[go: up one dir, main page]

FR2336796A1 - PROCESS FOR THE THERMAL TREATMENT OF SEMICONDUCTOR DISCS - Google Patents

PROCESS FOR THE THERMAL TREATMENT OF SEMICONDUCTOR DISCS

Info

Publication number
FR2336796A1
FR2336796A1 FR7638503A FR7638503A FR2336796A1 FR 2336796 A1 FR2336796 A1 FR 2336796A1 FR 7638503 A FR7638503 A FR 7638503A FR 7638503 A FR7638503 A FR 7638503A FR 2336796 A1 FR2336796 A1 FR 2336796A1
Authority
FR
France
Prior art keywords
thermal treatment
semiconductor discs
discs
semiconductor
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7638503A
Other languages
French (fr)
Other versions
FR2336796B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19752558041 external-priority patent/DE2558041C3/en
Priority claimed from DE19762619444 external-priority patent/DE2619444C2/en
Priority claimed from DE19762629951 external-priority patent/DE2629951C2/en
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of FR2336796A1 publication Critical patent/FR2336796A1/en
Application granted granted Critical
Publication of FR2336796B1 publication Critical patent/FR2336796B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G33/00—Screw or rotary spiral conveyors
    • B65G33/02—Screw or rotary spiral conveyors for articles
    • B65G33/06—Screw or rotary spiral conveyors for articles conveyed and guided by parallel screws
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C30B31/106—Continuous processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7638503A 1975-12-22 1976-12-21 PROCESS FOR THE THERMAL TREATMENT OF SEMICONDUCTOR DISCS Granted FR2336796A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19752558041 DE2558041C3 (en) 1975-12-22 1975-12-22 Method for transporting semiconductor wafers through a temperature treatment tube
DE19762619444 DE2619444C2 (en) 1975-12-22 1976-05-03 Device for carrying out a method for transporting semiconductor wafers
DE19762629951 DE2629951C2 (en) 1975-12-22 1976-07-02 Method for transporting semiconductor wafers through a temperature treatment tube

Publications (2)

Publication Number Publication Date
FR2336796A1 true FR2336796A1 (en) 1977-07-22
FR2336796B1 FR2336796B1 (en) 1983-01-21

Family

ID=27186673

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7638503A Granted FR2336796A1 (en) 1975-12-22 1976-12-21 PROCESS FOR THE THERMAL TREATMENT OF SEMICONDUCTOR DISCS

Country Status (4)

Country Link
JP (1) JPS5277674A (en)
FR (1) FR2336796A1 (en)
GB (1) GB1502754A (en)
IT (1) IT1067293B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55148433A (en) * 1979-05-08 1980-11-19 Nec Corp Manufacture of semiconductor device and device therefor

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1342183A (en) * 1919-12-29 1920-06-01 Ransom George Hardiman Wind-screen for use on conveyances and like purposes
FR2019940A1 (en) * 1968-10-04 1970-07-10 Siemens Ag
FR2022140A1 (en) * 1968-08-29 1970-07-31 Texas Instruments Inc
FR2046220A5 (en) * 1969-05-19 1971-03-05 Ibm
US3638927A (en) * 1969-08-01 1972-02-01 Texas Instruments Inc Slice conveyor furnace
FR2144678A1 (en) * 1971-07-07 1973-02-16 Siemens Ag
US3772756A (en) * 1972-02-23 1973-11-20 Concep Machine Co Inc Core handling system
FR2192872A1 (en) * 1972-07-19 1974-02-15 Siemens Ag
DE2357319A1 (en) * 1973-11-16 1975-05-28 Denki Kagaku Kogyo Kk Sintered phosphorus nitride-silica doping agent - with long duration diffusion stability for semiconductors
DE2411142A1 (en) * 1974-03-08 1975-10-09 Bosch Gmbh Robert Cop vessel sterilising equipment - transports through spray and drier by spiral grooved spindles accommodating vessel flanges

