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FR1534721A - Vacuum pumping and trapping device - Google Patents

Vacuum pumping and trapping device

Info

Publication number
FR1534721A
FR1534721A FR76007174A FR76007174A FR1534721A FR 1534721 A FR1534721 A FR 1534721A FR 76007174 A FR76007174 A FR 76007174A FR 76007174 A FR76007174 A FR 76007174A FR 1534721 A FR1534721 A FR 1534721A
Authority
FR
France
Prior art keywords
vacuum pumping
trapping device
trapping
pumping
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR76007174A
Other languages
French (fr)
Inventor
Jean Marie Desire Sarrau
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to FR76007174A priority Critical patent/FR1534721A/en
Application granted granted Critical
Publication of FR1534721A publication Critical patent/FR1534721A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR76007174A 1967-02-28 1967-02-28 Vacuum pumping and trapping device Expired FR1534721A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR76007174A FR1534721A (en) 1967-02-28 1967-02-28 Vacuum pumping and trapping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR76007174A FR1534721A (en) 1967-02-28 1967-02-28 Vacuum pumping and trapping device

Publications (1)

Publication Number Publication Date
FR1534721A true FR1534721A (en) 1968-08-02

Family

ID=1588799

Family Applications (1)

Application Number Title Priority Date Filing Date
FR76007174A Expired FR1534721A (en) 1967-02-28 1967-02-28 Vacuum pumping and trapping device

Country Status (1)

Country Link
FR (1) FR1534721A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2596580A1 (en) * 1986-03-26 1987-10-02 Centre Nat Rech Scient PLASMA GENERATOR

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2596580A1 (en) * 1986-03-26 1987-10-02 Centre Nat Rech Scient PLASMA GENERATOR

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