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FR2406236A1 - Dispositif optique a source coherente pour le transfert rapide de motifs sur substrats, applique a la realisation de composants et circuits a microstructures - Google Patents

Dispositif optique a source coherente pour le transfert rapide de motifs sur substrats, applique a la realisation de composants et circuits a microstructures

Info

Publication number
FR2406236A1
FR2406236A1 FR7637327A FR7637327A FR2406236A1 FR 2406236 A1 FR2406236 A1 FR 2406236A1 FR 7637327 A FR7637327 A FR 7637327A FR 7637327 A FR7637327 A FR 7637327A FR 2406236 A1 FR2406236 A1 FR 2406236A1
Authority
FR
France
Prior art keywords
patterns
microstructure
realization
substrates
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7637327A
Other languages
English (en)
Other versions
FR2406236B1 (fr
Inventor
Georges Dubroeucq
Michel Lacombat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7637327A priority Critical patent/FR2406236A1/fr
Priority to US05/858,402 priority patent/US4132479A/en
Priority to NL7713527A priority patent/NL7713527A/xx
Priority to GB51039/77A priority patent/GB1582069A/en
Priority to DE19772755047 priority patent/DE2755047A1/de
Priority to JP14867177A priority patent/JPS5372575A/ja
Publication of FR2406236A1 publication Critical patent/FR2406236A1/fr
Application granted granted Critical
Publication of FR2406236B1 publication Critical patent/FR2406236B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70583—Speckle reduction, e.g. coherence control or amplitude/wavefront splitting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

L'invention se rapporte aux dispositifs optiques destinés au transfert de motifs sur une surface photosensible. Le dispositif photoreproducteur selon l'invention comprend une source de rayonnement cohérent destinée à fournir pendant une durée déterminée un éclairement de la surface photosensible associée à des moyens de transmission introduisant une modulation de phase du rayonnement destinés à moyenner, pendant le temps d'exposition, les figures d'interférence engendrées par la cohérence du rayonnement L'invention s'applique notamment aux machines de transfert par contact, proximité ou projection, aux photorépéteurs de masques et aux photorépéteurs directs.
FR7637327A 1976-12-10 1976-12-10 Dispositif optique a source coherente pour le transfert rapide de motifs sur substrats, applique a la realisation de composants et circuits a microstructures Granted FR2406236A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7637327A FR2406236A1 (fr) 1976-12-10 1976-12-10 Dispositif optique a source coherente pour le transfert rapide de motifs sur substrats, applique a la realisation de composants et circuits a microstructures
US05/858,402 US4132479A (en) 1976-12-10 1977-12-07 Pattern transfer optical system
NL7713527A NL7713527A (nl) 1976-12-10 1977-12-07 Optische transferinrichting.
GB51039/77A GB1582069A (en) 1976-12-10 1977-12-07 Pattern transfer optical system
DE19772755047 DE2755047A1 (de) 1976-12-10 1977-12-09 Vorrichtung zur uebertragung von zusammengesetzten motiven
JP14867177A JPS5372575A (en) 1976-12-10 1977-12-10 Pattern transfer optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7637327A FR2406236A1 (fr) 1976-12-10 1976-12-10 Dispositif optique a source coherente pour le transfert rapide de motifs sur substrats, applique a la realisation de composants et circuits a microstructures

Publications (2)

Publication Number Publication Date
FR2406236A1 true FR2406236A1 (fr) 1979-05-11
FR2406236B1 FR2406236B1 (fr) 1980-03-28

Family

ID=9180926

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7637327A Granted FR2406236A1 (fr) 1976-12-10 1976-12-10 Dispositif optique a source coherente pour le transfert rapide de motifs sur substrats, applique a la realisation de composants et circuits a microstructures

Country Status (6)

Country Link
US (1) US4132479A (fr)
JP (1) JPS5372575A (fr)
DE (1) DE2755047A1 (fr)
FR (1) FR2406236A1 (fr)
GB (1) GB1582069A (fr)
NL (1) NL7713527A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0025397A1 (fr) * 1979-09-10 1981-03-18 Thomson-Csf Dispositif illuminateur destiné à fournir un faisceau d'éclairement à distribution d'intensité ajustable et système de transfert de motifs comprenant un tel dispositif
FR2519156A1 (fr) * 1981-12-28 1983-07-01 Thomson Csf Dispositif optique a source d'energie radiante pour le transfert de motifs sur un substrat et procede de mise en oeuvre

