FR2629912B1 - Dispositif de detection infra-rouge fonctionnant a basse temperature - Google Patents
Dispositif de detection infra-rouge fonctionnant a basse temperatureInfo
- Publication number
- FR2629912B1 FR2629912B1 FR8810814A FR8810814A FR2629912B1 FR 2629912 B1 FR2629912 B1 FR 2629912B1 FR 8810814 A FR8810814 A FR 8810814A FR 8810814 A FR8810814 A FR 8810814A FR 2629912 B1 FR2629912 B1 FR 2629912B1
- Authority
- FR
- France
- Prior art keywords
- detection device
- low temperature
- infrared detection
- temperature infrared
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/60—Arrangements for cooling, heating, ventilating or compensating for temperature fluctuations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/28—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using photoemissive or photovoltaic cells
- G01J2005/283—Array
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19107—Disposition of discrete passive components off-chip wires
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8810814A FR2629912B1 (fr) | 1988-08-05 | 1988-08-05 | Dispositif de detection infra-rouge fonctionnant a basse temperature |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8810814A FR2629912B1 (fr) | 1988-08-05 | 1988-08-05 | Dispositif de detection infra-rouge fonctionnant a basse temperature |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2629912A1 FR2629912A1 (fr) | 1989-10-13 |
FR2629912B1 true FR2629912B1 (fr) | 1992-01-10 |
Family
ID=9369287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8810814A Expired - Fee Related FR2629912B1 (fr) | 1988-08-05 | 1988-08-05 | Dispositif de detection infra-rouge fonctionnant a basse temperature |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2629912B1 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2651315B1 (fr) * | 1989-08-22 | 1991-11-15 | Detecteurs Infra Rouges Ste Fs | Dispositif de detection infra-rouge. |
US5098198A (en) * | 1990-04-19 | 1992-03-24 | Applied Materials, Inc. | Wafer heating and monitor module and method of operation |
GB2368188B (en) * | 1991-05-10 | 2002-08-21 | Marconi Gec Ltd | Infrared detector |
FR2729757A1 (fr) * | 1995-01-20 | 1996-07-26 | Sofradir | Dispositif de detection d'ondes electromagnetiques, et notamment de rayonnements infra-rouges |
KR100551980B1 (ko) | 1997-11-03 | 2006-02-20 | 에이에스엠 아메리카, 인코포레이티드 | 저질량 지지체를 이용한 웨이퍼의 처리방법 및 장치 |
FR2825290B1 (fr) * | 2001-05-29 | 2003-09-19 | Sofradir | Procede de realisation d'un dispositif d'absorption de gaz residuels au sein d'une enceinte sous vide et detecteur d'ondes electromagnetiques mettant en oeuvre un tel dispositif d'absorption |
US9885123B2 (en) | 2011-03-16 | 2018-02-06 | Asm America, Inc. | Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3259865A (en) * | 1964-01-06 | 1966-07-05 | Micro State Electronics Corp | Dewar for cryogenic cooling of solid state device |
JPS5777923A (en) * | 1980-10-31 | 1982-05-15 | Fujitsu Ltd | Infrared ray detector |
FR2530382B1 (fr) * | 1982-07-16 | 1985-06-07 | Thomson Csf | Dispositif cryostatique de faibles dimensions pour photodetecteurs |
DE3344713A1 (de) * | 1983-12-10 | 1985-06-20 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Strahlungsdetektor |
EP0154947B1 (fr) * | 1984-03-12 | 1989-05-17 | Honeywell Inc. | Appareil à vase Dewar |
JPH0695046B2 (ja) * | 1986-11-21 | 1994-11-24 | サンタ・バーバラ・リサーチ・センター | 一体化された検出器、ジユアー、及び低温エンジン |
-
1988
- 1988-08-05 FR FR8810814A patent/FR2629912B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2629912A1 (fr) | 1989-10-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |