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FR1499093A - Large aperture hollow cathode - Google Patents

Large aperture hollow cathode

Info

Publication number
FR1499093A
FR1499093A FR83926A FR83926A FR1499093A FR 1499093 A FR1499093 A FR 1499093A FR 83926 A FR83926 A FR 83926A FR 83926 A FR83926 A FR 83926A FR 1499093 A FR1499093 A FR 1499093A
Authority
FR
France
Prior art keywords
large aperture
hollow cathode
aperture hollow
cathode
hollow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR83926A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Application granted granted Critical
Publication of FR1499093A publication Critical patent/FR1499093A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/077Electron guns using discharge in gases or vapours as electron sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00Gas-filled discharge tubes with solid cathode
    • H01J17/02Details
    • H01J17/04Electrodes; Screens
    • H01J17/06Cathodes
    • H01J17/066Cold cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00Discharge tubes and lamps
    • H01J2893/0064Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065Electrode systems
    • H01J2893/0066Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • ing And Chemical Polishing (AREA)
FR83926A 1965-11-17 1966-11-17 Large aperture hollow cathode Expired FR1499093A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US508302A US3383541A (en) 1965-11-17 1965-11-17 Glow discharge cathode having a large electron beam emitting aperture

Publications (1)

Publication Number Publication Date
FR1499093A true FR1499093A (en) 1967-10-20

Family

ID=24022185

Family Applications (1)

Application Number Title Priority Date Filing Date
FR83926A Expired FR1499093A (en) 1965-11-17 1966-11-17 Large aperture hollow cathode

Country Status (5)

Country Link
US (1) US3383541A (en)
DE (1) DE1589005B1 (en)
FR (1) FR1499093A (en)
GB (1) GB1170435A (en)
SE (1) SE315340B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3466487A (en) * 1967-06-16 1969-09-09 United Aircraft Corp Device for moving a beam of charged particles
GB1275261A (en) * 1968-06-04 1972-05-24 Atomic Energy Authority Uk Improvements in or relating to non thermionic cathode slow discharge devices
US4461970A (en) * 1981-11-25 1984-07-24 General Electric Company Shielded hollow cathode electrode for fluorescent lamp
US5686789A (en) 1995-03-14 1997-11-11 Osram Sylvania Inc. Discharge device having cathode with micro hollow array

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE896533C (en) * 1939-04-12 1953-11-12 Aeg Device for generating a beam of positive ions or electrons
NL287527A (en) * 1962-01-15
US3262003A (en) * 1962-05-25 1966-07-19 Martin Marietta Corp Perforated hollow cathode discharge device

Also Published As

Publication number Publication date
DE1589005B1 (en) 1970-02-26
SE315340B (en) 1969-09-29
US3383541A (en) 1968-05-14
GB1170435A (en) 1969-11-12

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