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ES2163973B1 - GAS SENSOR - Google Patents

GAS SENSOR

Info

Publication number
ES2163973B1
ES2163973B1 ES9901004A ES9901004A ES2163973B1 ES 2163973 B1 ES2163973 B1 ES 2163973B1 ES 9901004 A ES9901004 A ES 9901004A ES 9901004 A ES9901004 A ES 9901004A ES 2163973 B1 ES2163973 B1 ES 2163973B1
Authority
ES
Spain
Prior art keywords
gas sensor
catalyst elements
semiconductor metal
occluded
embeds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES9901004A
Other languages
Spanish (es)
Other versions
ES2163973A1 (en
Inventor
Gaudo Gracia
Carmona Enrique Castano
Olaizola Santiago Miguel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gas De Euskadi S A Soc D
Original Assignee
Gas De Euskadi S A Soc D
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gas De Euskadi S A Soc D filed Critical Gas De Euskadi S A Soc D
Priority to ES9901004A priority Critical patent/ES2163973B1/en
Publication of ES2163973A1 publication Critical patent/ES2163973A1/en
Application granted granted Critical
Publication of ES2163973B1 publication Critical patent/ES2163973B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Sensor de gases, constituido por un sustrato de silicio (1) que incluye una zona (2) micromecanizada sobre la que va dispuesta una resistencia calefactora (4), ocluida en una sustancia dieléctrica (3) sobre la que va dispuesta una capa de óxido metálico semiconductor (6), que embebe elementos catalizadores (7). Estos elementos catalizadores presentan una disposición en capas y están embebidos dentro del volumen del óxido metálico semiconductor de forma no homogénea.Gas sensor, consisting of a silicon substrate (1) that includes a micromachined zone (2) on which a heating resistor (4) is arranged, occluded in a dielectric substance (3) on which an oxide layer is arranged semiconductor metal (6), which embeds catalyst elements (7). These catalyst elements have a layered arrangement and are embedded within the volume of the semiconductor metal oxide in a non-homogeneous manner.

ES9901004A 1999-05-13 1999-05-13 GAS SENSOR Expired - Lifetime ES2163973B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES9901004A ES2163973B1 (en) 1999-05-13 1999-05-13 GAS SENSOR

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES9901004A ES2163973B1 (en) 1999-05-13 1999-05-13 GAS SENSOR

Publications (2)

Publication Number Publication Date
ES2163973A1 ES2163973A1 (en) 2002-02-01
ES2163973B1 true ES2163973B1 (en) 2003-05-01

Family

ID=8308363

Family Applications (1)

Application Number Title Priority Date Filing Date
ES9901004A Expired - Lifetime ES2163973B1 (en) 1999-05-13 1999-05-13 GAS SENSOR

Country Status (1)

Country Link
ES (1) ES2163973B1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8806695D0 (en) * 1988-03-21 1988-04-20 Sieger Ltd Catalytic gas detector
GB2238617A (en) * 1989-11-28 1991-06-05 Eev Ltd Detector for flammable gases
GB9306594D0 (en) * 1993-03-30 1993-05-26 Univ Keele Sensor
EP0645621A3 (en) * 1993-09-28 1995-11-08 Siemens Ag Sensor.
US5834627A (en) * 1996-12-17 1998-11-10 Sandia Corporation Calorimetric gas sensor

Also Published As

Publication number Publication date
ES2163973A1 (en) 2002-02-01

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