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FR1515415A - Surface métallique de contact d'un composant semiconducteur - Google Patents

Surface métallique de contact d'un composant semiconducteur

Info

Publication number
FR1515415A
FR1515415A FR99135A FR99135A FR1515415A FR 1515415 A FR1515415 A FR 1515415A FR 99135 A FR99135 A FR 99135A FR 99135 A FR99135 A FR 99135A FR 1515415 A FR1515415 A FR 1515415A
Authority
FR
France
Prior art keywords
contact surface
metal contact
semiconductor component
semiconductor
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR99135A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Application granted granted Critical
Publication of FR1515415A publication Critical patent/FR1515415A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
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    • H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)
FR99135A 1966-03-19 1967-03-16 Surface métallique de contact d'un composant semiconducteur Expired FR1515415A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES102622A DE1283970B (de) 1966-03-19 1966-03-19 Metallischer Kontakt an einem Halbleiterbauelement

Publications (1)

Publication Number Publication Date
FR1515415A true FR1515415A (fr) 1968-03-01

Family

ID=7524571

Family Applications (1)

Application Number Title Priority Date Filing Date
FR99135A Expired FR1515415A (fr) 1966-03-19 1967-03-16 Surface métallique de contact d'un composant semiconducteur

Country Status (8)

Country Link
US (1) US3633076A (fr)
BE (1) BE694479A (fr)
CH (1) CH457627A (fr)
DE (1) DE1283970B (fr)
FR (1) FR1515415A (fr)
GB (1) GB1174613A (fr)
NL (1) NL6702273A (fr)
SE (1) SE312864B (fr)

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Publication number Priority date Publication date Assignee Title
FR2008771A1 (fr) * 1968-05-17 1970-01-23 Texas Instruments Inc
FR2012004A1 (fr) * 1968-06-28 1970-03-13 Ibm
FR2081661A1 (fr) * 1970-03-03 1971-12-10 Licentia Gmbh
EP0007873A1 (fr) * 1978-07-25 1980-02-06 Thomson-Csf Système de soudure d'un composant semiconducteur émetteur de lumière sur un socle métallique

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US3769688A (en) * 1972-04-21 1973-11-06 Rca Corp Method of making an electrically-insulating seal between a metal body and a semiconductor device
JPS5745061B2 (fr) * 1972-05-02 1982-09-25
US4106860A (en) * 1973-09-07 1978-08-15 Bbc Brown Boveri & Company Limited Liquid-crystal cell
JPS5341064B2 (fr) * 1974-02-25 1978-10-31
US4096510A (en) * 1974-08-19 1978-06-20 Matsushita Electric Industrial Co., Ltd. Thermal printing head
JPS5152277A (ja) * 1974-09-24 1976-05-08 Hitachi Ltd Handotaisochi
JPS51142988A (en) * 1975-06-04 1976-12-08 Hitachi Ltd Semiconductor devices
US4042951A (en) * 1975-09-25 1977-08-16 Texas Instruments Incorporated Gold-germanium alloy contacts for a semiconductor device
US4065588A (en) * 1975-11-20 1977-12-27 Rca Corporation Method of making gold-cobalt contact for silicon devices
DE2807350C2 (de) * 1977-03-02 1983-01-13 Sharp K.K., Osaka Flüssigkristall-Anzeigevorrichtung in Baueinheit mit einem integrierten Schaltkreis
US4214256A (en) * 1978-09-08 1980-07-22 International Business Machines Corporation Tantalum semiconductor contacts and method for fabricating same
DE2926785C2 (de) * 1979-07-03 1985-12-12 HIGRATHERM electric GmbH, 7100 Heilbronn Bipolarer Transistor und Verfahren zu seiner Herstellung
NL8004139A (nl) * 1980-07-18 1982-02-16 Philips Nv Halfgeleiderinrichting.
DE3039658A1 (de) * 1980-10-21 1982-05-06 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Mit edelmetall beschichtetes molybdaen und verfahren zu seiner herstellung
JPS5778173A (en) * 1980-11-04 1982-05-15 Hitachi Ltd Semiconductor device and manufacture thereof
US4482913A (en) * 1982-02-24 1984-11-13 Westinghouse Electric Corp. Semiconductor device soldered to a graphite substrate
JPS60119777A (ja) * 1983-11-30 1985-06-27 Mitsubishi Electric Corp ゲ−トタ−ンオフサイリスタ
US4736236A (en) * 1984-03-08 1988-04-05 Olin Corporation Tape bonding material and structure for electronic circuit fabrication
US4737839A (en) * 1984-03-19 1988-04-12 Trilogy Computer Development Partners, Ltd. Semiconductor chip mounting system
DE3781861T2 (de) * 1986-10-27 1993-04-01 Electric Power Res Inst Herstellung einer mehrschichtigen leistungshalbleiterschaltung mit mehrfachen parallelen kontaktfingern.
US4974056A (en) * 1987-05-22 1990-11-27 International Business Machines Corporation Stacked metal silicide gate structure with barrier
US5367195A (en) * 1993-01-08 1994-11-22 International Business Machines Corporation Structure and method for a superbarrier to prevent diffusion between a noble and a non-noble metal
US5503286A (en) * 1994-06-28 1996-04-02 International Business Machines Corporation Electroplated solder terminal
US6897141B2 (en) * 2002-10-23 2005-05-24 Ocube Digital Co., Ltd. Solder terminal and fabricating method thereof
US9093385B2 (en) * 2013-05-28 2015-07-28 Infineon Technologies Ag Method for processing a semiconductor workpiece with metallization

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
US2973466A (en) * 1959-09-09 1961-02-28 Bell Telephone Labor Inc Semiconductor contact
FR1246813A (fr) * 1959-10-10 1960-11-25 Perfectionnements à la fabrication des éléments semi-conducteurs
NL298258A (fr) * 1962-05-25 1900-01-01
US3290753A (en) * 1963-08-19 1966-12-13 Bell Telephone Labor Inc Method of making semiconductor integrated circuit elements
NL134170C (fr) * 1963-12-17 1900-01-01
US3370207A (en) * 1964-02-24 1968-02-20 Gen Electric Multilayer contact system for semiconductor devices including gold and copper layers
US3290127A (en) * 1964-03-30 1966-12-06 Bell Telephone Labor Inc Barrier diode with metal contact and method of making
GB1104804A (en) * 1964-04-28 1968-02-28 Texas Instruments Inc Improvements relating to semiconductor devices
US3341753A (en) * 1964-10-21 1967-09-12 Texas Instruments Inc Metallic contacts for semiconductor devices

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2008771A1 (fr) * 1968-05-17 1970-01-23 Texas Instruments Inc
FR2011844A1 (fr) * 1968-05-17 1970-03-13 Texas Instruments Inc
FR2012004A1 (fr) * 1968-06-28 1970-03-13 Ibm
FR2081661A1 (fr) * 1970-03-03 1971-12-10 Licentia Gmbh
EP0007873A1 (fr) * 1978-07-25 1980-02-06 Thomson-Csf Système de soudure d'un composant semiconducteur émetteur de lumière sur un socle métallique
FR2431900A1 (fr) * 1978-07-25 1980-02-22 Thomson Csf Systeme de soudure d'un laser a semiconducteur sur un socle metallique

Also Published As

Publication number Publication date
NL6702273A (fr) 1967-09-20
GB1174613A (en) 1969-12-17
CH457627A (de) 1968-06-15
DE1283970B (de) 1968-11-28
SE312864B (fr) 1969-07-28
BE694479A (fr) 1967-07-31
US3633076A (en) 1972-01-04

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