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FR1164034A - Perfectionnements aux creusets pour le dépôt de couches métallisées - Google Patents

Perfectionnements aux creusets pour le dépôt de couches métallisées

Info

Publication number
FR1164034A
FR1164034A FR1164034DA FR1164034A FR 1164034 A FR1164034 A FR 1164034A FR 1164034D A FR1164034D A FR 1164034DA FR 1164034 A FR1164034 A FR 1164034A
Authority
FR
France
Prior art keywords
crucibles
metallized layers
depositing
depositing metallized
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Inventor
Jean-Marie-Paul Dumigron
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1164034A publication Critical patent/FR1164034A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR1164034D 1956-12-27 1956-12-27 Perfectionnements aux creusets pour le dépôt de couches métallisées Expired FR1164034A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1164034T 1956-12-27

Publications (1)

Publication Number Publication Date
FR1164034A true FR1164034A (fr) 1958-10-06

Family

ID=9653797

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1164034D Expired FR1164034A (fr) 1956-12-27 1956-12-27 Perfectionnements aux creusets pour le dépôt de couches métallisées

Country Status (1)

Country Link
FR (1) FR1164034A (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3590269C2 (de) * 1984-06-12 1988-01-14 Ki Politekhn I Im 50 Letijavel Verdampfer zum Aufbringen von D}nnschichten durch Vakuumaufdampfen
US5432341A (en) * 1992-07-29 1995-07-11 Gspann; Juergen Process and apparatus for producing agglomerate rays
WO1997047782A1 (fr) * 1996-06-13 1997-12-18 Centre De Recherches Metallurgiques-Centrum Voor Research In De Metallurgie Procede et dispositif pour revetir en continu un substrat en mouvement au moyen d'une vapeur metallique
US5820681A (en) * 1995-05-03 1998-10-13 Chorus Corporation Unibody crucible and effusion cell employing such a crucible
US5827371A (en) * 1995-05-03 1998-10-27 Chorus Corporation Unibody crucible and effusion source employing such a crucible

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3590269C2 (de) * 1984-06-12 1988-01-14 Ki Politekhn I Im 50 Letijavel Verdampfer zum Aufbringen von D}nnschichten durch Vakuumaufdampfen
US5432341A (en) * 1992-07-29 1995-07-11 Gspann; Juergen Process and apparatus for producing agglomerate rays
US5820681A (en) * 1995-05-03 1998-10-13 Chorus Corporation Unibody crucible and effusion cell employing such a crucible
US5827371A (en) * 1995-05-03 1998-10-27 Chorus Corporation Unibody crucible and effusion source employing such a crucible
US5932294A (en) * 1995-05-03 1999-08-03 Chorus Corporation MBE deposition method employing effusion cell having a unibody crucible
WO1997047782A1 (fr) * 1996-06-13 1997-12-18 Centre De Recherches Metallurgiques-Centrum Voor Research In De Metallurgie Procede et dispositif pour revetir en continu un substrat en mouvement au moyen d'une vapeur metallique

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