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FR2326030A1 - Microscope electronique a balayage pour le controle de structures d'objets - Google Patents

Microscope electronique a balayage pour le controle de structures d'objets

Info

Publication number
FR2326030A1
FR2326030A1 FR7628344A FR7628344A FR2326030A1 FR 2326030 A1 FR2326030 A1 FR 2326030A1 FR 7628344 A FR7628344 A FR 7628344A FR 7628344 A FR7628344 A FR 7628344A FR 2326030 A1 FR2326030 A1 FR 2326030A1
Authority
FR
France
Prior art keywords
control
scanning microscope
electronic scanning
object structures
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7628344A
Other languages
English (en)
Other versions
FR2326030B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of FR2326030A1 publication Critical patent/FR2326030A1/fr
Application granted granted Critical
Publication of FR2326030B1 publication Critical patent/FR2326030B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7628344A 1975-09-24 1976-09-21 Microscope electronique a balayage pour le controle de structures d'objets Granted FR2326030A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18851275A DD124091A1 (fr) 1975-09-24 1975-09-24

Publications (2)

Publication Number Publication Date
FR2326030A1 true FR2326030A1 (fr) 1977-04-22
FR2326030B1 FR2326030B1 (fr) 1982-03-19

Family

ID=5501778

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7628344A Granted FR2326030A1 (fr) 1975-09-24 1976-09-21 Microscope electronique a balayage pour le controle de structures d'objets

Country Status (5)

Country Link
DD (1) DD124091A1 (fr)
DE (1) DE2635356C2 (fr)
FR (1) FR2326030A1 (fr)
GB (1) GB1532862A (fr)
SU (1) SU1191980A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0176745A1 (fr) * 1984-09-24 1986-04-09 Siemens Aktiengesellschaft Dispositif et procédé pour mesurer des longueurs dans un microscope corpusculaire à balayage
EP0110301A3 (en) * 1982-11-29 1986-06-11 Kabushiki Kaisha Toshiba Method and apparatus for measuring dimension of secondary electron emission object
EP0177566A4 (fr) * 1984-03-20 1987-03-26 Nixon Larry Sheldon Procede pour des mesures de precision par microscope electronique a balayage.

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
JPS5795056A (en) * 1980-12-05 1982-06-12 Hitachi Ltd Appearance inspecting process
JPS59163506A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 電子ビ−ム測長装置
DE3802598C1 (fr) * 1988-01-29 1989-04-13 Karl Heinz 3057 Neustadt De Stellmann

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3876879A (en) * 1973-11-09 1975-04-08 Calspan Corp Method and apparatus for determining surface characteristics incorporating a scanning electron microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0110301A3 (en) * 1982-11-29 1986-06-11 Kabushiki Kaisha Toshiba Method and apparatus for measuring dimension of secondary electron emission object
EP0177566A4 (fr) * 1984-03-20 1987-03-26 Nixon Larry Sheldon Procede pour des mesures de precision par microscope electronique a balayage.
EP0176745A1 (fr) * 1984-09-24 1986-04-09 Siemens Aktiengesellschaft Dispositif et procédé pour mesurer des longueurs dans un microscope corpusculaire à balayage

Also Published As

Publication number Publication date
GB1532862A (en) 1978-11-22
DE2635356C2 (de) 1984-08-16
DD124091A1 (fr) 1977-02-02
DE2635356A1 (de) 1977-04-07
FR2326030B1 (fr) 1982-03-19
SU1191980A1 (ru) 1985-11-15

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Legal Events

Date Code Title Description
ST Notification of lapse