FI20145044A - Parannettu paineanturi - Google Patents

Parannettu paineanturi

Info

Publication number: FI20145044A
Authority: FI; Finland
Prior art keywords: pressure sensor; improved pressure; improved; sensor; pressure
Prior art date: 2014-01-17

Application number

FI20145044A

Other languages

English (en)

Swedish (sv)

Other versions

FI126999B (fi

Inventor

Heikki Kuisma

Koichi Yoshida

Original Assignee

Murata Manufacturing Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2014-01-17

Filing date

2014-01-17

Publication date

2015-07-18

2014-01-17 Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co

2014-01-17 Priority to FI20145044A priority Critical patent/FI126999B/fi

2015-01-13 Priority to JP2016546981A priority patent/JP6256619B2/ja

2015-01-13 Priority to CN201580004485.4A priority patent/CN105917205B/zh

2015-01-13 Priority to PCT/IB2015/050241 priority patent/WO2015107453A1/en

2015-01-13 Priority to KR1020167021967A priority patent/KR101848226B1/ko

2015-01-15 Priority to TW104101296A priority patent/TWI648527B/zh

2015-01-20 Priority to US14/600,240 priority patent/US9829405B2/en

2015-07-18 Publication of FI20145044A publication Critical patent/FI20145044A/fi

2017-09-15 Application granted granted Critical

2017-09-15 Publication of FI126999B publication Critical patent/FI126999B/fi

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Measuring Fluid Pressure (AREA)
Pressure Sensors (AREA)
Micromachines (AREA)

FI20145044A 2014-01-17 2014-01-17 Parannettu paineanturi FI126999B (fi)

Priority Applications (7)

Application Number	Priority Date	Filing Date	Title
FI20145044A FI126999B (fi)	2014-01-17	2014-01-17	Parannettu paineanturi
JP2016546981A JP6256619B2 (ja)	2014-01-17	2015-01-13	改良された圧力センサ構造
CN201580004485.4A CN105917205B (zh)	2014-01-17	2015-01-13	改进的压力传感器结构
PCT/IB2015/050241 WO2015107453A1 (en)	2014-01-17	2015-01-13	An improved pressure sensor structure
KR1020167021967A KR101848226B1 (ko)	2014-01-17	2015-01-13	향상된 압력 센서 구조
TW104101296A TWI648527B (zh)	2014-01-17	2015-01-15	改良的壓力感測器結構
US14/600,240 US9829405B2 (en)	2014-01-17	2015-01-20	Micromechanical pressure sensor structure having a side wall layer

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FI20145044A FI126999B (fi)	2014-01-17	2014-01-17	Parannettu paineanturi

Publications (2)

Publication Number	Publication Date
FI20145044A true FI20145044A (fi)	2015-07-18
FI126999B FI126999B (fi)	2017-09-15

Family

ID=52574193

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FI20145044A FI126999B (fi)	2014-01-17	2014-01-17	Parannettu paineanturi

Country Status (7)

Country	Link
US (1)	US9829405B2 (fi)
JP (1)	JP6256619B2 (fi)
KR (1)	KR101848226B1 (fi)
CN (1)	CN105917205B (fi)
FI (1)	FI126999B (fi)
TW (1)	TWI648527B (fi)
WO (1)	WO2015107453A1 (fi)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FI125958B (fi) *	2013-05-10	2016-04-29	Murata Manufacturing Co	Parannettu paineanturi
FI125960B (fi) *	2013-05-28	2016-04-29	Murata Manufacturing Co	Parannettu paineanturi
FI125447B (fi) *	2013-06-04	2015-10-15	Murata Manufacturing Co	Parannettu paineanturi
US11284808B2 (en)	2014-10-11	2022-03-29	Linet Spol. S.R.O.	Device and method for measurement of vital functions, including intracranial pressure, and system and method for collecting data
WO2017220056A1 (en) *	2016-06-22	2017-12-28	Linet Spol. S R.O.	Medical data collection system and method of use thereof
US10421565B2 (en) *	2015-05-25	2019-09-24	2266170 Ontario Inc.	Apparatus and method for the detection of leaks in a sealed capsule
JP6486866B2 (ja) *	2016-05-27	2019-03-20	日立オートモティブシステムズ株式会社	物理量測定装置およびその製造方法ならびに物理量測定素子
JP2020003211A (ja) *	2016-09-29	2020-01-09	株式会社村田製作所	容量測定回路及び容量測定システム
KR102039577B1 (ko) *	2017-12-05	2019-11-01	삼성중공업 주식회사	액화수소 저장탱크 누출 감지 장치
JP6922797B2 (ja) *	2018-03-15	2021-08-18	オムロン株式会社	静電容量式圧力センサ
JP6922798B2 (ja) *	2018-03-15	2021-08-18	オムロン株式会社	静電容量式圧力センサ
CN113557419A (zh)	2019-03-13	2021-10-26	株式会社村田制作所	压力传感器
JP7485045B2 (ja) *	2020-07-21	2024-05-16	株式会社村田製作所	圧力センサ構造、圧力センサ装置および圧力センサ構造の製造方法
US11940336B2 (en) *	2021-03-26	2024-03-26	Sporian Microsystems, Inc.	Driven-shield capacitive pressure sensor
JPWO2023058660A1 (fi) *	2021-10-05	2023-04-13

