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FR1485877A - Method for forming a film of an oxide of a refractory element on a support - Google Patents

Method for forming a film of an oxide of a refractory element on a support

Info

Publication number
FR1485877A
FR1485877A FR67434A FR67434A FR1485877A FR 1485877 A FR1485877 A FR 1485877A FR 67434 A FR67434 A FR 67434A FR 67434 A FR67434 A FR 67434A FR 1485877 A FR1485877 A FR 1485877A
Authority
FR
France
Prior art keywords
oxide
film
forming
support
refractory element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR67434A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Priority to FR67434A priority Critical patent/FR1485877A/en
Application granted granted Critical
Publication of FR1485877A publication Critical patent/FR1485877A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR67434A 1966-06-29 1966-06-29 Method for forming a film of an oxide of a refractory element on a support Expired FR1485877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR67434A FR1485877A (en) 1966-06-29 1966-06-29 Method for forming a film of an oxide of a refractory element on a support

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR67434A FR1485877A (en) 1966-06-29 1966-06-29 Method for forming a film of an oxide of a refractory element on a support

Publications (1)

Publication Number Publication Date
FR1485877A true FR1485877A (en) 1967-06-23

Family

ID=8612080

Family Applications (1)

Application Number Title Priority Date Filing Date
FR67434A Expired FR1485877A (en) 1966-06-29 1966-06-29 Method for forming a film of an oxide of a refractory element on a support

Country Status (1)

Country Link
FR (1) FR1485877A (en)

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