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1342183A (en) * 1919-12-29 1920-06-01 Ransom George Hardiman Wind-screen for use on conveyances and like purposes
FR2022140A1 (en) * 1968-08-29 1970-07-31 Texas Instruments Inc
FR2019940A1 (en) * 1968-10-04 1970-07-10 Siemens Ag
FR2046220A5 (en) * 1969-05-19 1971-03-05 Ibm
US3638927A (en) * 1969-08-01 1972-02-01 Texas Instruments Inc Slice conveyor furnace
FR2144678A1 (en) * 1971-07-07 1973-02-16 Siemens Ag
US3772756A (en) * 1972-02-23 1973-11-20 Concep Machine Co Inc Core handling system
FR2192872A1 (en) * 1972-07-19 1974-02-15 Siemens Ag
DE2357319A1 (en) * 1973-11-16 1975-05-28 Denki Kagaku Kogyo Kk Sintered phosphorus nitride-silica doping agent - with long duration diffusion stability for semiconductors
DE2411142A1 (en) * 1974-03-08 1975-10-09 Bosch Gmbh Robert Cop vessel sterilising equipment - transports through spray and drier by spiral grooved spindles accommodating vessel flanges

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/74 *

Also Published As

Publication number Publication date
JPS5277674A (en) 1977-06-30
GB1502754A (en) 1978-03-01
IT1067293B (en) 1985-03-16
FR2336796B1 (en) 1983-01-21

Similar Documents

Publication Publication Date Title
PT65029B (en) HYDROMETALLURGICAL PROCESS FOR THE TREATMENT OF MINERALSULFIDES
RO74936A (en) PROCESS FOR THE PREPARATION OF MERCAPTOAZETIDIONES
RO64682A (en) PROCESS FOR THE PURIFICATION OF CHLORESILANES
FR2294137A1 (en) PROCESS FOR THE HEAT TREATMENT OF GLASS
FR2318945A1 (en) PROCESS AND INSTALLATION FOR TREATMENT OF BATTITURES
BE790282A (en) PERFECTED APPARATUS FOR THE MANUFACTURING OF TILES
BE878673A (en) PROCESS FOR THE HEAT TREATMENT OF ALUMINUM-COPPER-MAGNESIUM-SILICON ALLOYS
FR2306223A1 (en) PROCESS FOR THE FINISHING OF TETRAFLUOROETHYLENE-HEXAFLUOROPROPYLENE COPOLYMERS
BE844064A (en) PROCESS FOR SUPERFINITION OF SEMICONDUCTOR SURFACES
RO69904A (en) PROCESS FOR THE PREPARATION OF 4-SUBSTITUTED 1 ((1-BENZAZOLYL) -ALKYL) -PIPERIDYNE
BE770725A (en) Process for the treatment of electrodes
RO71132A (en) PROCESS FOR THE HEAT TREATMENT OF FER-SILICON ALLIAGIA SEMI-PRODUCTS
BE792042A (en) PROCESS FOR THE PREPARATION OF NEW ALCENYLENE-AMINES SUBSTITUTED IN 3
FR2312002A1 (en) METHOD FOR THERMAL TREATMENT OF PULVERULENT MATERIAL
RO70079A (en) PROCESS FOR THE PREPARATION OF N-ARYL-N- (4-PYPERIDINYL) -LARYLACETAMIDES
BE847206A (en) METHOD AND ARRANGEMENT FOR THE THEM TREATMENT OF PULVERULENT MATERIAL,
BE792260A (en) METHOD AND COMPOSITION FOR THE TREATMENT OF
FR2324743A1 (en) PROCESS FOR THERMAL TREATMENT OF NEEDLE PARTS
RO75791A (en) PROCESS FOR THE THERMAL TREATMENT OF MATERIALS
FR2336796A1 (en) PROCESS FOR THE THERMAL TREATMENT OF SEMICONDUCTOR DISCS
RO68997A (en) PROCESS FOR THE PREPARATION OF PHENYL-DERIVATIVES
RO77799A (en) METHOD AND DEVICE FOR THE PRELIMINARY THERMAL TREATMENT OF AGGLUTINANT LAHOUILLE
RO72558A (en) PROCESS FOR THE PREPARATION OF CYCLOALCANPYRAZOLES
BE816114A (en) DEVICE FOR THE THERMAL TREATMENT OF DIGERATED SLUDGE
FR2331565A1 (en) PROCESS FOR THE PREPARATION OF TRIARYLBORANE

Legal Events

Date Code Title Description
ST Notification of lapse