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FR2412620B1 - - Google Patents

Info

Publication number
FR2412620B1
FR2412620B1 FR7832353A FR7832353A FR2412620B1 FR 2412620 B1 FR2412620 B1 FR 2412620B1 FR 7832353 A FR7832353 A FR 7832353A FR 7832353 A FR7832353 A FR 7832353A FR 2412620 B1 FR2412620 B1 FR 2412620B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7832353A
Other languages
French (fr)
Other versions
FR2412620A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Publication of FR2412620A1 publication Critical patent/FR2412620A1/en
Application granted granted Critical
Publication of FR2412620B1 publication Critical patent/FR2412620B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7832353A 1977-12-26 1978-11-16 Vapour-coating appts. for applying tungsten carbide to tip - includes vacuum chamber, vapour source heated by electron beam and assembly including spaced end plates and perforated barrels Granted FR2412620A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15562177A JPS5487683A (en) 1977-12-26 1977-12-26 Metal film depositing apparatus

Publications (2)

Publication Number Publication Date
FR2412620A1 FR2412620A1 (en) 1979-07-20
FR2412620B1 true FR2412620B1 (en) 1982-07-09

Family

ID=15609999

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7832353A Granted FR2412620A1 (en) 1977-12-26 1978-11-16 Vapour-coating appts. for applying tungsten carbide to tip - includes vacuum chamber, vapour source heated by electron beam and assembly including spaced end plates and perforated barrels

Country Status (2)

Country Link
JP (1) JPS5487683A (en)
FR (1) FR2412620A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1264025A (en) * 1987-05-29 1989-12-27 James A.E. Bell Apparatus and process for coloring objects by plasma coating
JPH07122132B2 (en) * 1990-11-01 1995-12-25 松下電器産業株式会社 Thin film forming method and thin film forming apparatus
US5997947A (en) * 1998-04-29 1999-12-07 United Technologies Corporation Rotisserie fixture for coating airfoils
EP0992605A3 (en) 1998-10-02 2002-11-13 Sumitomo Special Metals Co., Ltd. Support member, holder, process, and apparatus in the field of surface-treatment
JP3801418B2 (en) * 1999-05-14 2006-07-26 株式会社Ｎｅｏｍａｘ Surface treatment method
US6326056B1 (en) * 2000-02-16 2001-12-04 Specialty Coating Systems, Inc. Mobile cellular tumble coating method
CA2400407C (en) * 2000-02-16 2008-12-23 Joseph H. Yira Tumble coater
JP4560971B2 (en) * 2000-03-23 2010-10-13 日立金属株式会社 Vapor deposition film forming equipment
JP4483574B2 (en) * 2004-12-27 2010-06-16 日立金属株式会社 Deposition film forming method
JP4529763B2 (en) * 2005-03-30 2010-08-25 日立金属株式会社 Method of forming a deposition film of Al or its alloy on the surface of a workpiece

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1206010A (en) * 1958-04-30 1960-02-05 Int Resistance Co Method and apparatus for spraying film layers onto certain electrical parts
US3517644A (en) * 1965-06-23 1970-06-30 Mallory & Co Inc P R Apparatus for making metal alloy resistors
FR1480852A (en) * 1966-05-24 1967-05-12 Elettronica Metal Lux S P A Ceramic body support device
FR1521846A (en) * 1967-05-03 1968-04-19 Bayer Ag Method and device for vaporizing quartz or metals on small objects, in particular lenses
JPS48110425U (en) * 1972-03-29 1973-12-19
US3845739A (en) * 1972-04-17 1974-11-05 Xerox Corp System for vapor deposition of thin films
US3926147A (en) * 1974-11-15 1975-12-16 Mc Donnell Douglas Corp Glow discharge-tumbling vapor deposition apparatus

Also Published As

Publication number Publication date
JPS5487683A (en) 1979-07-12
FR2412620A1 (en) 1979-07-20
JPS561392B2 (en) 1981-01-13

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Legal Events

Date Code Title Description
ST Notification of lapse