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FR2702328B1 - Dispositif de production d'un plasma. - Google Patents

Dispositif de production d'un plasma.

Info

Publication number
FR2702328B1
FR2702328B1 FR9302609A FR9302609A FR2702328B1 FR 2702328 B1 FR2702328 B1 FR 2702328B1 FR 9302609 A FR9302609 A FR 9302609A FR 9302609 A FR9302609 A FR 9302609A FR 2702328 B1 FR2702328 B1 FR 2702328B1
Authority
FR
France
Prior art keywords
plasma
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9302609A
Other languages
English (en)
Other versions
FR2702328A1 (fr
Inventor
Christian Dupret
Odile Dessaux
Pierre Goudmand
Christophe Hoyez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite Lille 1 Sciences et Technologies
Original Assignee
Universite Lille 1 Sciences et Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universite Lille 1 Sciences et Technologies filed Critical Universite Lille 1 Sciences et Technologies
Priority to FR9302609A priority Critical patent/FR2702328B1/fr
Priority to PCT/FR1994/000243 priority patent/WO1994021096A1/fr
Publication of FR2702328A1 publication Critical patent/FR2702328A1/fr
Application granted granted Critical
Publication of FR2702328B1 publication Critical patent/FR2702328B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32247—Resonators
    • H01J37/32256—Tuning means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
FR9302609A 1993-03-05 1993-03-05 Dispositif de production d'un plasma. Expired - Fee Related FR2702328B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9302609A FR2702328B1 (fr) 1993-03-05 1993-03-05 Dispositif de production d'un plasma.
PCT/FR1994/000243 WO1994021096A1 (fr) 1993-03-05 1994-03-04 Dispositif de production d'un plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9302609A FR2702328B1 (fr) 1993-03-05 1993-03-05 Dispositif de production d'un plasma.

Publications (2)

Publication Number Publication Date
FR2702328A1 FR2702328A1 (fr) 1994-09-09
FR2702328B1 true FR2702328B1 (fr) 1995-05-12

Family

ID=9444717

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9302609A Expired - Fee Related FR2702328B1 (fr) 1993-03-05 1993-03-05 Dispositif de production d'un plasma.

Country Status (2)

Country Link
FR (1) FR2702328B1 (fr)
WO (1) WO1994021096A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2734979B1 (fr) * 1995-05-29 1997-08-01 Univ Lille Sciences Tech Cavite de decharge forte puissance a onde lente dans le domaine des radiofrequences
DE19600223A1 (de) * 1996-01-05 1997-07-17 Ralf Dr Dipl Phys Spitzl Vorrichtung zur Erzeugung von Plasmen mittels Mikrowellen
US6029602A (en) * 1997-04-22 2000-02-29 Applied Materials, Inc. Apparatus and method for efficient and compact remote microwave plasma generation
US6057645A (en) * 1997-12-31 2000-05-02 Eaton Corporation Plasma discharge device with dynamic tuning by a movable microwave trap

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2074715A7 (fr) * 1970-01-19 1971-10-08 Dupret Christian
US3911318A (en) * 1972-03-29 1975-10-07 Fusion Systems Corp Method and apparatus for generating electromagnetic radiation
FR2290126A1 (fr) * 1974-10-31 1976-05-28 Anvar Perfectionnements apportes aux dispositifs d'excitation, par des ondes hf, d'une colonne de gaz enfermee dans une enveloppe
DE3622614A1 (de) * 1986-07-05 1988-01-14 Philips Patentverwaltung Verfahren zur herstellung von elektrisch leitenden formkoerpern durch plasmaaktivierte chemische abscheidung aus der gasphase
JPH02215038A (ja) * 1989-02-15 1990-08-28 Hitachi Ltd マイクロ波プラズマ極微量元素分析装置
FR2665323B1 (fr) * 1990-07-27 1996-09-27 Reydel J Dispositif de production d'un plasma.

Also Published As

Publication number Publication date
WO1994021096A1 (fr) 1994-09-15
FR2702328A1 (fr) 1994-09-09

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Legal Events

Date Code Title Description
ST Notification of lapse