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FR2511152B1 - Procede d'utilisation d'un vacuometre de pirani regle et vacuometre de pirani approprie - Google Patents

Procede d'utilisation d'un vacuometre de pirani regle et vacuometre de pirani approprie

Info

Publication number
FR2511152B1
FR2511152B1 FR8213711A FR8213711A FR2511152B1 FR 2511152 B1 FR2511152 B1 FR 2511152B1 FR 8213711 A FR8213711 A FR 8213711A FR 8213711 A FR8213711 A FR 8213711A FR 2511152 B1 FR2511152 B1 FR 2511152B1
Authority
FR
France
Prior art keywords
vacuometer
pirani
appropriate
set pirani
pirani vacuometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8213711A
Other languages
English (en)
Other versions
FR2511152A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2511152A1 publication Critical patent/FR2511152A1/fr
Application granted granted Critical
Publication of FR2511152B1 publication Critical patent/FR2511152B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR8213711A 1981-08-08 1982-08-05 Procede d'utilisation d'un vacuometre de pirani regle et vacuometre de pirani approprie Expired FR2511152B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19813131506 DE3131506A1 (de) 1981-08-08 1981-08-08 Verfahren zum betrieb eines geregelten pirani-vakuummeters und dafuer geeignetes pirani-vakuummeter

Publications (2)

Publication Number Publication Date
FR2511152A1 FR2511152A1 (fr) 1983-02-11
FR2511152B1 true FR2511152B1 (fr) 1985-07-19

Family

ID=6138945

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8213711A Expired FR2511152B1 (fr) 1981-08-08 1982-08-05 Procede d'utilisation d'un vacuometre de pirani regle et vacuometre de pirani approprie

Country Status (5)

Country Link
JP (1) JPS5830633A (fr)
CH (1) CH657703A5 (fr)
DE (1) DE3131506A1 (fr)
FR (1) FR2511152B1 (fr)
GB (1) GB2105472A (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3518388A1 (de) * 1985-05-22 1986-11-27 Leybold-Heraeus GmbH, 5000 Köln Messkopf
US4793181A (en) * 1987-06-02 1988-12-27 Djorup Robert Sonny Constant temperature sorption hygrometer
EP0312195A3 (fr) * 1987-08-19 1989-08-30 Genevac Limited Procédé et dispositif pour mesurer la pression du gaz
DE4205551A1 (de) * 1992-02-24 1993-08-26 Leybold Ag Schaltung zur temperaturkompensation eines geregelten waermeleitungsvakuummeters
DE4308433A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel
DE4308434A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter
US6658941B1 (en) 1997-07-21 2003-12-09 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
US6938493B2 (en) 1997-07-21 2005-09-06 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
US6023979A (en) * 1997-07-21 2000-02-15 Helix Technology Apparatus and methods for heat loss pressure measurement
CN106989867A (zh) * 2017-05-23 2017-07-28 核工业理化工程研究院 真空仪器的测量电路
JP7039327B2 (ja) * 2018-02-27 2022-03-22 新コスモス電機株式会社 ガスセンサおよびガス検知方法
EP3690417A1 (fr) 2019-02-01 2020-08-05 Sens4 A/S Appareil pour la mesure du vide à perte thermique ayant une compensation de température améliorée et une plage de mesure étendue
CN109974931A (zh) * 2019-04-30 2019-07-05 国网安徽省电力有限公司培训中心 一种防倒灌精准电子真空计
DE202023002902U1 (de) 2023-11-14 2025-01-09 Vacom Vakuum Komponenten & Messtechnik Gmbh Anordnung zum Betreiben des Pirani-Drucksensors

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1425001A (fr) * 1965-02-19 1966-01-14 Thomson Houston Comp Francaise Perfectionnements aux dispositifs de mesure de vide
GB1143002A (en) * 1965-09-08 1969-02-19 Servomex Controls Ltd Improvements in or relating to wheatstone bridge circuit arrangements
GB1210432A (en) * 1968-02-20 1970-10-28 Quicfit & Quartz Ltd Improvements in and relating to electronic circuits for temperature control
US3646815A (en) * 1970-03-26 1972-03-07 Bailey Meter Co Silicon pressure transducer circuit

Also Published As

Publication number Publication date
DE3131506A1 (de) 1983-03-17
JPS5830633A (ja) 1983-02-23
FR2511152A1 (fr) 1983-02-11
GB2105472A (en) 1983-03-23
CH657703A5 (de) 1986-09-15

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Legal Events

Date Code Title Description
ST Notification of lapse