Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/32—Gas-filled discharge tubes
  • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
  • H01J37/32192—Microwave generated discharge
  • H01J37/32211—Means for coupling power to the plasma
  • H01J37/32247—Resonators
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F26—DRYING
  • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
  • F26B3/00—Drying solid materials or objects by processes involving the application of heat
  • F26B3/32—Drying solid materials or objects by processes involving the application of heat by development of heat within the materials or objects to be dried, e.g. by fermentation or other microbiological action
  • F26B3/34—Drying solid materials or objects by processes involving the application of heat by development of heat within the materials or objects to be dried, e.g. by fermentation or other microbiological action by using electrical effects
  • F26B3/347—Electromagnetic heating, e.g. induction heating or heating using microwave energy
• • H—ELECTRICITY
  • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
  • H05H1/00—Generating plasma; Handling plasma
  • H05H1/24—Generating plasma
  • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Plasma & Fusion (AREA)
• Life Sciences & Earth Sciences (AREA)
• Microbiology (AREA)
• Electromagnetism (AREA)
• Analytical Chemistry (AREA)
• Health & Medical Sciences (AREA)
• Spectroscopy & Molecular Physics (AREA)
• Biomedical Technology (AREA)
• Biotechnology (AREA)
• Chemical & Material Sciences (AREA)
• Molecular Biology (AREA)
• Mechanical Engineering (AREA)
• General Engineering & Computer Science (AREA)
• Drying Of Semiconductors (AREA)
• Plasma Technology (AREA)

Priority Applications (1)

Applications Claiming Priority (2)

Publications (2)

Family

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Family Applications (1)

Country Status (1)

Families Citing this family (6)

• 1990
  • 1990-10-31 FR FR9013645A patent/FR2668676B2/fr not_active Expired - Lifetime

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