ES554538A0 - Un metodo de fabricar una estructura fotovoltaica. - Google Patents
Un metodo de fabricar una estructura fotovoltaica.Info
- Publication number
- ES554538A0 ES554538A0 ES554538A ES554538A ES554538A0 ES 554538 A0 ES554538 A0 ES 554538A0 ES 554538 A ES554538 A ES 554538A ES 554538 A ES554538 A ES 554538A ES 554538 A0 ES554538 A0 ES 554538A0
- Authority
- ES
- Spain
- Prior art keywords
- manufacturing
- photovoltaic structure
- photovoltaic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/17—Photovoltaic cells having only PIN junction potential barriers
- H10F10/172—Photovoltaic cells having only PIN junction potential barriers comprising multiple PIN junctions, e.g. tandem cells
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02425—Conductive materials, e.g. metallic silicides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02441—Group 14 semiconducting materials
- H01L21/0245—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02579—P-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/40—Crystalline structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/17—Photovoltaic cells having only PIN junction potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
- H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
- H10F77/162—Non-monocrystalline materials, e.g. semiconductor particles embedded in insulating materials
- H10F77/164—Polycrystalline semiconductors
- H10F77/1642—Polycrystalline semiconductors including only Group IV materials
- H10F77/1648—Polycrystalline semiconductors including only Group IV materials including microcrystalline Group IV-IV materials, e.g. microcrystalline SiGe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Photovoltaic Devices (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/667,659 US4600801A (en) | 1984-11-02 | 1984-11-02 | Fluorinated, p-doped microcrystalline silicon semiconductor alloy material |
US06/701,320 US4609771A (en) | 1984-11-02 | 1985-02-13 | Tandem junction solar cell devices incorporating improved microcrystalline p-doped semiconductor alloy material |
Publications (2)
Publication Number | Publication Date |
---|---|
ES554538A0 true ES554538A0 (es) | 1988-12-01 |
ES8900101A1 ES8900101A1 (es) | 1988-12-01 |
Family
ID=27099736
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES548407A Expired ES8701856A1 (es) | 1984-11-02 | 1985-10-31 | Un metodo de fabricar una aleacion semiconductora |
ES554538A Expired ES8900101A1 (es) | 1984-11-02 | 1986-04-30 | Un metodo de fabricar una estructura fotovoltaica. |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES548407A Expired ES8701856A1 (es) | 1984-11-02 | 1985-10-31 | Un metodo de fabricar una aleacion semiconductora |
Country Status (8)
Country | Link |
---|---|
US (1) | US4609771A (es) |
EP (1) | EP0189636A1 (es) |
JP (1) | JPH07123111B2 (es) |
CN (1) | CN85108047B (es) |
AU (1) | AU572065B2 (es) |
BR (1) | BR8505441A (es) |
CA (1) | CA1226658A (es) |
ES (2) | ES8701856A1 (es) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5588994A (en) * | 1980-04-10 | 1996-12-31 | Massachusetts Institute Of Technology | Method of producing sheets of crystalline material and devices made therefrom |
JP2686928B2 (ja) * | 1985-08-26 | 1997-12-08 | アンリツ株式会社 | シリコン・ゲルマニウム混晶薄膜導電体 |
JPH0693519B2 (ja) * | 1987-09-17 | 1994-11-16 | 株式会社富士電機総合研究所 | 非晶質光電変換装置 |
JP2719036B2 (ja) * | 1990-08-10 | 1998-02-25 | 株式会社富士電機総合研究所 | 非晶質光電変換装置およびその製造方法 |
US5176758A (en) * | 1991-05-20 | 1993-01-05 | United Solar Systems Corporation | Translucent photovoltaic sheet material and panels |
US5246506A (en) * | 1991-07-16 | 1993-09-21 | Solarex Corporation | Multijunction photovoltaic device and fabrication method |
ES2042374B1 (es) * | 1991-07-24 | 1994-06-16 | Ramos Jose Alejo | Dosificador de papel higienico de doble uso. |
JPH05243596A (ja) * | 1992-03-02 | 1993-09-21 | Showa Shell Sekiyu Kk | 積層型太陽電池の製造方法 |
GB2301939B (en) * | 1994-03-25 | 1998-10-21 | Amoco Enron Solar | Increasing Stabilized Performance of Amorphous Silicon Based Devices Produced by Highly Hydrogen Diluted Lower Temperature Plasma Deposition |
