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FR1369712A - Dispositif de vaporisation sous vide de bandes - Google Patents

Dispositif de vaporisation sous vide de bandes

Info

Publication number
FR1369712A
FR1369712A FR947967A FR947967A FR1369712A FR 1369712 A FR1369712 A FR 1369712A FR 947967 A FR947967 A FR 947967A FR 947967 A FR947967 A FR 947967A FR 1369712 A FR1369712 A FR 1369712A
Authority
FR
France
Prior art keywords
tape vacuum
vacuum vaporizer
vaporizer
tape
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR947967A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
Original Assignee
WC Heraus GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
Application granted granted Critical
Publication of FR1369712A publication Critical patent/FR1369712A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR947967A 1962-09-25 1963-09-19 Dispositif de vaporisation sous vide de bandes Expired FR1369712A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH46998A DE1199097B (de) 1962-09-25 1962-09-25 Vorrichtung zum Vakuumbedampfen breiter Baender, insbesondere mit Metallen, durch Erhitzen des Verdampfungsgutes mittels Elektronenstrahlen

Publications (1)

Publication Number Publication Date
FR1369712A true FR1369712A (fr) 1964-08-14

Family

ID=7156294

Family Applications (1)

Application Number Title Priority Date Filing Date
FR947967A Expired FR1369712A (fr) 1962-09-25 1963-09-19 Dispositif de vaporisation sous vide de bandes

Country Status (3)

Country Link
US (1) US3303320A (fr)
DE (1) DE1199097B (fr)
FR (1) FR1369712A (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
US3474218A (en) * 1966-01-10 1969-10-21 Air Reduction Electron beam conditioning ingot and slab surfaces
DE1521251B2 (de) * 1966-05-03 1970-03-26 Farbenfabriken Bayer Aktiengesellschaft, 5090 Leverkusen Vorrichtung und Verfahren zum gleichmäßigen Verdampfen und Auftragen von hochschmelzenden Materialien, insbesondere Quarz
US3467057A (en) * 1966-07-27 1969-09-16 Hitachi Ltd Electron beam evaporator
US3379819A (en) * 1966-09-15 1968-04-23 Filmtech Associates Inc Electron gun for evaporating or sublimating material in a vacuum environment
US3497602A (en) * 1966-12-16 1970-02-24 Air Reduction Apparatus for producing and directing an electron beam in an electron beam furnace
US3446934A (en) * 1968-01-30 1969-05-27 Air Reduction Electron beam heating apparatus
US3535489A (en) * 1968-05-03 1970-10-20 Smith Corp A O Electron beam welding apparatus
US3575132A (en) * 1968-10-25 1971-04-13 Bethlehem Steel Corp Vapor deposition apparatus
DD204947A1 (de) * 1982-04-20 1983-12-14 Manfred Neumann Einrichtung zum elektronenstrahlbedampfen breiter baender
US4835789A (en) * 1987-11-16 1989-05-30 Hanks Charles W Electron-beam heated evaporation source
US4947404A (en) * 1987-11-16 1990-08-07 Hanks Charles W Magnet structure for electron-beam heated evaporation source
US5622564A (en) * 1995-01-20 1997-04-22 Compu-Vac Systems, Inc. Metallizing apparatus
US6175585B1 (en) * 1999-07-15 2001-01-16 Oregon Metallurgical Corporation Electron beam shielding apparatus and methods for shielding electron beams
US20050092253A1 (en) * 2003-11-04 2005-05-05 Venkat Selvamanickam Tape-manufacturing system having extended operational capabilites

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
DE1072451B (de) * 1955-07-06 1960-06-02 English Electric Valve Company Limited, London Vorrichtung zur Herstellung von Überzügen durch Vakuumaufdampfen
US3036549A (en) * 1957-05-08 1962-05-29 Sumitomo Electric Industries Apparatus for vacuum evaporation of metals
US3043728A (en) * 1958-03-17 1962-07-10 Nat Res Corp Apparatus and process for metallic vapor coating
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
NL287527A (fr) * 1962-01-15
US3170019A (en) * 1962-01-15 1965-02-16 Stauffer Chemical Co Electron beam furnace
NL293028A (fr) * 1962-06-05

Also Published As

Publication number Publication date
DE1199097B (de) 1965-08-19
US3303320A (en) 1967-02-07

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