FR1499093A - Large aperture hollow cathode - Google Patents
Large aperture hollow cathodeInfo
- Publication number
- FR1499093A FR1499093A FR83926A FR83926A FR1499093A FR 1499093 A FR1499093 A FR 1499093A FR 83926 A FR83926 A FR 83926A FR 83926 A FR83926 A FR 83926A FR 1499093 A FR1499093 A FR 1499093A
- Authority
- FR
- France
- Prior art keywords
- large aperture
- hollow cathode
- aperture hollow
- cathode
- hollow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
- H01J17/066—Cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
- H01J2893/0065—Electrode systems
- H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US508302A US3383541A (en) | 1965-11-17 | 1965-11-17 | Glow discharge cathode having a large electron beam emitting aperture |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1499093A true FR1499093A (en) | 1967-10-20 |
Family
ID=24022185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR83926A Expired FR1499093A (en) | 1965-11-17 | 1966-11-17 | Large aperture hollow cathode |
Country Status (5)
Country | Link |
---|---|
US (1) | US3383541A (en) |
DE (1) | DE1589005B1 (en) |
FR (1) | FR1499093A (en) |
GB (1) | GB1170435A (en) |
SE (1) | SE315340B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3466487A (en) * | 1967-06-16 | 1969-09-09 | United Aircraft Corp | Device for moving a beam of charged particles |
GB1275261A (en) * | 1968-06-04 | 1972-05-24 | Atomic Energy Authority Uk | Improvements in or relating to non thermionic cathode slow discharge devices |
US4461970A (en) * | 1981-11-25 | 1984-07-24 | General Electric Company | Shielded hollow cathode electrode for fluorescent lamp |
US5686789A (en) | 1995-03-14 | 1997-11-11 | Osram Sylvania Inc. | Discharge device having cathode with micro hollow array |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE896533C (en) * | 1939-04-12 | 1953-11-12 | Aeg | Device for generating a beam of positive ions or electrons |
NL287527A (en) * | 1962-01-15 | |||
US3262003A (en) * | 1962-05-25 | 1966-07-19 | Martin Marietta Corp | Perforated hollow cathode discharge device |
-
1965
- 1965-11-17 US US508302A patent/US3383541A/en not_active Expired - Lifetime
-
1966
- 1966-11-16 GB GB51397/66A patent/GB1170435A/en not_active Expired
- 1966-11-16 SE SE15686/66A patent/SE315340B/xx unknown
- 1966-11-17 FR FR83926A patent/FR1499093A/en not_active Expired
- 1966-11-17 DE DE19661589005 patent/DE1589005B1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
DE1589005B1 (en) | 1970-02-26 |
SE315340B (en) | 1969-09-29 |
US3383541A (en) | 1968-05-14 |
GB1170435A (en) | 1969-11-12 |
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