FR1451749A - Method and device for forming thin films on a support by means of ionic radiation sputtering - Google Patents
Method and device for forming thin films on a support by means of ionic radiation sputteringInfo
- Publication number
- FR1451749A FR1451749A FR36212A FR36212A FR1451749A FR 1451749 A FR1451749 A FR 1451749A FR 36212 A FR36212 A FR 36212A FR 36212 A FR36212 A FR 36212A FR 1451749 A FR1451749 A FR 1451749A
- Authority
- FR
- France
- Prior art keywords
- sputtering
- support
- thin films
- forming thin
- ionic radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR36212A FR1451749A (en) | 1965-10-26 | 1965-10-26 | Method and device for forming thin films on a support by means of ionic radiation sputtering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR36212A FR1451749A (en) | 1965-10-26 | 1965-10-26 | Method and device for forming thin films on a support by means of ionic radiation sputtering |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR1451749A true FR1451749A (en) | 1966-01-07 |
Family
ID=8591202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR36212A Expired FR1451749A (en) | 1965-10-26 | 1965-10-26 | Method and device for forming thin films on a support by means of ionic radiation sputtering |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR1451749A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2422729A1 (en) * | 1978-04-13 | 1979-11-09 | Litton Systems Inc | MULTI-LAYER OPTICAL COATING PROCESS |
-
1965
- 1965-10-26 FR FR36212A patent/FR1451749A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2422729A1 (en) * | 1978-04-13 | 1979-11-09 | Litton Systems Inc | MULTI-LAYER OPTICAL COATING PROCESS |
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