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FR2354548A1 - Procede et dispositif pour la mesure continue de pressions gazeuses - Google Patents

Procede et dispositif pour la mesure continue de pressions gazeuses

Info

Publication number
FR2354548A1
FR2354548A1 FR7717542A FR7717542A FR2354548A1 FR 2354548 A1 FR2354548 A1 FR 2354548A1 FR 7717542 A FR7717542 A FR 7717542A FR 7717542 A FR7717542 A FR 7717542A FR 2354548 A1 FR2354548 A1 FR 2354548A1
Authority
FR
France
Prior art keywords
gas
continuous measurement
pressure
pressures
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7717542A
Other languages
English (en)
Other versions
FR2354548B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Berlin Brandenburg Academy of Sciences and Humanities
Original Assignee
Berlin Brandenburg Academy of Sciences and Humanities
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DD19324176A external-priority patent/DD126041B1/de
Priority claimed from DD19706777A external-priority patent/DD130805B1/de
Application filed by Berlin Brandenburg Academy of Sciences and Humanities filed Critical Berlin Brandenburg Academy of Sciences and Humanities
Publication of FR2354548A1 publication Critical patent/FR2354548A1/fr
Application granted granted Critical
Publication of FR2354548B1 publication Critical patent/FR2354548B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

a. Procédé et dispositif pour mesurer en continu des pressionsm gazeuses ; b. Procédé consistant essentiellement en ce que la pression* du gaz à mesurer est modulée dans un petit volume partiel et les variations de pression ainsi produites sont converties en signaux électriques, qui sont proportionnels à la pression du gaz que l'on mesure; un dispositif est prévu pour la réalisation de ce procédé; c. L'invention trouve son application principale dans les mesures de pressions gazeuses, en particulier dans la technique du vide
FR7717542A 1976-06-08 1977-06-08 Procede et dispositif pour la mesure continue de pressions gazeuses Granted FR2354548A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD19324176A DD126041B1 (de) 1976-06-08 1976-06-08 Vorrichtung zur kontinuierlichen messung von gasdruecken
DD19706777A DD130805B1 (de) 1977-01-25 1977-01-25 Vorrichtung zur kontinuierlichen messung von gasdruecken

Publications (2)

Publication Number Publication Date
FR2354548A1 true FR2354548A1 (fr) 1978-01-06
FR2354548B1 FR2354548B1 (fr) 1982-05-21

Family

ID=25747569

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7717542A Granted FR2354548A1 (fr) 1976-06-08 1977-06-08 Procede et dispositif pour la mesure continue de pressions gazeuses

Country Status (5)

Country Link
US (1) US4154115A (fr)
JP (1) JPS5322484A (fr)
DE (1) DE2722560A1 (fr)
FR (1) FR2354548A1 (fr)
GB (1) GB1585567A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2504265A1 (fr) * 1981-04-15 1982-10-22 Detaint Jacques Dispositif de mesure de la pression d'un gaz
EP0130448A2 (fr) * 1983-06-29 1985-01-09 VEB Hochvakuum Dresden Procédé et dispositif de protection de cellules de mesure et d'autres éléments sensibles contre la pollution et la corrosion

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4098133A (en) * 1977-05-16 1978-07-04 Sperry Rand Corporation Vibrating diaphragm fluid pressure sensor device
JPS5524423A (en) * 1978-08-10 1980-02-21 Nissan Motor Co Ltd Semiconductor pressure sensor
CA1183594A (fr) * 1981-04-22 1985-03-05 Robert C. Jaklevic Sonde de pression absolue
DE3324478A1 (de) * 1983-07-07 1985-01-24 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zum reinigen von gasen
DE3325188A1 (de) * 1983-07-13 1985-01-24 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur messung des druckes eines gasfoermigen mediums
US4930357A (en) * 1986-11-21 1990-06-05 Allied-Signal Inc. Fluidic volumetric fluid flow meter
US4949755A (en) * 1986-11-21 1990-08-21 Allied-Signal Inc. Fluidic volumetric fluid flow meter
DE3705901C2 (de) * 1987-02-24 1996-12-12 Siemens Ag Druckmeßwandler
US5962791A (en) * 1998-07-16 1999-10-05 Balzers Aktiengellschaft Pirani+capacitive sensor
US10870577B2 (en) 2018-10-05 2020-12-22 Knowles Electronics, Llc Methods of forming MEMS diaphragms including corrugations
CN112823532B (zh) 2018-10-05 2022-05-31 美商楼氏电子有限公司 具有入口防护部的麦克风设备
CN112840676B (zh) 2018-10-05 2022-05-03 美商楼氏电子有限公司 响应于声学信号来生成电信号的声学换能器和麦克风组件
US12240748B2 (en) 2021-03-21 2025-03-04 Knowles Electronics, Llc MEMS die and MEMS-based sensor
US11528546B2 (en) 2021-04-05 2022-12-13 Knowles Electronics, Llc Sealed vacuum MEMS die
US11540048B2 (en) 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
US11649161B2 (en) 2021-07-26 2023-05-16 Knowles Electronics, Llc Diaphragm assembly with non-uniform pillar distribution
US11772961B2 (en) 2021-08-26 2023-10-03 Knowles Electronics, Llc MEMS device with perimeter barometric relief pierce
US11780726B2 (en) 2021-11-03 2023-10-10 Knowles Electronics, Llc Dual-diaphragm assembly having center constraint

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2978899A (en) * 1956-02-10 1961-04-11 Kritz Jack Ultrasonic system for measuring the physical characteristics of a gas
US3295360A (en) * 1965-04-21 1967-01-03 Dimeff John Dynamic sensor
US3399572A (en) * 1966-12-01 1968-09-03 Gen Precision Inc Vibrating beam pressure transducer
US3425281A (en) * 1965-01-15 1969-02-04 Leybold Holding Ag Vacuum gauge apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3233461A (en) * 1962-05-23 1966-02-08 Bolt Beranek & Newman Method of and apparatus for measuring pressure and density
US3557621A (en) * 1969-07-07 1971-01-26 C G S Scient Corp Inc Variable capacitance detecting devices

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2978899A (en) * 1956-02-10 1961-04-11 Kritz Jack Ultrasonic system for measuring the physical characteristics of a gas
US3425281A (en) * 1965-01-15 1969-02-04 Leybold Holding Ag Vacuum gauge apparatus
US3295360A (en) * 1965-04-21 1967-01-03 Dimeff John Dynamic sensor
US3399572A (en) * 1966-12-01 1968-09-03 Gen Precision Inc Vibrating beam pressure transducer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2504265A1 (fr) * 1981-04-15 1982-10-22 Detaint Jacques Dispositif de mesure de la pression d'un gaz
EP0130448A2 (fr) * 1983-06-29 1985-01-09 VEB Hochvakuum Dresden Procédé et dispositif de protection de cellules de mesure et d'autres éléments sensibles contre la pollution et la corrosion
EP0130448A3 (en) * 1983-06-29 1986-06-25 Veb Hochvakuum Dresden Process and device for protecting measuring units and other sensitive elements against pollution and corrosion

Also Published As

Publication number Publication date
FR2354548B1 (fr) 1982-05-21
GB1585567A (en) 1981-03-04
DE2722560A1 (de) 1977-12-22
DE2722560C2 (fr) 1987-08-13
JPS5322484A (en) 1978-03-01
US4154115A (en) 1979-05-15

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Legal Events

Date Code Title Description
ST Notification of lapse