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4252400A (en) * 1978-08-09 1981-02-24 Honeywell Inc. Nondestructive dynamic controller for thermoplastic development
FR2455298A1 (fr) * 1979-04-23 1980-11-21 Thomson Csf Dispositif illuminateur destine a fournir un faisceau d'eclairement divergent a partir d'une zone predeterminee d'un plan et systeme de transfert de motifs comprenant un tel dispositif
FR2455299A1 (fr) * 1979-04-23 1980-11-21 Thomson Csf Illuminateur a lampe a arc et dispositif optique de transfert par projection comportant un tel illuminateur
FR2465255B1 (fr) * 1979-09-10 1987-02-20 Roumiguieres Jean Louis Procede pour reporter sur un support l'ombre fidele d'un masque perce de fentes distribuees periodiquement, et application de ce procede notamment en photolithogravure
JPS5726445A (en) * 1980-07-24 1982-02-12 Nec Corp Laser annealing device
DE3212393A1 (de) * 1982-04-02 1983-10-13 Karl Süss KG, Präzisionsgeräte für Wissenschaft und Industrie - GmbH & Co, 8046 Garching Verfahren zur interferenzverschmierung sowie ausrichtverfahren und -vorrichtung
GB2153543B (en) * 1983-12-28 1988-09-01 Canon Kk A projection exposure apparatus
JPH065660B2 (ja) * 1985-01-11 1994-01-19 キヤノン株式会社 露光装置
US4653903A (en) * 1984-01-24 1987-03-31 Canon Kabushiki Kaisha Exposure apparatus
JPH0715875B2 (ja) * 1984-12-27 1995-02-22 キヤノン株式会社 露光装置及び方法
US5091744A (en) * 1984-02-13 1992-02-25 Canon Kabushiki Kaisha Illumination optical system
WO1986000427A1 (fr) * 1984-06-21 1986-01-16 American Telephone & Telegraph Company Lithographie a rayons ultraviolets profonds
JPH0614508B2 (ja) * 1985-03-06 1994-02-23 キヤノン株式会社 ステップアンドリピート露光方法
JPH0793252B2 (ja) * 1986-10-27 1995-10-09 株式会社ニコン 露光装置
DE3750174T2 (de) * 1986-10-30 1994-11-17 Canon K.K., Tokio/Tokyo Belichtungseinrichtung.
JPS63173322A (ja) * 1987-01-13 1988-07-16 Toshiba Corp 半導体露光装置
JPH0770459B2 (ja) * 1987-03-03 1995-07-31 株式会社ニコン 露光装置及び半導体製造装置
JPH0770460B2 (ja) * 1987-04-16 1995-07-31 株式会社ニコン 投影露光装置
JPS6428916A (en) * 1987-07-24 1989-01-31 Canon Kk Aligner
JP2653793B2 (ja) * 1987-09-04 1997-09-17 キヤノン株式会社 露光装置及び素子製造方法
JP2569711B2 (ja) * 1988-04-07 1997-01-08 株式会社ニコン 露光制御装置及び該装置による露光方法
JPH021904A (ja) * 1988-06-10 1990-01-08 Mitsubishi Electric Corp マスクの露光方法
JPS6477124A (en) * 1988-07-29 1989-03-23 Hitachi Ltd Projection type exposure device
US7656504B1 (en) 1990-08-21 2010-02-02 Nikon Corporation Projection exposure apparatus with luminous flux distribution
US5638211A (en) 1990-08-21 1997-06-10 Nikon Corporation Method and apparatus for increasing the resolution power of projection lithography exposure system
US5719704A (en) 1991-09-11 1998-02-17 Nikon Corporation Projection exposure apparatus
US6897942B2 (en) * 1990-11-15 2005-05-24 Nikon Corporation Projection exposure apparatus and method
US6252647B1 (en) 1990-11-15 2001-06-26 Nikon Corporation Projection exposure apparatus
US6710855B2 (en) * 1990-11-15 2004-03-23 Nikon Corporation Projection exposure apparatus and method
US6885433B2 (en) * 1990-11-15 2005-04-26 Nikon Corporation Projection exposure apparatus and method
US6967710B2 (en) 1990-11-15 2005-11-22 Nikon Corporation Projection exposure apparatus and method
JP2501053B2 (ja) * 1991-10-04 1996-05-29 株式会社日立製作所 紫外パルスレ―ザによる投影式露光方法
JPH06168862A (ja) * 1992-06-30 1994-06-14 Think Lab Kk 半導体レーザ露光装置
JPH07105337B2 (ja) * 1994-04-22 1995-11-13 株式会社日立製作所 パターン刻印装置
JP2530423B2 (ja) * 1994-04-22 1996-09-04 株式会社日立製作所 パタ−ン刻印装置
US6930754B1 (en) * 1998-06-30 2005-08-16 Canon Kabushiki Kaisha Multiple exposure method
DE19946594A1 (de) * 1999-09-29 2001-04-12 Zeiss Carl Jena Gmbh Mikroskop, vorzugsweise zur Inspektion bei der Halbleiterfertigung
WO2005078522A2 (fr) * 2004-02-17 2005-08-25 Carl Zeiss Smt Ag Systeme d'eclairage pour un appareil d'exposition par projection microlithographique
JP2009049192A (ja) * 2007-08-20 2009-03-05 Canon Inc レンズの交換方法および代替レンズの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3407294A (en) * 1966-03-01 1968-10-22 Lear Siegler Inc Method for redistributing laser light
US3732796A (en) * 1970-07-09 1973-05-15 Thomson Csf Line tracing systems using laser energy for exposing photo-sensitive substrates
US3988066A (en) * 1974-01-12 1976-10-26 Canon Kabushiki Kaisha Light exposure apparatus for printing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0025397A1 (fr) * 1979-09-10 1981-03-18 Thomson-Csf Dispositif illuminateur destiné à fournir un faisceau d'éclairement à distribution d'intensité ajustable et système de transfert de motifs comprenant un tel dispositif
FR2465241A1 (fr) * 1979-09-10 1981-03-20 Thomson Csf Dispositif illuminateur destine a fournir un faisceau d'eclairement a distribution d'intensite ajustable et systeme de transfert de motifs comprenant un tel dispositif
FR2519156A1 (fr) * 1981-12-28 1983-07-01 Thomson Csf Dispositif optique a source d'energie radiante pour le transfert de motifs sur un substrat et procede de mise en oeuvre

Also Published As

Publication number Publication date
DE2755047A1 (de) 1978-06-15
JPS5372575A (en) 1978-06-28
US4132479A (en) 1979-01-02
FR2406236B1 (fr) 1980-03-28
GB1582069A (en) 1980-12-31
NL7713527A (nl) 1978-06-13
DE2755047C2 (fr) 1987-12-10

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