FR2241785B1 - - Google Patents

Info

Publication number: FR2241785B1
Authority: FR; France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

FR7428731A

Other languages

Other versions

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Jeol Ltd

Original Assignee

Jeol Ltd

Nihon Denshi KK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1973-08-22

Filing date

1974-08-21

Publication date

1977-03-25

1974-08-21 Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd

1975-03-21 Publication of FR2241785A1 publication Critical patent/FR2241785A1/fr

1977-03-25 Application granted granted Critical

1977-03-25 Publication of FR2241785B1 publication Critical patent/FR2241785B1/fr

Status Expired legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Analysing Materials By The Use Of Radiation (AREA)
Measurement Of Radiation (AREA)

FR7428731A 1973-08-22 1974-08-21 Expired FR2241785B1 (nl)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP9417073A JPS532755B2 (nl)	1973-08-22	1973-08-22

Publications (2)

Publication Number	Publication Date
FR2241785A1 FR2241785A1 (nl)	1975-03-21
FR2241785B1 true FR2241785B1 (nl)	1977-03-25

Family

ID=14102864

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR7428731A Expired FR2241785B1 (nl)	1973-08-22	1974-08-21

Country Status (6)

Country	Link
US (1)	US3909610A (nl)
JP (1)	JPS532755B2 (nl)
DE (1)	DE2440120A1 (nl)
FR (1)	FR2241785B1 (nl)
GB (1)	GB1442507A (nl)
NL (1)	NL180155C (nl)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3965351A (en) *	1974-10-30	1976-06-22	The United States Of America As Represented By The United States Energy Research And Development Administration	Differential auger spectrometry
JPS5780649A (en) *	1980-11-10	1982-05-20	Hitachi Ltd	Electron ray energy analyzer
NL8600685A (nl) *	1986-03-18	1987-10-16	Philips Nv	Apparaat voor energie selectieve afbeelding.
DE3820549A1 (de) *	1988-06-16	1989-12-21	Fraunhofer Ges Forschung	Verfahren und vorrichtung zur untersuchung von membranoberflaechen
JPH04264243A (ja) *	1991-02-20	1992-09-21	Jeol Ltd	オージェ像計測におけるピークエネルギーシフト補正法
JPH1097836A (ja) *	1996-09-24	1998-04-14	Hitachi Keisokki Service Kk	走査形電子顕微鏡
DE59806059D1 (de) *	1997-07-04	2002-11-28	Deutsches Krebsforsch	Verfahren zur detektion eines elementes in einer probe
SE2050142A1 (en) *	2012-03-06	2020-02-10	Scienta Omicron Ab	Analyser arrangement for particle spectrometer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3191028A (en) *	1963-04-22	1965-06-22	Albert V Crewe	Scanning electron microscope
US3626184A (en) *	1970-03-05	1971-12-07	Atomic Energy Commission	Detector system for a scanning electron microscope
US3812288A (en) *	1972-11-21	1974-05-21	Edax Int Inc	Television display system

1973
- 1973-08-22 JP JP9417073A patent/JPS532755B2/ja not_active Expired
1974
- 1974-07-26 GB GB2323574*[A patent/GB1442507A/en not_active Expired
- 1974-07-31 NL NLAANVRAGE7410276,A patent/NL180155C/nl not_active IP Right Cessation
- 1974-08-08 US US495665A patent/US3909610A/en not_active Expired - Lifetime
- 1974-08-21 FR FR7428731A patent/FR2241785B1/fr not_active Expired
- 1974-08-21 DE DE2440120A patent/DE2440120A1/de active Pending

Also Published As

Publication number	Publication date
US3909610A (en)	1975-09-30
JPS532755B2 (nl)	1978-01-31
NL180155C (nl)	1987-01-02
DE2440120A1 (de)	1975-03-27
FR2241785A1 (nl)	1975-03-21
GB1442507A (en)	1976-07-14
NL180155B (nl)	1986-08-01
JPS5044889A (nl)	1975-04-22
NL7410276A (nl)	1975-02-25

Publication	Publication Date	Title
AU476761B2 (nl)	1976-09-30
AU465372B2 (nl)	1975-09-25
AR201231Q (nl)	1975-02-21
AU465453B2 (nl)	1975-09-25
AU476714B2 (nl)	1976-09-30
FR2241785B1 (nl)	1977-03-25
AR201229Q (nl)	1975-02-21
AR199451A1 (nl)	1974-08-30
AU477823B2 (nl)	1975-06-19
AR197627A1 (nl)	1974-04-23
AR195948A1 (nl)	1973-11-15
AR196382A1 (nl)	1973-12-18
AR200256A1 (nl)	1974-10-31
AU476873B1 (nl)	1975-01-09
AR200885A1 (nl)	1974-12-27
AU477824B2 (nl)	1975-07-17
AR196123Q (nl)	1973-11-30
AR196212Q (nl)	1973-12-10
BG22003A1 (nl)	1976-11-25
CH562911A (nl)	1975-06-13
AU479420A (nl)	1974-10-03
BG22880A1 (nl)	1977-05-20
CH562441A5 (nl)	1975-05-30
AU479405A (nl)	1975-04-10
BG19027A1 (nl)	1975-04-30

Legal Events

Date	Code	Title	Description
1992-06-26	ST	Notification of lapse