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FR1473968A - Perfectionnements aux appareils à ultra-vide - Google Patents

Perfectionnements aux appareils à ultra-vide

Info

Publication number
FR1473968A
FR1473968A FR44393A FR44393A FR1473968A FR 1473968 A FR1473968 A FR 1473968A FR 44393 A FR44393 A FR 44393A FR 44393 A FR44393 A FR 44393A FR 1473968 A FR1473968 A FR 1473968A
Authority
FR
France
Prior art keywords
ultra
vacuum devices
vacuum
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR44393A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Application granted granted Critical
Publication of FR1473968A publication Critical patent/FR1473968A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR44393A 1964-12-30 1965-12-30 Perfectionnements aux appareils à ultra-vide Expired FR1473968A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7458364 1964-12-30
JP59065 1965-01-08

Publications (1)

Publication Number Publication Date
FR1473968A true FR1473968A (fr) 1967-03-24

Family

ID=26333602

Family Applications (1)

Application Number Title Priority Date Filing Date
FR44393A Expired FR1473968A (fr) 1964-12-30 1965-12-30 Perfectionnements aux appareils à ultra-vide

Country Status (3)

Country Link
US (1) US3381890A (fr)
FR (1) FR1473968A (fr)
GB (1) GB1130145A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3458115A (en) * 1967-10-09 1969-07-29 Gen Electric Trap for organic vapors in vacuum systems
FR1583456A (fr) * 1968-04-11 1969-10-31
US4687417A (en) * 1985-12-19 1987-08-18 Hughes Aircraft Company High voltage feedthrough for ion pump
US20100062288A1 (en) * 2005-11-18 2010-03-11 David Weber System for generation of useful electrical energy from isotopic electron emission
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2611268A (en) * 1947-06-02 1952-09-23 Nat Res Corp Velocity metering of gas flow
US2649707A (en) * 1951-06-22 1953-08-25 Illinois Testing Laboratories Dew-point measuring device
US3149774A (en) * 1961-01-27 1964-09-22 Varian Associates Getter ion pump method and apparatus
US3292844A (en) * 1962-05-23 1966-12-20 Robert A Cornog Vacuum pump

Also Published As

Publication number Publication date
GB1130145A (en) 1968-10-09
DE1539134B2 (de) 1972-11-30
DE1539134A1 (de) 1969-06-19
US3381890A (en) 1968-05-07

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