[go: up one dir, main page]

FR2545650B1 - ELECTRON CANON AND ITS APPLICATION TO AN ELECTRON BEAM WELDING INSTALLATION - Google Patents

ELECTRON CANON AND ITS APPLICATION TO AN ELECTRON BEAM WELDING INSTALLATION

Info

Publication number
FR2545650B1
FR2545650B1 FR8307416A FR8307416A FR2545650B1 FR 2545650 B1 FR2545650 B1 FR 2545650B1 FR 8307416 A FR8307416 A FR 8307416A FR 8307416 A FR8307416 A FR 8307416A FR 2545650 B1 FR2545650 B1 FR 2545650B1
Authority
FR
France
Prior art keywords
electron
application
canon
beam welding
welding installation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8307416A
Other languages
French (fr)
Other versions
FR2545650A1 (en
Inventor
Jean-Pierre Hamon
Alain Gallay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR8307416A priority Critical patent/FR2545650B1/en
Publication of FR2545650A1 publication Critical patent/FR2545650A1/en
Application granted granted Critical
Publication of FR2545650B1 publication Critical patent/FR2545650B1/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/075Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR8307416A 1983-05-04 1983-05-04 ELECTRON CANON AND ITS APPLICATION TO AN ELECTRON BEAM WELDING INSTALLATION Expired FR2545650B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8307416A FR2545650B1 (en) 1983-05-04 1983-05-04 ELECTRON CANON AND ITS APPLICATION TO AN ELECTRON BEAM WELDING INSTALLATION

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8307416A FR2545650B1 (en) 1983-05-04 1983-05-04 ELECTRON CANON AND ITS APPLICATION TO AN ELECTRON BEAM WELDING INSTALLATION

Publications (2)

Publication Number Publication Date
FR2545650A1 FR2545650A1 (en) 1984-11-09
FR2545650B1 true FR2545650B1 (en) 1986-02-28

Family

ID=9288575

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8307416A Expired FR2545650B1 (en) 1983-05-04 1983-05-04 ELECTRON CANON AND ITS APPLICATION TO AN ELECTRON BEAM WELDING INSTALLATION

Country Status (1)

Country Link
FR (1) FR2545650B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2560966A (en) * 2017-03-30 2018-10-03 Aquasium Tech Limited Electron beam emitting assembly

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE750004C (en) * 1938-09-01 1944-12-11 Incandescent cathode for cathode ray tubes
FR1406540A (en) * 1963-06-03 1965-07-23 Varian Associates thermoelectronic transmitter for electronic discharge devices and method of manufacture

Also Published As

Publication number Publication date
FR2545650A1 (en) 1984-11-09

Similar Documents

Publication Publication Date Title
AU549326B2 (en) Electron beam lithography
DE3574521D1 (en) ELECTRON BEAM LITHOGRAPHY DEVICE.
GB2099626B (en) Electron beam blanker
GB2243943B (en) Electron beam tube arrangements
FR2584234B1 (en) INTEGRATED CIRCUIT TESTER WITH ELECTRON BEAM
DE3563273D1 (en) Novel electron beam resist materials
FR2544547B1 (en) ELECTRON CANON
JPS57196444A (en) Electron beam emission device
FR2625836B1 (en) ELECTRON COLLECTOR FOR ELECTRONIC TUBE
GB8304935D0 (en) Electron beam focussing
GB8319949D0 (en) Electron beam lithography
GB2244854B (en) Electron beam tube arrangements
DE69326224D1 (en) Electron beam lithography with reduced charging
EP0455502A3 (en) Electron beam welding
GB8516786D0 (en) Electron beam scrambler
DE69121533D1 (en) Electron beam generator for cathode ray tubes
FR2545650B1 (en) ELECTRON CANON AND ITS APPLICATION TO AN ELECTRON BEAM WELDING INSTALLATION
GB8409804D0 (en) Electron beam x-y coordinate
DE3572254D1 (en) A method of electron beam exposure
FR2537030B3 (en) ELECTRON BEAM WELDING INSTALLATION
FR2554969B1 (en) ELECTRON BEAM EVAPORATOR
FR2522440B1 (en) ELECTRON CANON
GB2273199B (en) Electron beam collector
DE3376888D1 (en) Electron beam sensitive resist
FR2634060B1 (en) ELECTRON SOURCE STRUCTURE AND APPLICATION TO ELECTROMAGNETIC WAVE EMISSION TUBES

Legal Events

Date Code Title Description
TP Transmission of property