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ES2124048T3 - Sistema catodico para un dispositivo de pulverizacion sobre un objeto. - Google Patents

Sistema catodico para un dispositivo de pulverizacion sobre un objeto.

Info

Publication number
ES2124048T3
ES2124048T3 ES96106041T ES96106041T ES2124048T3 ES 2124048 T3 ES2124048 T3 ES 2124048T3 ES 96106041 T ES96106041 T ES 96106041T ES 96106041 T ES96106041 T ES 96106041T ES 2124048 T3 ES2124048 T3 ES 2124048T3
Authority
ES
Spain
Prior art keywords
yoke
magnetic
magnetic yoke
cams
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES96106041T
Other languages
English (en)
Inventor
Joachim Dr Szczyrbowski
Dieter Marquardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Balzers und Leybold Deutschland Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19525007A external-priority patent/DE19525007A1/de
Application filed by Leybold AG, Balzers und Leybold Deutschland Holding AG filed Critical Leybold AG
Application granted granted Critical
Publication of ES2124048T3 publication Critical patent/ES2124048T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Spray Control Apparatus (AREA)

Abstract

EN UNA DISPOSICION DE CATODO EN UN DISPOSITIVO PARA PULVERIZACION DE UN OBJETIVO (49 O 50) CON UN YUGO (22,23) MAGNETICO Y CON HILERAS DE IMANES (33,34,53,54 O 35,36,55,56) PERMANENTES DISPUESTOS ENTRE EL OBJETIVO Y EL YUGO MAGNETICO ASI COMO CON UN SOPORTE (A O B) PARA SUJECION DEL YUGO (22 O 23) MAGNETICO EN UNA PARTE (5) DE PARED DE LA CAMARA (6) DE VACIO, EL YUGO (22 O 23) MAGNETICO SOPORTADO DE FORMA FIJA SE APOYA SOBRE SU LADO CON RESPECTO AL OBJETIVO (49 O 50) EN UNA LEVA O UN PAR (43,44 O 43'',44'') DE LEVAS POR MOTIVOS DE SUJECION CONJUNTA DE LAS PARTES INDIVIDUALES DEL CATODO (3 O 4). LAS LEVAS O EL PAR DE LEVAS SE APOYAN POR SU LADO EN UNA PLACA (41 O 42) CABEZAL, QUE ESTA UNIDA CON UN JUEGO ADECUADO CON EL YUGO (22 O 23) MAGNETICO A TRAVES DE UN TORNILLO O UN PERNO (67,67'',...) ELASTICOS. EN AMBOS LADOS DEL YUGO (22 O 23) MAGNETICO SE HAN PREVISTO LISTONES (37,38 O 39,40) DE GARRA O DE GRAPA CONFIGURADOS EN FORMA DE U, EN LAS PARTES (59 HASTA 66) DE BORDE CON FORMA DE GARRA O DE PATILLA ESTAN DISTANCIADAS LATERALMENTE AGARRANDO POR UN LADO LA PLACA (41 O 42) CABEZAL Y POR OTRO LADO EL YUGO (22 O 23) MAGNETICO Y/O LA PLACA (51 O 52) POSTERIOR DEL OBJETIVO.
ES96106041T 1995-07-08 1996-04-18 Sistema catodico para un dispositivo de pulverizacion sobre un objeto. Expired - Lifetime ES2124048T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19525007A DE19525007A1 (de) 1995-03-09 1995-07-08 Kathodenanordnung für eine Vorrichtung zum Zerstäuben eines Targets

Publications (1)

Publication Number Publication Date
ES2124048T3 true ES2124048T3 (es) 1999-01-16

Family

ID=7766404

Family Applications (1)

Application Number Title Priority Date Filing Date
ES96106041T Expired - Lifetime ES2124048T3 (es) 1995-07-08 1996-04-18 Sistema catodico para un dispositivo de pulverizacion sobre un objeto.

Country Status (4)

Country Link
EP (1) EP0753882B1 (es)
JP (1) JPH0925569A (es)
ES (1) ES2124048T3 (es)
TW (1) TW424114B (es)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9600210D0 (en) 1996-01-05 1996-03-06 Vanderstraeten E Bvba Improved sputtering targets and method for the preparation thereof
EP1713736B1 (en) 2003-12-22 2016-04-27 Cardinal CG Company Graded photocatalytic coatings and methods of making such coatings
ATE377580T1 (de) 2004-07-12 2007-11-15 Cardinal Cg Co Wartungsarme beschichtungen
US8092660B2 (en) 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
US7923114B2 (en) 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
JP2009534563A (ja) 2006-04-19 2009-09-24 日本板硝子株式会社 同等の単独の表面反射率を有する対向機能コーティング
US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
US7820296B2 (en) 2007-09-14 2010-10-26 Cardinal Cg Company Low-maintenance coating technology
KR101250950B1 (ko) * 2010-04-16 2013-04-03 (주) 씨앤아이테크놀로지 마그네트론 스퍼터링장치
JP6100189B2 (ja) * 2014-03-12 2017-03-22 住友重機械工業株式会社 成膜装置
DE102015101206A1 (de) 2015-01-28 2016-07-28 Von Ardenne Gmbh Magnetronanordnung mit Planartarget
US10604442B2 (en) 2016-11-17 2020-03-31 Cardinal Cg Company Static-dissipative coating technology

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01319966A (ja) * 1988-06-21 1989-12-26 Nec Corp スパッタ装置
DE9313384U1 (de) * 1993-09-06 1993-10-28 Leybold Ag, 63450 Hanau Vorrichtung zum Halten einer Zerstäubungskatode

Also Published As

Publication number Publication date
TW424114B (en) 2001-03-01
EP0753882A1 (de) 1997-01-15
EP0753882B1 (de) 1998-11-18
JPH0925569A (ja) 1997-01-28

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