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FR1534733A - Procédé et dispositifs de dépôt de couches minces mettant en oeuvre plusieurs décharges électriques - Google Patents

Procédé et dispositifs de dépôt de couches minces mettant en oeuvre plusieurs décharges électriques

Info

Publication number
FR1534733A
FR1534733A FR102403A FR102403A FR1534733A FR 1534733 A FR1534733 A FR 1534733A FR 102403 A FR102403 A FR 102403A FR 102403 A FR102403 A FR 102403A FR 1534733 A FR1534733 A FR 1534733A
Authority
FR
France
Prior art keywords
devices
thin films
several electric
electric discharges
depositing thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR102403A
Other languages
English (en)
Inventor
Jean Pompei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RADIOTECHNIQUE COPRIM RTC
Original Assignee
RADIOTECHNIQUE COPRIM RTC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RADIOTECHNIQUE COPRIM RTC filed Critical RADIOTECHNIQUE COPRIM RTC
Priority to FR102403A priority Critical patent/FR1534733A/fr
Application granted granted Critical
Publication of FR1534733A publication Critical patent/FR1534733A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR102403A 1967-04-12 1967-04-12 Procédé et dispositifs de dépôt de couches minces mettant en oeuvre plusieurs décharges électriques Expired FR1534733A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR102403A FR1534733A (fr) 1967-04-12 1967-04-12 Procédé et dispositifs de dépôt de couches minces mettant en oeuvre plusieurs décharges électriques

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR102403A FR1534733A (fr) 1967-04-12 1967-04-12 Procédé et dispositifs de dépôt de couches minces mettant en oeuvre plusieurs décharges électriques

Publications (1)

Publication Number Publication Date
FR1534733A true FR1534733A (fr) 1968-08-02

Family

ID=8628673

Family Applications (1)

Application Number Title Priority Date Filing Date
FR102403A Expired FR1534733A (fr) 1967-04-12 1967-04-12 Procédé et dispositifs de dépôt de couches minces mettant en oeuvre plusieurs décharges électriques

Country Status (1)

Country Link
FR (1) FR1534733A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2518122A1 (fr) * 1981-12-16 1983-06-17 Energy Conversion Devices Inc Procede de fabrication des alliages et des dispositifs amorphes photosensibles par depot de phase chimique
WO1986006104A1 (fr) * 1985-04-18 1986-10-23 Centre National De La Recherche Scientifique (C.N. PROCEDE DE DEPOT D'AU MOINS UNE COUCHE D'UN COMPOSE HOMOGENE III-V OU II-VI, EN PARTICULIER Ga As ET SUBSTRAT REVETU D'UN TEL DEPOT

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2518122A1 (fr) * 1981-12-16 1983-06-17 Energy Conversion Devices Inc Procede de fabrication des alliages et des dispositifs amorphes photosensibles par depot de phase chimique
WO1986006104A1 (fr) * 1985-04-18 1986-10-23 Centre National De La Recherche Scientifique (C.N. PROCEDE DE DEPOT D'AU MOINS UNE COUCHE D'UN COMPOSE HOMOGENE III-V OU II-VI, EN PARTICULIER Ga As ET SUBSTRAT REVETU D'UN TEL DEPOT
FR2580670A1 (fr) * 1985-04-18 1986-10-24 Centre Nat Rech Scient Procede de depot d'au moins une couche d'un compose homogene iii-v ou ii-vi, en particulier ga as et substrat revetu d'un tel depot

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