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FR1466516A - Method and device for micromachining and processing of materials - Google Patents

Method and device for micromachining and processing of materials

Info

Publication number
FR1466516A
FR1466516A FR1466516A FR1466516A FR1466516A FR 1466516 A FR1466516 A FR 1466516A FR 1466516 A FR1466516 A FR 1466516A FR 1466516 A FR1466516 A FR 1466516A FR 1466516 A FR1466516 A FR 1466516A
Authority
FR
France
Prior art keywords
micromachining
materials
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR1466516A
Other languages
French (fr)
Inventor
Marc Bernheim
Raymond Castaing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Application granted granted Critical
Priority to FR1466516A priority Critical patent/FR1466516A/en
Publication of FR1466516A publication Critical patent/FR1466516A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR1466516A 1967-01-20 1967-01-20 Method and device for micromachining and processing of materials Expired FR1466516A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1466516A FR1466516A (en) 1967-01-20 1967-01-20 Method and device for micromachining and processing of materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1466516A FR1466516A (en) 1967-01-20 1967-01-20 Method and device for micromachining and processing of materials

Publications (1)

Publication Number Publication Date
FR1466516A true FR1466516A (en) 1967-01-20

Family

ID=1583106

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1466516A Expired FR1466516A (en) 1967-01-20 1967-01-20 Method and device for micromachining and processing of materials

Country Status (1)

Country Link
FR (1) FR1466516A (en)

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