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FR2402782A1 - Pompe a membrane - Google Patents

Pompe a membrane

Info

Publication number
FR2402782A1
FR2402782A1 FR7825590A FR7825590A FR2402782A1 FR 2402782 A1 FR2402782 A1 FR 2402782A1 FR 7825590 A FR7825590 A FR 7825590A FR 7825590 A FR7825590 A FR 7825590A FR 2402782 A1 FR2402782 A1 FR 2402782A1
Authority
FR
France
Prior art keywords
pressure
diaphragm
pump
piston
delivery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7825590A
Other languages
English (en)
Inventor
Hans Wilms
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wilms GmbH
Original Assignee
Wilms GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wilms GmbH filed Critical Wilms GmbH
Publication of FR2402782A1 publication Critical patent/FR2402782A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
    • F04B43/026—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel each plate-like pumping flexible member working in its own pumping chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/067—Pumps having fluid drive the fluid being actuated directly by a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F04B9/10—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid
    • F04B9/109—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having plural pumping chambers
    • F04B9/111—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having plural pumping chambers with two mechanically connected pumping members
    • F04B9/113—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having plural pumping chambers with two mechanically connected pumping members reciprocating movement of the pumping members being obtained by a double-acting liquid motor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

L'invention concerne une pompe à membrane du genre dans lequel la membrane est actionnée par un piston moteur à mouvement de va-et-vient avec interposition d'une soupape de fluide hydraulique et dans lequel la pression du fluide hydraulique est annulée dans la chambre de travail située entre le piston et la membrane lorsque l'on atteint une contre-pression de refoulement maximale. Cette pompe est caractérisée, notamment, par le fait qu'elle comprend un piston moteur 35 à entraînement hydraulique. Avantageusement on peut agir sur cet entraînement hydraulique 1 par l'intermédiaire de la pression régnant dans le volume de travail 4 ou dans la chambre de refoulement 61, pour obtenir l'annulation de l'alimentation en fluide sous pression. Application au refoulement de fluides divers et, en particulier, des fluides abrasifs et/ou fortement visqueux.
FR7825590A 1977-09-12 1978-09-06 Pompe a membrane Withdrawn FR2402782A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19772741024 DE2741024A1 (de) 1977-09-12 1977-09-12 Membranpumpe

Publications (1)

Publication Number Publication Date
FR2402782A1 true FR2402782A1 (fr) 1979-04-06

Family

ID=6018748

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7825590A Withdrawn FR2402782A1 (fr) 1977-09-12 1978-09-06 Pompe a membrane

Country Status (10)

Country Link
JP (1) JPS5452304A (fr)
BR (1) BR7805911A (fr)
CH (1) CH634129A5 (fr)
DE (1) DE2741024A1 (fr)
ES (1) ES473241A1 (fr)
FR (1) FR2402782A1 (fr)
GB (1) GB2003975A (fr)
IT (1) IT1098595B (fr)
NL (1) NL7809068A (fr)
SE (1) SE7809534L (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2623570A1 (fr) * 1987-11-20 1989-05-26 Rech Fabrication Indle Et Multiplicateur de pression a fluide intermediaire

