FI943048A0 - Differential pressure sensor of capacitive type - Google Patents

Differential pressure sensor of capacitive type

Info

Publication number: FI943048A0
Authority: FI; Finland
Prior art keywords: pressure sensor; differential pressure; capacitive type; capacitive; type
Prior art date: 1993-06-25

Application number

FI943048A

Other languages

Finnish (fi)

Swedish (sv)

Other versions

FI943048A (en

Inventor

Felix Rudolf

Philippe Renaud

Original Assignee

Suisse Electronique Microtech

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1993-06-25

Filing date

1994-06-23

Publication date

1994-06-23

1994-06-23 Application filed by Suisse Electronique Microtech filed Critical Suisse Electronique Microtech

1994-06-23 Publication of FI943048A0 publication Critical patent/FI943048A0/en

1994-12-26 Publication of FI943048A publication Critical patent/FI943048A/en

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Ceramic Engineering (AREA)
Analytical Chemistry (AREA)
Measuring Fluid Pressure (AREA)

FI943048A 1993-06-25 1994-06-23 Capacitive type differential pressure sensor FI943048A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CH01911/93A CH688745A5 (en)	1993-06-25	1993-06-25	differential pressure sensor of capacitive type.

Publications (2)

Publication Number	Publication Date
FI943048A0 true FI943048A0 (en)	1994-06-23
FI943048A FI943048A (en)	1994-12-26

Family

ID=4221481

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FI943048A FI943048A (en)	1993-06-25	1994-06-23	Capacitive type differential pressure sensor

Country Status (5)

Country	Link
EP (1)	EP0639761A1 (en)
JP (1)	JPH0727646A (en)
CH (1)	CH688745A5 (en)
FI (1)	FI943048A (en)
NO (1)	NO942410L (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19750131C2 (en) *	1997-11-13	2002-06-13	Infineon Technologies Ag	Micromechanical differential pressure sensor device
JPH11295176A (en) *	1998-04-14	1999-10-29	Nagano Keiki Co Ltd	Differential pressure sensor
EP1144977B1 (en) *	1998-12-15	2003-10-15	Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V.	Method of producing a micro-electromechanical element
ATE227423T1 (en) *	1998-12-15	2002-11-15	Fraunhofer Ges Forschung	METHOD FOR PRODUCING A MICROMECHANICAL STRUCTURE FOR A MICRO-ELECTROMECHANICAL ELEMENT
EP1128175A1 (en) *	2000-02-23	2001-08-29	Ethniko Kentro Erevnas Fisikon Epistimon "Dimokritos"	Long-term stable capacitive pressure sensor made with self-aligned process
WO2001063645A2 (en)	2000-02-23	2001-08-30	National Center For Scientific Research 'demokrit Os Institute Of Microelectronics	Capacitive pressure-responsive devices and their fabrication
DE10249238B4 (en) *	2002-10-23	2006-09-21	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Sensor chip for a differential pressure sensor with double-sided overload protection
JP2004340576A (en) *	2003-03-17	2004-12-02	Kyocera Corp	Package for pressure detector
JP4940786B2 (en) *	2006-06-29	2012-05-30	株式会社デンソー	Pressure sensor
FR2905461B1 (en) *	2006-08-31	2010-09-24	Peuvedic Jean Marc Le	DEVICE FOR MEASURING PRESSURE DIFFERENCES IN FLUIDS.
ITUD20130145A1 (en) *	2013-11-06	2015-05-07	Eliwell Controls S R L Con Unico S Ocio	DIGITAL PRESSURE SENSOR FOR A HOUSEHOLD AND ELECTRIC HOUSE EQUIPPED WITH THIS SENSOR
DE102014119407A1 (en) *	2014-12-22	2016-06-23	Endress + Hauser Gmbh + Co. Kg	Differential pressure sensor and differential pressure transducer with such a differential pressure sensor
CN112897450B (en) *	2021-01-19	2022-11-11	北京遥测技术研究所	MEMS absolute pressure type pressure sensor and processing method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4445383A (en) *	1982-06-18	1984-05-01	General Signal Corporation	Multiple range capacitive pressure transducer
DE3404262A1 (en) *	1983-03-09	1984-09-13	Fuji Electric Co., Ltd., Kawasaki	CAPACITIVE PROBE
US4565096A (en) *	1983-12-09	1986-01-21	Rosemount Inc.	Pressure transducer
US4730496A (en) *	1986-06-23	1988-03-15	Rosemount Inc.	Capacitance pressure sensor
US4879627A (en) *	1988-12-30	1989-11-07	United Technologies Corporation	Differential capacitive pressure sensor with over-pressure protection
DE4132391C1 (en) *	1991-09-26	1992-10-01	Siemens Ag, 8000 Muenchen, De	Pressure difference measurement transducer - has two electrically conducting diaphragms separated by insulating plate and has strain gauge connected to evaluation circuitry

