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FR2288138A1 - Procede d'attaque de l'alumine - Google Patents

Procede d'attaque de l'alumine

Info

Publication number
FR2288138A1
FR2288138A1 FR7435152A FR7435152A FR2288138A1 FR 2288138 A1 FR2288138 A1 FR 2288138A1 FR 7435152 A FR7435152 A FR 7435152A FR 7435152 A FR7435152 A FR 7435152A FR 2288138 A1 FR2288138 A1 FR 2288138A1
Authority
FR
France
Prior art keywords
fluoride
oxide layer
etching
organic solvent
removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7435152A
Other languages
English (en)
Other versions
FR2288138B1 (fr
Inventor
Jean-Pierre Rioult
Raymond Fabie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique Compelec RTC SA
Original Assignee
Radiotechnique Compelec RTC SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique Compelec RTC SA filed Critical Radiotechnique Compelec RTC SA
Priority to FR7435152A priority Critical patent/FR2288138A1/fr
Priority to BR7506737*A priority patent/BR7506737A/pt
Priority to GB42222/75A priority patent/GB1526425A/en
Priority to JP12388575A priority patent/JPS5640492B2/ja
Priority to DE2546316A priority patent/DE2546316C2/de
Publication of FR2288138A1 publication Critical patent/FR2288138A1/fr
Application granted granted Critical
Publication of FR2288138B1 publication Critical patent/FR2288138B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/53—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete
    • C04B41/5338—Etching
    • C04B41/5353—Wet etching, e.g. with etchants dissolved in organic solvents
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/91—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics involving the removal of part of the materials of the treated articles, e.g. etching
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31105—Etching inorganic layers
    • H01L21/31111—Etching inorganic layers by chemical means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
FR7435152A 1974-10-18 1974-10-18 Procede d'attaque de l'alumine Granted FR2288138A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR7435152A FR2288138A1 (fr) 1974-10-18 1974-10-18 Procede d'attaque de l'alumine
BR7506737*A BR7506737A (pt) 1974-10-18 1975-10-15 Processo para tratar corpos com um agente de ataque para remover oxido de aluminio e processo para fabricar dispositivos semicondutores
GB42222/75A GB1526425A (en) 1974-10-18 1975-10-15 Method of etching aluminium oxide
JP12388575A JPS5640492B2 (fr) 1974-10-18 1975-10-16
DE2546316A DE2546316C2 (de) 1974-10-18 1975-10-16 Verfahren zur Behandlung von Körpern mit einem Fluorid enthaltenden Ätzmittel und seine Anwendung bei der Herstellung von Halbleiteranordnungen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7435152A FR2288138A1 (fr) 1974-10-18 1974-10-18 Procede d'attaque de l'alumine

Publications (2)

Publication Number Publication Date
FR2288138A1 true FR2288138A1 (fr) 1976-05-14
FR2288138B1 FR2288138B1 (fr) 1979-02-16

Family

ID=9144274

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7435152A Granted FR2288138A1 (fr) 1974-10-18 1974-10-18 Procede d'attaque de l'alumine

Country Status (1)

Country Link
FR (1) FR2288138A1 (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2011513A1 (fr) * 1968-06-10 1970-03-06 Rca Corp

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2011513A1 (fr) * 1968-06-10 1970-03-06 Rca Corp

Also Published As

Publication number Publication date
FR2288138B1 (fr) 1979-02-16

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Legal Events

Date Code Title Description
ST Notification of lapse