un déplacement relatif entre deux éléments
US5912999A (en) * 1997-10-02 1999-06-15 Minnesota Mining And Manufacturing Company Method for fabrication of in-line optical waveguide index grating of any length

Also Published As

Publication number Publication date
CA2448823A1 (fr) 2002-12-05
US20040174536A1 (en) 2004-09-09
WO2002097375A1 (fr) 2002-12-05
EP1395794A1 (fr) 2004-03-10
FR2825150A1 (fr) 2002-11-29

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20070131