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192888A (ja) * 1984-03-13 1985-10-01 Yamada Yuki Seizo Kk 複数種流動材定量吐出装置
JPS62102880U (fr) * 1985-12-19 1987-06-30
DE3706338A1 (de) * 1987-02-27 1988-09-08 Wagner Gmbh J Membranpumpvorrichtung
DE8801660U1 (de) * 1988-02-10 1988-03-31 Henkel, Wolfgang Eberhard, 6832 Hockenheim Membrandehnungsmeßgerät für Kugelmembranpumpen
JPH01245812A (ja) * 1988-03-28 1989-10-02 Takeshi Hoya スラリー圧送方法及び装置
DE3907735A1 (de) * 1989-03-10 1990-09-20 Bran & Luebbe Membranpumpe mit freischwingender metallmembran
ATE133471T1 (de) * 1991-05-03 1996-02-15 Hans Willi Meinz Verfahren und vorrichtung zur kontrollierten dosierung mindestenseiner fliessfähigen komponente
NL9101556A (nl) * 1991-09-16 1993-04-16 Holthuis Bv Besturingssysteem voor zuigermembraanpomp.
DE4319803A1 (de) * 1993-06-15 1994-12-22 Ihd Werkzeugmaschinen Handelsg Hydraulische Pumpeneinrichtung
TW539918B (en) 1997-05-27 2003-07-01 Tokyo Electron Ltd Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
JP5073902B2 (ja) 1999-11-02 2012-11-14 東京エレクトロン株式会社 多数のワークピースを超臨界処理する方法及び装置
US6561774B2 (en) 2000-06-02 2003-05-13 Tokyo Electron Limited Dual diaphragm pump
JP4724353B2 (ja) 2000-07-26 2011-07-13 東京エレクトロン株式会社 半導体基板のための高圧処理チャンバー
US7001468B1 (en) 2002-02-15 2006-02-21 Tokyo Electron Limited Pressure energized pressure vessel opening and closing device and method of providing therefor
US7387868B2 (en) 2002-03-04 2008-06-17 Tokyo Electron Limited Treatment of a dielectric layer using supercritical CO2
US7021635B2 (en) 2003-02-06 2006-04-04 Tokyo Electron Limited Vacuum chuck utilizing sintered material and method of providing thereof
US7225820B2 (en) 2003-02-10 2007-06-05 Tokyo Electron Limited High-pressure processing chamber for a semiconductor wafer
US7077917B2 (en) 2003-02-10 2006-07-18 Tokyo Electric Limited High-pressure processing chamber for a semiconductor wafer
US7270137B2 (en) 2003-04-28 2007-09-18 Tokyo Electron Limited Apparatus and method of securing a workpiece during high-pressure processing
US7163380B2 (en) 2003-07-29 2007-01-16 Tokyo Electron Limited Control of fluid flow in the processing of an object with a fluid
US7186093B2 (en) 2004-10-05 2007-03-06 Tokyo Electron Limited Method and apparatus for cooling motor bearings of a high pressure pump
US7250374B2 (en) 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US7140393B2 (en) 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US7434590B2 (en) 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7435447B2 (en) 2005-02-15 2008-10-14 Tokyo Electron Limited Method and system for determining flow conditions in a high pressure processing system
US7380984B2 (en) 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7494107B2 (en) 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
US7524383B2 (en) 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber
DE102010005362A1 (de) * 2009-01-22 2010-07-29 Robert Bosch Gmbh Hydromaschinenanordnung
GB2518411B (en) * 2013-09-20 2020-04-29 Alveier Ltd Pump Control
CN108119344B (zh) * 2018-02-10 2024-06-04 台州信溢农业机械有限公司 一种具有阻尼功能的自动控制电动隔膜泵
CN114856954B (zh) * 2022-07-07 2022-11-04 中建环能科技股份有限公司 活塞泵及具有该活塞泵的废水处理装置
CN115405505A (zh) * 2022-09-28 2022-11-29 上海羿弓氢能科技有限公司 一种液驱隔膜式氢气充装压缩机

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2623570A1 (fr) * 1987-11-20 1989-05-26 Rech Fabrication Indle Et Multiplicateur de pression a fluide intermediaire

Also Published As

Publication number Publication date
BR7805911A (pt) 1979-05-08
IT7827551A0 (it) 1978-09-12
ES473241A1 (es) 1979-03-16
JPS5452304A (en) 1979-04-24
CH634129A5 (de) 1983-01-14
SE7809534L (sv) 1979-03-13
DE2741024A1 (de) 1979-03-22
NL7809068A (nl) 1979-03-14
GB2003975A (en) 1979-03-21
IT1098595B (it) 1985-09-07

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Legal Events

Date Code Title Description
ST Notification of lapse