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FR1354784A - Canon à électrons - Google Patents

Canon à électrons

Info

Publication number
FR1354784A
FR1354784A FR899323A FR899323A FR1354784A FR 1354784 A FR1354784 A FR 1354784A FR 899323 A FR899323 A FR 899323A FR 899323 A FR899323 A FR 899323A FR 1354784 A FR1354784 A FR 1354784A
Authority
FR
France
Prior art keywords
electron gun
gun
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR899323A
Other languages
English (en)
Inventor
P Thome
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to BE633078D priority Critical patent/BE633078A/xx
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR899323A priority patent/FR1354784A/fr
Priority to LU43749D priority patent/LU43749A1/xx
Priority to DE1963C0010512 priority patent/DE1876616U/de
Priority to GB2039963A priority patent/GB1020725A/en
Application granted granted Critical
Publication of FR1354784A publication Critical patent/FR1354784A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)
FR899323A 1962-05-30 1962-05-30 Canon à électrons Expired FR1354784A (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
BE633078D BE633078A (fr) 1962-05-30
FR899323A FR1354784A (fr) 1962-05-30 1962-05-30 Canon à électrons
LU43749D LU43749A1 (fr) 1962-05-30 1963-05-15
DE1963C0010512 DE1876616U (de) 1962-05-30 1963-05-17 Elektronen-kanone.
GB2039963A GB1020725A (en) 1962-05-30 1963-05-22 Apparatus for welding by electronic bombardment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR899323A FR1354784A (fr) 1962-05-30 1962-05-30 Canon à électrons

Publications (1)

Publication Number Publication Date
FR1354784A true FR1354784A (fr) 1964-03-13

Family

ID=8780121

Family Applications (1)

Application Number Title Priority Date Filing Date
FR899323A Expired FR1354784A (fr) 1962-05-30 1962-05-30 Canon à électrons

Country Status (5)

Country Link
BE (1) BE633078A (fr)
DE (1) DE1876616U (fr)
FR (1) FR1354784A (fr)
GB (1) GB1020725A (fr)
LU (1) LU43749A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0473216A2 (fr) * 1990-08-10 1992-03-04 Koninklijke Philips Electronics N.V. Dispositif à faisceau de particules chargées
EP0523699A1 (fr) * 1991-07-18 1993-01-20 Hitachi, Ltd. Appareil à faisceau de particules chargées

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0473216A2 (fr) * 1990-08-10 1992-03-04 Koninklijke Philips Electronics N.V. Dispositif à faisceau de particules chargées
EP0473216A3 (fr) * 1990-08-10 1992-03-11 Koninklijke Philips Electronics N.V. Dispositif à faisceau de particules chargées
EP0689225A1 (fr) * 1990-08-10 1995-12-27 Koninklijke Philips Electronics N.V. Dispositif à faisceau de particules changées
EP0523699A1 (fr) * 1991-07-18 1993-01-20 Hitachi, Ltd. Appareil à faisceau de particules chargées
US5324950A (en) * 1991-07-18 1994-06-28 Hitachi, Ltd. Charged particle beam apparatus

Also Published As

Publication number Publication date
GB1020725A (en) 1966-02-23
DE1876616U (de) 1963-08-01
BE633078A (fr)
LU43749A1 (fr) 1963-07-15

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