JP3062012B2 (ja) * | 1994-08-25 | 2000-07-10 | シャープ株式会社 | 液晶ライトバルブ |
JP3437386B2 (ja) * | 1996-09-05 | 2003-08-18 | キヤノン株式会社 | 光起電力素子、並びにその製造方法 |
AU756358B2 (en) * | 1996-09-05 | 2003-01-09 | Canon Kabushiki Kaisha | Photovoltaic element and method of and apparatus for manufacturing the same |
US5977476A (en) * | 1996-10-16 | 1999-11-02 | United Solar Systems Corporation | High efficiency photovoltaic device |
US6159300A (en) * | 1996-12-17 | 2000-12-12 | Canon Kabushiki Kaisha | Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device |
US6303945B1 (en) | 1998-03-16 | 2001-10-16 | Canon Kabushiki Kaisha | Semiconductor element having microcrystalline semiconductor material |
JP2005197608A (ja) * | 2004-01-09 | 2005-07-21 | Mitsubishi Heavy Ind Ltd | 光電変換装置 |
TWI420722B (zh) | 2008-01-30 | 2013-12-21 | Osram Opto Semiconductors Gmbh | 具有封裝單元之裝置 |
US20090272428A1 (en) | 2008-02-28 | 2009-11-05 | Epv Solar, Inc. | Insulating Glass Unit with Integrated Mini-Junction Device |
US20130206219A1 (en) * | 2010-08-06 | 2013-08-15 | Juanita N. Kurtin | Cooperative photovoltaic networks and photovoltaic cell adaptations for use therein |
US8273641B2 (en) * | 2010-08-12 | 2012-09-25 | Ovshinsky Innovation Llc | Plasma deposition of amorphous semiconductors at microwave frequencies |
US9842947B2 (en) * | 2012-01-26 | 2017-12-12 | Fundacio Institut De Ciencies Fotoniques | Photoconversion device with enhanced photon absorption |
US10205042B2 (en) | 2012-01-26 | 2019-02-12 | Fundació Institut De Ciències Fotòniques | Photoconversion device with enhanced photon absorption |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2536174C3 (de) * | 1975-08-13 | 1983-11-03 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum Herstellen von polykristallinen Siliciumschichten für Halbleiterbauelemente |
JPS56122123A (en) * | 1980-03-03 | 1981-09-25 | Shunpei Yamazaki | Semiamorphous semiconductor |
US4400409A (en) * | 1980-05-19 | 1983-08-23 | Energy Conversion Devices, Inc. | Method of making p-doped silicon films |
JPS56165371A (en) * | 1980-05-26 | 1981-12-18 | Shunpei Yamazaki | Semiconductor device |
JPS5767020A (en) * | 1980-10-15 | 1982-04-23 | Agency Of Ind Science & Technol | Thin silicon film and its manufacture |
JPS57160174A (en) * | 1981-03-30 | 1982-10-02 | Hitachi Ltd | Thin film solar battery |
JPS58139478A (ja) * | 1982-02-15 | 1983-08-18 | Agency Of Ind Science & Technol | アモルフアス太陽電池 |
JPS5963673A (ja) * | 1982-10-01 | 1984-04-11 | Hitachi Ltd | 光電池 |
JPS59108370A (ja) * | 1982-12-14 | 1984-06-22 | Kanegafuchi Chem Ind Co Ltd | 光起電力装置 |
JPH065765B2 (ja) * | 1982-12-23 | 1994-01-19 | 株式会社半導体エネルギ−研究所 | 光電変換装置 |
US4496788A (en) * | 1982-12-29 | 1985-01-29 | Osaka Transformer Co., Ltd. | Photovoltaic device |
-
1985
- 1985-02-13 US US06/701,320 patent/US4609771A/en not_active Expired - Lifetime
- 1985-10-03 CA CA000492118A patent/CA1226658A/en not_active Expired
- 1985-10-07 EP EP85307162A patent/EP0189636A1/en not_active Ceased
- 1985-10-24 AU AU49044/85A patent/AU572065B2/en not_active Ceased
- 1985-10-31 BR BR8505441A patent/BR8505441A/pt not_active IP Right Cessation
- 1985-10-31 ES ES548407A patent/ES8701856A1/es not_active Expired
- 1985-11-01 JP JP60246126A patent/JPH07123111B2/ja not_active Expired - Lifetime
- 1985-11-02 CN CN85108047A patent/CN85108047B/zh not_active Expired
-
1986
- 1986-04-30 ES ES554538A patent/ES8900101A1/es not_active Expired
Also Published As
Publication number | Publication date |
---|---|
BR8505441A (pt) | 1986-08-05 |
AU572065B2 (en) | 1988-04-28 |
JPS61174714A (ja) | 1986-08-06 |
CA1226658A (en) | 1987-09-08 |
CN85108047A (zh) | 1986-07-16 |
ES548407A0 (es) | 1986-12-01 |
EP0189636A1 (en) | 1986-08-06 |
ES8900101A1 (es) | 1988-12-01 |
ES8701856A1 (es) | 1986-12-01 |
AU4904485A (en) | 1986-05-08 |
US4609771A (en) | 1986-09-02 |
CN85108047B (zh) | 1988-09-07 |
JPH07123111B2 (ja) | 1995-12-25 |
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