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FR2244257A1 - Ions atomiser pump has uniform cathode consumption - obtained by periodic adjustment of relative positions of electrodes - Google Patents

Ions atomiser pump has uniform cathode consumption - obtained by periodic adjustment of relative positions of electrodes

Info

Publication number
FR2244257A1
FR2244257A1 FR7431555A FR7431555A FR2244257A1 FR 2244257 A1 FR2244257 A1 FR 2244257A1 FR 7431555 A FR7431555 A FR 7431555A FR 7431555 A FR7431555 A FR 7431555A FR 2244257 A1 FR2244257 A1 FR 2244257A1
Authority
FR
France
Prior art keywords
relative
ions
cathode
anode
consumption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7431555A
Other languages
French (fr)
Other versions
FR2244257B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19732346841 external-priority patent/DE2346841C3/en
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2244257A1 publication Critical patent/FR2244257A1/en
Application granted granted Critical
Publication of FR2244257B1 publication Critical patent/FR2244257B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

An ions atomiser pump comprises and several electrode systems for generating a homogeneous magnetic field, consisting of a honeycomb type cell anode and one or more cathodes opposite to the cell anode; the cell anode and cathode can be moved relative to each other and fixed in different relative positions. In particular, either the anode or the cathode is fixed relative to the housing, and the other electrode is slidable relative to the housing and to the first electrode. The direction of movement is approximately perpendicular to the magnetic field direction. Since the consumption of cathode material is more concentrated at those positions opposite to the axes of the cells of the anode, the facility for sliding one relative to the other enables the consumption to be made uniform over the entire area of the cathode.
FR7431555A 1973-09-18 1974-09-18 Ions atomiser pump has uniform cathode consumption - obtained by periodic adjustment of relative positions of electrodes Granted FR2244257A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732346841 DE2346841C3 (en) 1973-09-18 Ion getter pump

Publications (2)

Publication Number Publication Date
FR2244257A1 true FR2244257A1 (en) 1975-04-11
FR2244257B1 FR2244257B1 (en) 1978-11-24

Family

ID=5892878

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7431555A Granted FR2244257A1 (en) 1973-09-18 1974-09-18 Ions atomiser pump has uniform cathode consumption - obtained by periodic adjustment of relative positions of electrodes

Country Status (2)

Country Link
CH (1) CH572278A5 (en)
FR (1) FR2244257A1 (en)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0106377A3 (en) * 1982-09-14 1986-01-22 Varian S.P.A. Ion pump with a cathode of improved structure, particularly for pumping inert gases
US7485873B2 (en) 2003-10-16 2009-02-03 Alis Corporation Ion sources, systems and methods
US7488952B2 (en) 2003-10-16 2009-02-10 Alis Corporation Ion sources, systems and methods
US7495232B2 (en) 2003-10-16 2009-02-24 Alis Corporation Ion sources, systems and methods
US7504639B2 (en) 2003-10-16 2009-03-17 Alis Corporation Ion sources, systems and methods
WO2007109666A3 (en) * 2006-03-20 2009-03-19 Alis Corp Systems and methods for a helium ion pump
US7511279B2 (en) 2003-10-16 2009-03-31 Alis Corporation Ion sources, systems and methods
US7511280B2 (en) 2003-10-16 2009-03-31 Alis Corporation Ion sources, systems and methods
US7518122B2 (en) 2003-10-16 2009-04-14 Alis Corporation Ion sources, systems and methods
US7521693B2 (en) 2003-10-16 2009-04-21 Alis Corporation Ion sources, systems and methods
US7554096B2 (en) 2003-10-16 2009-06-30 Alis Corporation Ion sources, systems and methods
US7554097B2 (en) 2003-10-16 2009-06-30 Alis Corporation Ion sources, systems and methods
US7557358B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7557359B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7557361B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7557360B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7601953B2 (en) 2006-03-20 2009-10-13 Alis Corporation Systems and methods for a gas field ion microscope

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8110814B2 (en) 2003-10-16 2012-02-07 Alis Corporation Ion sources, systems and methods

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0106377A3 (en) * 1982-09-14 1986-01-22 Varian S.P.A. Ion pump with a cathode of improved structure, particularly for pumping inert gases
US7518122B2 (en) 2003-10-16 2009-04-14 Alis Corporation Ion sources, systems and methods
US7554097B2 (en) 2003-10-16 2009-06-30 Alis Corporation Ion sources, systems and methods
US7495232B2 (en) 2003-10-16 2009-02-24 Alis Corporation Ion sources, systems and methods
US7504639B2 (en) 2003-10-16 2009-03-17 Alis Corporation Ion sources, systems and methods
US7557360B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7511279B2 (en) 2003-10-16 2009-03-31 Alis Corporation Ion sources, systems and methods
US7488952B2 (en) 2003-10-16 2009-02-10 Alis Corporation Ion sources, systems and methods
US7554096B2 (en) 2003-10-16 2009-06-30 Alis Corporation Ion sources, systems and methods
US7521693B2 (en) 2003-10-16 2009-04-21 Alis Corporation Ion sources, systems and methods
US7485873B2 (en) 2003-10-16 2009-02-03 Alis Corporation Ion sources, systems and methods
US7511280B2 (en) 2003-10-16 2009-03-31 Alis Corporation Ion sources, systems and methods
US7557358B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7557359B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
US7557361B2 (en) 2003-10-16 2009-07-07 Alis Corporation Ion sources, systems and methods
WO2007109666A3 (en) * 2006-03-20 2009-03-19 Alis Corp Systems and methods for a helium ion pump
US7601953B2 (en) 2006-03-20 2009-10-13 Alis Corporation Systems and methods for a gas field ion microscope

Also Published As

Publication number Publication date
DE2346841B2 (en) 1977-03-10
CH572278A5 (en) 1976-01-30
FR2244257B1 (en) 1978-11-24
DE2346841A1 (en) 1975-05-07

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Legal Events

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