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FR2693477B1 - Revêtement multicouche pour la protection de surface contre l'érosion et/ou l'abrasion. - Google Patents

Revêtement multicouche pour la protection de surface contre l'érosion et/ou l'abrasion.

Info

Publication number
FR2693477B1
FR2693477B1 FR9208500A FR9208500A FR2693477B1 FR 2693477 B1 FR2693477 B1 FR 2693477B1 FR 9208500 A FR9208500 A FR 9208500A FR 9208500 A FR9208500 A FR 9208500A FR 2693477 B1 FR2693477 B1 FR 2693477B1
Authority
FR
France
Prior art keywords
abrasion
protection against
surface protection
multilayer coating
against erosion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9208500A
Other languages
English (en)
Other versions
FR2693477A1 (fr
Inventor
Guy Farges
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Direction General pour lArmement DGA
Original Assignee
Direction General pour lArmement DGA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Direction General pour lArmement DGA filed Critical Direction General pour lArmement DGA
Priority to FR9208500A priority Critical patent/FR2693477B1/fr
Priority to EP92923834A priority patent/EP0562108B1/fr
Priority to DE69216218T priority patent/DE69216218T2/de
Priority to PCT/FR1992/000969 priority patent/WO1993008316A1/fr
Priority to US08/075,519 priority patent/US5547767A/en
Publication of FR2693477A1 publication Critical patent/FR2693477A1/fr
Application granted granted Critical
Publication of FR2693477B1 publication Critical patent/FR2693477B1/fr
Priority to US08/634,899 priority patent/US5702829A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0073—Reactive sputtering by exposing the substrates to reactive gases intermittently
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR9208500A 1991-10-14 1992-07-09 Revêtement multicouche pour la protection de surface contre l'érosion et/ou l'abrasion. Expired - Lifetime FR2693477B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR9208500A FR2693477B1 (fr) 1992-07-09 1992-07-09 Revêtement multicouche pour la protection de surface contre l'érosion et/ou l'abrasion.
EP92923834A EP0562108B1 (fr) 1991-10-14 1992-10-14 Materiau multicouche pour revetement anti-erosion et anti-abrasion
DE69216218T DE69216218T2 (de) 1991-10-14 1992-10-14 Erosionsbeständiges und abrasionsbeständiges Mehrschichtenmaterial
PCT/FR1992/000969 WO1993008316A1 (fr) 1991-10-14 1992-10-14 Materiau multicouche pour revetement anti-erosion et anti-abrasion
US08/075,519 US5547767A (en) 1991-10-14 1992-10-14 Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material and process for producing said multilayer material
US08/634,899 US5702829A (en) 1991-10-14 1996-04-26 Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9208500A FR2693477B1 (fr) 1992-07-09 1992-07-09 Revêtement multicouche pour la protection de surface contre l'érosion et/ou l'abrasion.

Publications (2)

Publication Number Publication Date
FR2693477A1 FR2693477A1 (fr) 1994-01-14
FR2693477B1 true FR2693477B1 (fr) 1994-09-02

Family

ID=9431727

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9208500A Expired - Lifetime FR2693477B1 (fr) 1991-10-14 1992-07-09 Revêtement multicouche pour la protection de surface contre l'érosion et/ou l'abrasion.

Country Status (1)

Country Link
FR (1) FR2693477B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2764310B1 (fr) * 1997-06-10 1999-07-09 Commissariat Energie Atomique Materiau multicouches a revetement anti-erosion, anti-abrasion, et anti-usure sur substrat en aluminium, en magnesium ou en leurs alliages
CA2809271C (fr) 2010-09-02 2019-02-19 3M Innovative Properties Company Films de protection multicouches resistant a l'erosion

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52130490A (en) * 1976-04-27 1977-11-01 Mitsubishi Metal Corp Metal parts having coating layer
JPS59123765A (ja) * 1982-12-28 1984-07-17 Toho Kinzoku Kk 化学蒸着法
DE3461301D1 (en) * 1983-04-18 1987-01-02 Battelle Development Corp Hard layer formed by incorporating nitrogen into mo or w metal and method for obtaining this layer
JPS60221565A (ja) * 1984-04-19 1985-11-06 Matsushita Electric Ind Co Ltd ダイヤモンド部品およびその製造方法

Also Published As

Publication number Publication date
FR2693477A1 (fr) 1994-01-14

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Legal Events

Date Code Title Description
AU Other act affecting the ownership or exploitation of an industrial property right
TP Transmission of property