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FR1105035A - Method and device for performing technical operations by glow discharge - Google Patents

Method and device for performing technical operations by glow discharge

Info

Publication number
FR1105035A
FR1105035A FR1105035DA FR1105035A FR 1105035 A FR1105035 A FR 1105035A FR 1105035D A FR1105035D A FR 1105035DA FR 1105035 A FR1105035 A FR 1105035A
Authority
FR
France
Prior art keywords
glow discharge
technical operations
performing technical
operations
glow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektrophysikalische Anstalt Bernhard Berghaus
Original Assignee
Elektrophysikalische Anstalt Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektrophysikalische Anstalt Bernhard Berghaus filed Critical Elektrophysikalische Anstalt Bernhard Berghaus
Application granted granted Critical
Publication of FR1105035A publication Critical patent/FR1105035A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Furnace Details (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Discharge Heating (AREA)
FR1105035D 1953-05-28 1954-05-26 Method and device for performing technical operations by glow discharge Expired FR1105035A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH794175X 1953-05-28

Publications (1)

Publication Number Publication Date
FR1105035A true FR1105035A (en) 1955-11-25

Family

ID=4537184

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1105035D Expired FR1105035A (en) 1953-05-28 1954-05-26 Method and device for performing technical operations by glow discharge

Country Status (6)

Country Link
US (1) US2824210A (en)
CH (1) CH319658A (en)
DE (1) DE1000657B (en)
FR (1) FR1105035A (en)
GB (2) GB794175A (en)
NL (1) NL108190C (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2337206A1 (en) * 1975-12-29 1977-07-29 Kawasaki Heavy Ind Ltd IONIC NITRURATION BY LUMINESCENT DISCHARGE
EP0115378A2 (en) * 1983-01-05 1984-08-08 Xis Incorporated Manufacturing process for selenium photoreceptors

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL112276C (en) * 1953-12-09
NL126129C (en) * 1959-06-30
CH384009A (en) * 1960-02-10 1964-11-15 Berghaus Elektrophysik Anst Process for the remuneration of workpieces in an electric glow discharge
DE1271267B (en) * 1961-04-14 1968-06-27 Litton Systems Inc Low pressure mercury vapor discharge tubes
US3423562A (en) * 1965-06-24 1969-01-21 Gen Electric Glow discharge apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US752358A (en) * 1904-02-16 Process of heating articles by electricity
US1324001A (en) * 1919-12-02 Hugh a
US1047502A (en) * 1907-08-24 1912-12-17 Gen Electric Art of manufacturing lamp-filaments.
DE368938C (en) * 1920-10-16 1923-02-10 Aeg Electric annealing furnace for hardening and other metallurgical purposes
US1966496A (en) * 1930-12-10 1934-07-17 Western Electric Co Method of treating metals

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2337206A1 (en) * 1975-12-29 1977-07-29 Kawasaki Heavy Ind Ltd IONIC NITRURATION BY LUMINESCENT DISCHARGE
EP0115378A2 (en) * 1983-01-05 1984-08-08 Xis Incorporated Manufacturing process for selenium photoreceptors
EP0115378A3 (en) * 1983-01-05 1985-05-22 Xis Incorporated Manufacturing process for selenium photoreceptors

Also Published As

Publication number Publication date
NL108190C (en)
GB794175A (en) 1958-04-30
GB794174A (en) 1958-04-30
CH319658A (en) 1957-02-28
DE1000657B (en) 1957-01-10
US2824210A (en) 1958-02-18

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