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FI20041106L - Micromechanical switch and integrated component - Google Patents

Micromechanical switch and integrated component Download PDF

Info

Publication number
FI20041106L
FI20041106L FI20041106A FI20041106A FI20041106L FI 20041106 L FI20041106 L FI 20041106L FI 20041106 A FI20041106 A FI 20041106A FI 20041106 A FI20041106 A FI 20041106A FI 20041106 L FI20041106 L FI 20041106L
Authority
FI
Finland
Prior art keywords
clutch
built
change
integrated component
integrated
Prior art date
Application number
FI20041106A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI20041106A0 (en
FI20041106A7 (en
Inventor
Eero Ristolainen
Sami Myllymaeki
Original Assignee
Zipic Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zipic Oy filed Critical Zipic Oy
Priority to FI20041106A priority Critical patent/FI20041106A7/en
Publication of FI20041106A0 publication Critical patent/FI20041106A0/en
Priority to PCT/FI2005/000363 priority patent/WO2006021612A1/en
Publication of FI20041106L publication Critical patent/FI20041106L/en
Publication of FI20041106A7 publication Critical patent/FI20041106A7/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Micromachines (AREA)
  • Arrangement And Mounting Of Devices That Control Transmission Of Motive Force (AREA)
  • Hydraulic Clutches, Magnetic Clutches, Fluid Clutches, And Fluid Joints (AREA)

Abstract

A micro-mechanical clutch. The clutch comprises a clutch built on semiconductor film (100) and a component (110) built at least partly overlapping it and integrated with it. To the area, the motion of which is caused by the clutch, a voltage signal resulting in the change of the clutch position so that moving level (104) rests on supports (102) built for it. The change of position produces a change of charge in the integrated component, as result of which the current changes. The clutch can be made in the same semiconductor layer as the SOI-microcircuits.
FI20041106A 2004-08-24 2004-08-24 Micromechanical switch and integrated component FI20041106A7 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FI20041106A FI20041106A7 (en) 2004-08-24 2004-08-24 Micromechanical switch and integrated component
PCT/FI2005/000363 WO2006021612A1 (en) 2004-08-24 2005-08-24 Micro mechanical clutch and a component integrated thereto

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20041106A FI20041106A7 (en) 2004-08-24 2004-08-24 Micromechanical switch and integrated component

Publications (3)

Publication Number Publication Date
FI20041106A0 FI20041106A0 (en) 2004-08-24
FI20041106L true FI20041106L (en) 2006-02-25
FI20041106A7 FI20041106A7 (en) 2006-02-25

Family

ID=32922127

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20041106A FI20041106A7 (en) 2004-08-24 2004-08-24 Micromechanical switch and integrated component

Country Status (2)

Country Link
FI (1) FI20041106A7 (en)
WO (1) WO2006021612A1 (en)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6277666B1 (en) * 1999-06-24 2001-08-21 Honeywell Inc. Precisely defined microelectromechanical structures and associated fabrication methods
US6466102B1 (en) * 1999-10-05 2002-10-15 National Research Council Of Canada High isolation micro mechanical switch
US6621387B1 (en) * 2001-02-23 2003-09-16 Analatom Incorporated Micro-electro-mechanical systems switch
US6750078B2 (en) * 2001-11-02 2004-06-15 Intel Corporation MEMS switch having hexsil beam and method of integrating MEMS switch with a chip
US6621392B1 (en) * 2002-04-25 2003-09-16 International Business Machines Corporation Micro electromechanical switch having self-aligned spacers
KR100485787B1 (en) * 2002-08-20 2005-04-28 삼성전자주식회사 Micro Electro Mechanical Structure RF swicth
EP1535297B1 (en) * 2002-08-26 2008-03-05 International Business Machines Corporation Diaphragm activated micro-electromechanical switch
FR2845075B1 (en) * 2002-09-27 2005-08-05 Thales Sa ELECTROSTATIC ACTUATOR MICROCONTUTERS WITH LOW RESPONSE TIME AND POWER SWITCHING AND METHOD OF MAKING SAME

Also Published As

Publication number Publication date
WO2006021612A1 (en) 2006-03-02
FI20041106A0 (en) 2004-08-24
FI20041106A7 (en) 2006-02-25

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