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FR2410054A1 - Workpiece carrier for vacuum coating chambers - where aluminium throwaway shields prevent deposit reaching surface of carrier - Google Patents

Workpiece carrier for vacuum coating chambers - where aluminium throwaway shields prevent deposit reaching surface of carrier

Info

Publication number
FR2410054A1
FR2410054A1 FR7833571A FR7833571A FR2410054A1 FR 2410054 A1 FR2410054 A1 FR 2410054A1 FR 7833571 A FR7833571 A FR 7833571A FR 7833571 A FR7833571 A FR 7833571A FR 2410054 A1 FR2410054 A1 FR 2410054A1
Authority
FR
France
Prior art keywords
turntable
carrier
pref
holder
throwaway
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7833571A
Other languages
French (fr)
Other versions
FR2410054B3 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of FR2410054A1 publication Critical patent/FR2410054A1/en
Application granted granted Critical
Publication of FR2410054B3 publication Critical patent/FR2410054B3/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/04—Pattern deposit, e.g. by using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

The carrier consists of a turnable fitted with a circular row of holders, each with a flat top surface on which a workpiece rests and covers the holder. Each holder pref. projects upwards from the turnable, and contains spring loaded pegs used to lift or lower the workpiece. Each holder is pref. surrounded by a ring shield and/or the turntable is covered by a shield surrounding the holders. The shields prevent the deposition of the coating onto the turntable. The turntable is pref. located inside a vacuum chamber fitted with an air lock chamber employed for loading and unloading the workpieces on the turntable. Used e.g. in the deposition of coatings onto silicon wafers, where throw-away shields keep the coatings off the turntable.
FR7833571A 1977-11-29 1978-11-28 Workpiece carrier for vacuum coating chambers - where aluminium throwaway shields prevent deposit reaching surface of carrier Granted FR2410054A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4951277 1977-11-29

Publications (2)

Publication Number Publication Date
FR2410054A1 true FR2410054A1 (en) 1979-06-22
FR2410054B3 FR2410054B3 (en) 1981-10-02

Family

ID=10452601

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7833571A Granted FR2410054A1 (en) 1977-11-29 1978-11-28 Workpiece carrier for vacuum coating chambers - where aluminium throwaway shields prevent deposit reaching surface of carrier

Country Status (4)

Country Link
JP (1) JPS5493680A (en)
DE (1) DE2851255A1 (en)
FR (1) FR2410054A1 (en)
NL (1) NL7811709A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4403567A (en) * 1980-08-21 1983-09-13 Commonwealth Scientific Corporation Workpiece holder
DE3623970A1 (en) * 1986-07-16 1988-01-28 Leybold Heraeus Gmbh & Co Kg TRANSPORTATION DEVICE WITH ROLLER SYSTEMS FOR VACUUM COATING SYSTEMS
DE3803411A1 (en) * 1988-02-05 1989-08-17 Leybold Ag DEVICE FOR HOLDING WORKPIECES

Also Published As

Publication number Publication date
DE2851255A1 (en) 1979-05-31
NL7811709A (en) 1979-05-31
FR2410054B3 (en) 1981-10-02
JPS5493680A (en) 1979-07-24

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Legal Events

Date Code Title Description
ST Notification of lapse