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FR2614103B1 - Instrument pour l'analyse d'un echantillon - Google Patents

Instrument pour l'analyse d'un echantillon

Info

Publication number
FR2614103B1
FR2614103B1 FR888805037A FR8805037A FR2614103B1 FR 2614103 B1 FR2614103 B1 FR 2614103B1 FR 888805037 A FR888805037 A FR 888805037A FR 8805037 A FR8805037 A FR 8805037A FR 2614103 B1 FR2614103 B1 FR 2614103B1
Authority
FR
France
Prior art keywords
instrument
sample
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR888805037A
Other languages
English (en)
Other versions
FR2614103A1 (fr
Inventor
Shojiro Tagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62094715A external-priority patent/JPH0646557B2/ja
Priority claimed from JP62094716A external-priority patent/JPH0646558B2/ja
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of FR2614103A1 publication Critical patent/FR2614103A1/fr
Application granted granted Critical
Publication of FR2614103B1 publication Critical patent/FR2614103B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR888805037A 1987-04-17 1988-04-15 Instrument pour l'analyse d'un echantillon Expired - Lifetime FR2614103B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62094715A JPH0646557B2 (ja) 1987-04-17 1987-04-17 Ｘ線マイクロアナライザにおける試料分析方法
JP62094716A JPH0646558B2 (ja) 1987-04-17 1987-04-17 Ｘ線マイクロアナライザにおける試料分析方法

Publications (2)

Publication Number Publication Date
FR2614103A1 FR2614103A1 (fr) 1988-10-21
FR2614103B1 true FR2614103B1 (fr) 1992-02-28

Family

ID=26435976

Family Applications (1)

Application Number Title Priority Date Filing Date
FR888805037A Expired - Lifetime FR2614103B1 (fr) 1987-04-17 1988-04-15 Instrument pour l'analyse d'un echantillon

Country Status (2)

Country Link
US (1) US4857731A (fr)
FR (1) FR2614103B1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238850A (ja) * 1988-07-28 1990-02-08 Jeol Ltd Ｘ線分光器を用いた定性分析方法
JPH0487148A (ja) * 1990-07-26 1992-03-19 Shimadzu Corp 試料移動経路指定自動分析装置
US5210414A (en) * 1991-03-29 1993-05-11 The United States Of America As Represented By The Department Of Health And Human Services Differential surface composition analysis by multiple-voltage electron beam X-ray spectroscopy
US5212383A (en) * 1991-07-29 1993-05-18 David Scharf Color synthesizing scanning electron microscope
GB9209500D0 (en) * 1992-05-01 1992-06-17 Link Analytical Ltd X-ray analysis apparatus
CA2094343A1 (fr) * 1992-07-17 1994-01-18 Gerald L. Klein Methode et appareil d'affichage de donnees d'electrophorese capillaire
JP3461208B2 (ja) * 1994-09-16 2003-10-27 株式会社堀場製作所 試料に含まれる物質の同定方法および分布測定方法
JP3455306B2 (ja) * 1994-10-24 2003-10-14 三菱電機株式会社 異物分析装置及び半導体製造制御装置並びに異物分析方法及び半導体製造制御方法
US5586321A (en) * 1995-02-21 1996-12-17 Ramot Ltd. Diffracting token router and applications thereof
JPH08285799A (ja) * 1995-04-11 1996-11-01 Jeol Ltd 面分析装置
CN1720445B (zh) * 2002-10-08 2010-06-16 应用材料以色列公司 使用x-射线发射以用于制程监控的系统及方法
US7365320B2 (en) * 2002-10-08 2008-04-29 Applied Materials Israel, Ltd. Methods and systems for process monitoring using x-ray emission

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5548543U (fr) * 1978-09-26 1980-03-29
US4253154A (en) * 1979-01-11 1981-02-24 North American Philips Corporation Line scan and X-ray map enhancement of SEM X-ray data
US4331872A (en) * 1979-06-29 1982-05-25 Nippon Steel Corporation Method for measurement of distribution of inclusions in a slab by electron beam irradiation
US4439680A (en) * 1980-06-26 1984-03-27 Regents Of The University Of Minnesota Color-coded mapping system and method for identifying elements in a specimen
US4315282A (en) * 1980-09-11 1982-02-09 Electronic Devices Incorporated Write and edit circuitry for electronic marking of displayed TV signal images
JPS59163548A (ja) * 1983-03-09 1984-09-14 Central Res Inst Of Electric Power Ind 電子線回折像の自動分析方法

Also Published As

Publication number Publication date
FR2614103A1 (fr) 1988-10-21
US4857731A (en) 1989-08-15

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