ES386734A1 - Un metodo de fabricar un transistor de efecto de campo de electrodo de mando aislado. - Google Patents
Un metodo de fabricar un transistor de efecto de campo de electrodo de mando aislado.Info
- Publication number
- ES386734A1 ES386734A1 ES386734A ES386734A ES386734A1 ES 386734 A1 ES386734 A1 ES 386734A1 ES 386734 A ES386734 A ES 386734A ES 386734 A ES386734 A ES 386734A ES 386734 A1 ES386734 A1 ES 386734A1
- Authority
- ES
- Spain
- Prior art keywords
- control electrode
- input
- output
- insulating material
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005669 field effect Effects 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000011810 insulating material Substances 0.000 abstract 5
- 239000004065 semiconductor Substances 0.000 abstract 5
- 150000002500 ions Chemical class 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 3
- 238000002513 implantation Methods 0.000 abstract 1
- 238000005468 ion implantation Methods 0.000 abstract 1
- 230000035515 penetration Effects 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/02—Contacts, special
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/053—Field effect transistors fets
Landscapes
- Electrodes Of Semiconductors (AREA)
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB6290969 | 1969-12-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
ES386734A1 true ES386734A1 (es) | 1973-03-16 |
Family
ID=10488614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES386734A Expired ES386734A1 (es) | 1969-12-24 | 1970-12-22 | Un metodo de fabricar un transistor de efecto de campo de electrodo de mando aislado. |
Country Status (11)
Country | Link |
---|---|
US (1) | US3739237A (es) |
JP (1) | JPS4827506B1 (es) |
AT (1) | AT323809B (es) |
BE (1) | BE760707A (es) |
CH (1) | CH519791A (es) |
DE (1) | DE2060333C3 (es) |
ES (1) | ES386734A1 (es) |
FR (1) | FR2073494B1 (es) |
GB (1) | GB1289740A (es) |
NL (1) | NL7018547A (es) |
SE (1) | SE355696B (es) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE28952E (en) * | 1971-03-17 | 1976-08-31 | Rca Corporation | Shaped riser on substrate step for promoting metal film continuity |
FR2184535B1 (es) * | 1972-05-19 | 1980-03-21 | Commissariat Energie Atomique | |
US3895392A (en) * | 1973-04-05 | 1975-07-15 | Signetics Corp | Bipolar transistor structure having ion implanted region and method |
US3947866A (en) * | 1973-06-25 | 1976-03-30 | Signetics Corporation | Ion implanted resistor having controlled temperature coefficient and method |
FR2257145B1 (es) * | 1974-01-04 | 1976-11-26 | Commissariat Energie Atomique | |
US4065847A (en) * | 1974-01-04 | 1978-01-03 | Commissariat A L'energie Atomique | Method of fabrication of a charge-coupled device |
JPS5532032B2 (es) * | 1975-02-20 | 1980-08-22 | ||
JPS52156576A (en) * | 1976-06-23 | 1977-12-27 | Hitachi Ltd | Production of mis semiconductor device |
DE2631873C2 (de) * | 1976-07-15 | 1986-07-31 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur Herstellung eines Halbleiterbauelements mit einem Schottky-Kontakt auf einem zu einem anderen Bereich justierten Gatebereich und mit kleinem Serienwiderstand |
US4224733A (en) * | 1977-10-11 | 1980-09-30 | Fujitsu Limited | Ion implantation method |
US4190466A (en) * | 1977-12-22 | 1980-02-26 | International Business Machines Corporation | Method for making a bipolar transistor structure utilizing self-passivating diffusion sources |
