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FR1424727A - Dispositif de bombardement électronique - Google Patents

Dispositif de bombardement électronique

Info

Publication number
FR1424727A
FR1424727A FR5541A FR5541A FR1424727A FR 1424727 A FR1424727 A FR 1424727A FR 5541 A FR5541 A FR 5541A FR 5541 A FR5541 A FR 5541A FR 1424727 A FR1424727 A FR 1424727A
Authority
FR
France
Prior art keywords
bombardment device
electronic bombardment
electronic
bombardment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR5541A
Other languages
English (en)
Inventor
Marcel Hendrick Meulemans
Maurice Francois Louis Henuset
Paul Henri Corneil Groeseneken
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Atomic Energy Community Euratom
Original Assignee
European Atomic Energy Community Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from NL6401328A external-priority patent/NL6401328A/xx
Application filed by European Atomic Energy Community Euratom filed Critical European Atomic Energy Community Euratom
Priority to FR5541A priority Critical patent/FR1424727A/fr
Application granted granted Critical
Publication of FR1424727A publication Critical patent/FR1424727A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR5541A 1964-02-14 1965-02-15 Dispositif de bombardement électronique Expired FR1424727A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR5541A FR1424727A (fr) 1964-02-14 1965-02-15 Dispositif de bombardement électronique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL6401328A NL6401328A (fr) 1964-02-14 1964-02-14
FR5541A FR1424727A (fr) 1964-02-14 1965-02-15 Dispositif de bombardement électronique

Publications (1)

Publication Number Publication Date
FR1424727A true FR1424727A (fr) 1966-01-14

Family

ID=26162046

Family Applications (1)

Application Number Title Priority Date Filing Date
FR5541A Expired FR1424727A (fr) 1964-02-14 1965-02-15 Dispositif de bombardement électronique

Country Status (1)

Country Link
FR (1) FR1424727A (fr)

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