1993
- 1993-06-25 CH CH01911/93A patent/CH688745A5/en not_active IP Right Cessation
1994
- 1994-06-15 EP EP94109142A patent/EP0639761A1/en not_active Withdrawn
- 1994-06-21 JP JP6160721A patent/JPH0727646A/en active Pending
- 1994-06-23 FI FI943048A patent/FI943048A/en unknown
- 1994-06-24 NO NO942410A patent/NO942410L/en not_active Application Discontinuation

Also Published As

Publication number	Publication date
NO942410D0 (en)	1994-06-24
JPH0727646A (en)	1995-01-31
NO942410L (en)	1994-12-27
CH688745A5 (en)	1998-02-13
FI943048A (en)	1994-12-26
EP0639761A1 (en)	1995-02-22

Publication	Publication Date	Title
DK0674164T3 (en)	1998-02-23	Capacitive pressure sensor or differential pressure sensor
EP0727650A3 (en)	1996-12-11	Micromachined symmetrical differential pressure sensor
DE69210041D1 (en)	1996-05-23	DESIGN OF PIEZORESISTIVE PRESSURE SENSOR MADE FROM SILICON
BR8706755A (en)	1988-07-19	ELECTROSTATIC CAPACITIVE PRESSURE SENSOR
DK106088D0 (en)	1988-02-29	DIFFERENTIAL PRESSURE SENSOR
DE69410828D1 (en)	1998-07-09	PRESSURE SENSING ARRANGEMENT
DE69310260D1 (en)	1997-06-05	Integrated angular accelerometer with capacitive sensors
BR9001722A (en)	1991-05-21	DIFFERENTIAL PRESSURE CAPACITIVE DETECTOR
EP0714505A4 (en)	1997-02-26	Capacitive pressure sensor
FI945666L (en)	1995-06-03	Tire pressure sensor
BR8505067A (en)	1986-07-29	CAPACITIVE ABSOLUTE PRESSURE TRANSDUCER
DK0587032T3 (en)	1999-02-08	Integrated capacitive transducer
BR9306946A (en)	1999-01-12	Pressure Sensor
BR9000012A (en)	1990-10-09	DIFFERENTIAL CAPACITIVE PRESSURE SENSOR AND PROCESS TO PROVIDE PROTECTION AGAINST OVERPRESSION FOR THE SAME
FI951462A0 (en)	1995-03-28	Differential Pressure Connection
EP0618435A3 (en)	1995-02-01	Capacitive pressure sensor.
FI943048A0 (en)	1994-06-23	Differential pressure sensor of capacitive type
FI883523A0 (en)	1988-07-27	Capacitive pressure sensors
FI933124A0 (en)	1993-07-07	Capacitive pressure sensor design and method of manufacture thereof
DE69306019D1 (en)	1997-01-02	Pressure sensor
BR9703820A (en)	1998-08-25	Capacitive differential pressure detector
ATE126389T1 (en)	1995-08-15	DIFFERENTIAL PRESSURE TRANSDUCER.
FR2729758B1 (en)	1999-05-28	DIFFERENTIAL PRESSURE INDICATOR
DE58906752D1 (en)	1994-03-03	Circuit arrangement for temperature compensation of capacitive pressure and differential pressure sensors.
FR2731071B1 (en)	1998-12-31	DIFFERENTIAL PRESSURE INDICATOR