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FR1527305A - Device for the vaporization of materials under vacuum - Google Patents

Device for the vaporization of materials under vacuum

Info

Publication number
FR1527305A
FR1527305A FR110142A FR110142A FR1527305A FR 1527305 A FR1527305 A FR 1527305A FR 110142 A FR110142 A FR 110142A FR 110142 A FR110142 A FR 110142A FR 1527305 A FR1527305 A FR 1527305A
Authority
FR
France
Prior art keywords
vaporization
under vacuum
materials under
materials
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR110142A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HERMSDORF KERAMIK VEB
Keramische Werke Hermsdorf VEB
Original Assignee
HERMSDORF KERAMIK VEB
Keramische Werke Hermsdorf VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HERMSDORF KERAMIK VEB, Keramische Werke Hermsdorf VEB filed Critical HERMSDORF KERAMIK VEB
Priority to FR110142A priority Critical patent/FR1527305A/en
Application granted granted Critical
Publication of FR1527305A publication Critical patent/FR1527305A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR110142A 1967-06-13 1967-06-13 Device for the vaporization of materials under vacuum Expired FR1527305A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR110142A FR1527305A (en) 1967-06-13 1967-06-13 Device for the vaporization of materials under vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR110142A FR1527305A (en) 1967-06-13 1967-06-13 Device for the vaporization of materials under vacuum

Publications (1)

Publication Number Publication Date
FR1527305A true FR1527305A (en) 1968-05-31

Family

ID=8632899

Family Applications (1)

Application Number Title Priority Date Filing Date
FR110142A Expired FR1527305A (en) 1967-06-13 1967-06-13 Device for the vaporization of materials under vacuum

Country Status (1)

Country Link
FR (1) FR1527305A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2551091A1 (en) * 1983-08-29 1985-03-01 Gen Electric MELT METAL SUPPLY VESSEL FOR ELECTRON BEAM EVAPORATOR CUP
EP0430210A2 (en) * 1989-11-29 1991-06-05 Matsushita Electric Industrial Co., Ltd. Vacuum evaporation apparatus and method for making vacuum evaporated sheet
CH678338A5 (en) * 1989-05-02 1991-08-30 Balzers Hochvakuum Vacuum deposition crucible preventing metal contamination - comprising insert of inner and outer vessels of different materials to prevent losses and stoppages
US5132506A (en) * 1990-11-28 1992-07-21 Matsushita Electric Industrial Co., Ltd. Vacuum evaporation apparatus and method for making vacuum evaporated sheet
JP2021525830A (en) * 2018-06-04 2021-09-27 ダイソン・テクノロジー・リミテッド device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2551091A1 (en) * 1983-08-29 1985-03-01 Gen Electric MELT METAL SUPPLY VESSEL FOR ELECTRON BEAM EVAPORATOR CUP
CH678338A5 (en) * 1989-05-02 1991-08-30 Balzers Hochvakuum Vacuum deposition crucible preventing metal contamination - comprising insert of inner and outer vessels of different materials to prevent losses and stoppages
EP0430210A2 (en) * 1989-11-29 1991-06-05 Matsushita Electric Industrial Co., Ltd. Vacuum evaporation apparatus and method for making vacuum evaporated sheet
EP0430210A3 (en) * 1989-11-29 1991-09-04 Matsushita Electric Industrial Co., Ltd. Vacuum evaporation apparatus and method for making vacuum evaporated sheet
US5132506A (en) * 1990-11-28 1992-07-21 Matsushita Electric Industrial Co., Ltd. Vacuum evaporation apparatus and method for making vacuum evaporated sheet
JP2021525830A (en) * 2018-06-04 2021-09-27 ダイソン・テクノロジー・リミテッド device

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