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FR2262798A2 - Ionisation gauge for measuring of very low pressures - has degassing filament and X-ray protection to increase accuracy - Google Patents

Ionisation gauge for measuring of very low pressures - has degassing filament and X-ray protection to increase accuracy

Info

Publication number
FR2262798A2
FR2262798A2 FR7407065A FR7407065A FR2262798A2 FR 2262798 A2 FR2262798 A2 FR 2262798A2 FR 7407065 A FR7407065 A FR 7407065A FR 7407065 A FR7407065 A FR 7407065A FR 2262798 A2 FR2262798 A2 FR 2262798A2
Authority
FR
France
Prior art keywords
filament
degassing
gauge
measuring
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7407065A
Other languages
English (en)
Other versions
FR2262798B2 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Sogev SA
Original Assignee
Leybold Heraeus Sogev SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Sogev SA filed Critical Leybold Heraeus Sogev SA
Priority to FR7407065A priority Critical patent/FR2262798A2/fr
Publication of FR2262798A2 publication Critical patent/FR2262798A2/fr
Application granted granted Critical
Publication of FR2262798B2 publication Critical patent/FR2262798B2/fr
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • G01L21/30Vacuum gauges by making use of ionisation effects
    • G01L21/32Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR7407065A 1974-03-01 1974-03-01 Ionisation gauge for measuring of very low pressures - has degassing filament and X-ray protection to increase accuracy Granted FR2262798A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7407065A FR2262798A2 (en) 1974-03-01 1974-03-01 Ionisation gauge for measuring of very low pressures - has degassing filament and X-ray protection to increase accuracy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7407065A FR2262798A2 (en) 1974-03-01 1974-03-01 Ionisation gauge for measuring of very low pressures - has degassing filament and X-ray protection to increase accuracy

Publications (2)

Publication Number Publication Date
FR2262798A2 true FR2262798A2 (en) 1975-09-26
FR2262798B2 FR2262798B2 (fr) 1979-01-26

Family

ID=9135683

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7407065A Granted FR2262798A2 (en) 1974-03-01 1974-03-01 Ionisation gauge for measuring of very low pressures - has degassing filament and X-ray protection to increase accuracy

Country Status (1)

Country Link
FR (1) FR2262798A2 (fr)

Also Published As

Publication number Publication date
FR2262798B2 (fr) 1979-01-26

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