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FR1494152A - Dispositif à vide très poussé - Google Patents

Dispositif à vide très poussé

Info

Publication number
FR1494152A
FR1494152A FR67078A FR67078A FR1494152A FR 1494152 A FR1494152 A FR 1494152A FR 67078 A FR67078 A FR 67078A FR 67078 A FR67078 A FR 67078A FR 1494152 A FR1494152 A FR 1494152A
Authority
FR
France
Prior art keywords
high vacuum
vacuum device
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR67078A
Other languages
English (en)
Inventor
Josette Bailleul-Langlais
Jean Neuville
Robert Veilex
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RADIOTECHNIQUE COPRIM RTC
Original Assignee
RADIOTECHNIQUE COPRIM RTC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RADIOTECHNIQUE COPRIM RTC filed Critical RADIOTECHNIQUE COPRIM RTC
Priority to FR67078A priority Critical patent/FR1494152A/fr
Priority to NL6708746A priority patent/NL6708746A/xx
Priority to DE19671628443 priority patent/DE1628443A1/de
Priority to BE700515D priority patent/BE700515A/xx
Priority to GB29363/67A priority patent/GB1194582A/en
Priority to US649339A priority patent/US3446422A/en
Application granted granted Critical
Publication of FR1494152A publication Critical patent/FR1494152A/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/04—Diffusion pumps in combination with fore pumps, e.g. use of isolating valves

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
FR67078A 1966-06-27 1966-06-27 Dispositif à vide très poussé Expired FR1494152A (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR67078A FR1494152A (fr) 1966-06-27 1966-06-27 Dispositif à vide très poussé
NL6708746A NL6708746A (fr) 1966-06-27 1967-06-23
DE19671628443 DE1628443A1 (de) 1966-06-27 1967-06-26 Ultrahochvakuumvorrichtung
BE700515D BE700515A (fr) 1966-06-27 1967-06-26
GB29363/67A GB1194582A (en) 1966-06-27 1967-06-26 Ultrahigh-Vacuum Device
US649339A US3446422A (en) 1966-06-27 1967-06-27 Ultra-high vacuum device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR67078A FR1494152A (fr) 1966-06-27 1966-06-27 Dispositif à vide très poussé

Publications (1)

Publication Number Publication Date
FR1494152A true FR1494152A (fr) 1967-09-08

Family

ID=8611868

Family Applications (1)

Application Number Title Priority Date Filing Date
FR67078A Expired FR1494152A (fr) 1966-06-27 1966-06-27 Dispositif à vide très poussé

Country Status (6)

Country Link
US (1) US3446422A (fr)
BE (1) BE700515A (fr)
DE (1) DE1628443A1 (fr)
FR (1) FR1494152A (fr)
GB (1) GB1194582A (fr)
NL (1) NL6708746A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3687570A (en) * 1969-08-11 1972-08-29 Vacuum Atmospheres Corp Pneumatic control valve for vacuum chambers
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump
FR2872555B1 (fr) * 2004-06-30 2006-10-06 Sidel Sas Circuit de pompage a vide et machine de traitement de recipients equipee de ce circuit
US8192547B2 (en) * 2006-09-25 2012-06-05 Veeco Instruments Inc. Thermally isolated cryopanel for vacuum deposition systems
US8658004B2 (en) * 2008-11-14 2014-02-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Vapor-barrier vacuum isolation system
CN104988462B (zh) * 2015-07-23 2017-05-31 京东方科技集团股份有限公司 一种坩埚装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2826353A (en) * 1950-03-22 1958-03-11 Alois Vogt Apparatus for high vacuum pumps
US2806644A (en) * 1953-08-13 1957-09-17 Cons Electrodynamics Corp Vacuum system apparatus
US2935243A (en) * 1955-12-09 1960-05-03 N G N Electrical Ltd Vacuum pumping apparatus
US3144199A (en) * 1961-07-20 1964-08-11 Isen Ind Inc Method of evacuating treating chambers

Also Published As

Publication number Publication date
BE700515A (fr) 1967-12-27
GB1194582A (en) 1970-06-10
NL6708746A (fr) 1967-12-28
DE1628443A1 (de) 1971-08-19
US3446422A (en) 1969-05-27

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