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3737059A1 (de) *	1987-10-29	1989-05-11	Siemens Ag	Messumformer mit einem kapazitiven sensor
US4951174A (en)	1988-12-30	1990-08-21	United Technologies Corporation	Capacitive pressure sensor with third encircling plate
US4954925A (en)	1988-12-30	1990-09-04	United Technologies Corporation	Capacitive sensor with minimized dielectric drift
JP2000307127A (ja) *	1999-04-26	2000-11-02	Omron Corp	静電容量型センサ
JP2001255225A (ja) *	2000-03-10	2001-09-21	Anelva Corp	静電容量型真空センサ
JP3771425B2 (ja) *	2000-07-04	2006-04-26	株式会社山武	容量式圧力センサおよびその製造方法
JP2002181648A (ja)	2000-12-19	2002-06-26	Fujikura Ltd	圧力センサ
US6720777B2 (en) *	2002-02-15	2004-04-13	Rosemount Inc.	Bridged capacitor sensor measurement circuit
EP1522521B1 (en)	2003-10-10	2015-12-09	Infineon Technologies AG	Capacitive sensor
JP3930862B2 (ja) *	2004-02-13	2007-06-13	東京エレクトロン株式会社	容量型センサ
DE102004011144B4 (de) *	2004-03-08	2013-07-04	Infineon Technologies Ag	Drucksensor und Verfahren zum Betreiben eines Drucksensors
JP2007057247A (ja) *	2005-08-22	2007-03-08	Hosiden Corp	静電容量型センサ
JP2007057394A (ja) *	2005-08-24	2007-03-08	Epson Toyocom Corp	圧力センサ、及びその製造方法
JP2007278716A (ja) *	2006-04-03	2007-10-25	Epson Toyocom Corp	容量変化型圧力センサ
US8334159B1 (en)	2009-03-30	2012-12-18	Advanced Numicro Systems, Inc.	MEMS pressure sensor using capacitive technique
EP2520917A1 (en) *	2011-05-04	2012-11-07	Nxp B.V.	MEMS Capacitive Pressure Sensor, Operating Method and Manufacturing Method
TWI444605B (zh) *	2011-12-12	2014-07-11	Metrodyne Microsystem Corp	微機電系統壓力感測元件及其製作方法
DE102014200500A1 (de) *	2014-01-14	2015-07-16	Robert Bosch Gmbh	Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren

2014
- 2014-01-17 FI FI20145044A patent/FI126999B/fi active IP Right Grant
2015
- 2015-01-13 WO PCT/IB2015/050241 patent/WO2015107453A1/en active Application Filing
- 2015-01-13 JP JP2016546981A patent/JP6256619B2/ja active Active
- 2015-01-13 KR KR1020167021967A patent/KR101848226B1/ko active Active
- 2015-01-13 CN CN201580004485.4A patent/CN105917205B/zh active Active
- 2015-01-15 TW TW104101296A patent/TWI648527B/zh active
- 2015-01-20 US US14/600,240 patent/US9829405B2/en active Active

Also Published As

Publication number	Publication date
TWI648527B (zh)	2019-01-21
US20150204744A1 (en)	2015-07-23
KR20160108471A (ko)	2016-09-19
TW201531682A (zh)	2015-08-16
FI126999B (fi)	2017-09-15
US9829405B2 (en)	2017-11-28
JP2017506329A (ja)	2017-03-02
CN105917205A (zh)	2016-08-31
KR101848226B1 (ko)	2018-05-28
JP6256619B2 (ja)	2018-01-10
CN105917205B (zh)	2019-03-19
WO2015107453A1 (en)	2015-07-23

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GB2526440B (en)	2018-03-21	Sensor arrangements
DK3349000T3 (da)	2020-02-17	Sensorindretning
EP3185757C0 (en)	2023-06-07	Elastic sensor
GB201403389D0 (en)	2014-04-09	Sensor
FI20145044A (fi)	2015-07-18	Parannettu paineanturi
GB201405713D0 (en)	2014-05-14	Fluid sensor
EP3094246C0 (en)	2024-03-06	IMPLANTABLE SENSOR
HK1253212A1 (zh)	2019-06-14	壓力感測器
TWI563254B (en)	2016-12-21	Sensor
FI20145680A (fi)	2016-01-19	Anturijärjestely
DK3380822T3 (da)	2019-10-14	Optisk tryksensor
DK3111130T3 (da)	2023-02-27	Trykbeholder
HUE052374T2 (hu)	2021-04-28	Irányított nyomáskülönbség érzékelõ
DK3117245T3 (da)	2022-01-31	Seismisk sensor
DK3169992T3 (da)	2023-01-23	Sensorarray
EP3224820C0 (en)	2023-07-26	DUAL STEREOSCOPIC SENSOR
DE112017005112A5 (de)	2019-06-27	Sensor
DK3124938T3 (da)	2019-05-13	Tryksensor
EP3712585A4 (en)	2021-08-18	PRESSURE SENSOR
EP3230727C0 (en)	2024-08-21	Acoustic sensor
DK3099940T3 (da)	2020-01-02	Trykakkumulator
DK3032247T3 (da)	2020-01-27	Gassensorelement
DK3205888T3 (da)	2020-04-27	Fluidtrykstyringsanordning
EP3348162A4 (en)	2019-04-10	PUSH BUTTON
DE102017000616A8 (de)	2017-09-14	Sensor

Legal Events

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