JPS5553462A (en) * | 1978-10-13 | 1980-04-18 | Int Rectifier Corp | Mosfet element |
US5191396B1 (en) * | 1978-10-13 | 1995-12-26 | Int Rectifier Corp | High power mosfet with low on-resistance and high breakdown voltage |
US4523368A (en) * | 1980-03-03 | 1985-06-18 | Raytheon Company | Semiconductor devices and manufacturing methods |
JPS5827363A (ja) * | 1981-08-10 | 1983-02-18 | Fujitsu Ltd | 電界効果トランジスタの製造法 |
US4499653A (en) * | 1983-11-03 | 1985-02-19 | Westinghouse Electric Corp. | Small dimension field effect transistor using phosphorous doped silicon glass reflow process |
NL8400789A (nl) * | 1984-03-13 | 1985-10-01 | Philips Nv | Werkwijze omvattende het gelijktijdig vervaardigen van halfgeleidergebieden met verschillende dotering. |
US4748103A (en) * | 1986-03-21 | 1988-05-31 | Advanced Power Technology | Mask-surrogate semiconductor process employing dopant protective region |
US5139869A (en) * | 1988-09-01 | 1992-08-18 | Wolfgang Euen | Thin dielectric layer on a substrate |
US5169796A (en) * | 1991-09-19 | 1992-12-08 | Teledyne Industries, Inc. | Process for fabricating self-aligned metal gate field effect transistors |
US5869371A (en) * | 1995-06-07 | 1999-02-09 | Stmicroelectronics, Inc. | Structure and process for reducing the on-resistance of mos-gated power devices |
US5843827A (en) * | 1996-09-30 | 1998-12-01 | Lucent Technologies Inc. | Method of reducing dielectric damage from plasma etch charging |
US5869727A (en) * | 1997-08-08 | 1999-02-09 | Osi Specialties, Inc. | Vacuum process for the manufacture of siloxane-oxyalkylene copolymers |
JP3769208B2 (ja) * | 2001-06-04 | 2006-04-19 | 株式会社東芝 | 半導体装置の製造方法と半導体装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3451912A (en) * | 1966-07-15 | 1969-06-24 | Ibm | Schottky-barrier diode formed by sputter-deposition processes |
US3472712A (en) * | 1966-10-27 | 1969-10-14 | Hughes Aircraft Co | Field-effect device with insulated gate |
GB1244225A (en) * | 1968-12-31 | 1971-08-25 | Associated Semiconductor Mft | Improvements in and relating to methods of manufacturing semiconductor devices |
-
1969
- 1969-12-24 GB GB6290969A patent/GB1289740A/en not_active Expired
-
1970
- 1970-12-08 DE DE2060333A patent/DE2060333C3/de not_active Expired
- 1970-12-18 US US00099616A patent/US3739237A/en not_active Expired - Lifetime
- 1970-12-19 NL NL7018547A patent/NL7018547A/xx unknown
- 1970-12-21 CH CH1888570A patent/CH519791A/de not_active IP Right Cessation
- 1970-12-21 AT AT1146770A patent/AT323809B/de not_active IP Right Cessation
- 1970-12-21 JP JP45115000A patent/JPS4827506B1/ja active Pending
- 1970-12-21 SE SE17311/70A patent/SE355696B/xx unknown
- 1970-12-22 BE BE760707A patent/BE760707A/xx unknown
- 1970-12-22 ES ES386734A patent/ES386734A1/es not_active Expired
- 1970-12-23 FR FR7046397A patent/FR2073494B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7018547A (es) | 1971-06-28 |
JPS4827506B1 (es) | 1973-08-23 |
SE355696B (es) | 1973-04-30 |
BE760707A (fr) | 1971-06-22 |
CH519791A (de) | 1972-02-29 |
DE2060333B2 (de) | 1977-10-13 |
FR2073494B1 (es) | 1975-01-10 |
GB1289740A (es) | 1972-09-20 |
FR2073494A1 (es) | 1971-10-01 |
DE2060333C3 (de) | 1978-06-01 |
DE2060333A1 (de) | 1971-07-01 |
US3739237A (en) | 1973-06-12 |
AT323809B (de) | 1975-07-25 |
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