ES2069678T3 - Metodo y aparato para la medicion de la conductividad termica de gases. - Google Patents
Metodo y aparato para la medicion de la conductividad termica de gases.Info
- Publication number
- ES2069678T3 ES2069678T3 ES90301086T ES90301086T ES2069678T3 ES 2069678 T3 ES2069678 T3 ES 2069678T3 ES 90301086 T ES90301086 T ES 90301086T ES 90301086 T ES90301086 T ES 90301086T ES 2069678 T3 ES2069678 T3 ES 2069678T3
- Authority
- ES
- Spain
- Prior art keywords
- katharometer
- changes
- temperature
- new
- amplifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
- G01N27/185—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested using a catharometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
SE PROVEEN NUEVOS METODOS Y NUEVOS APARATOS CATAROMETROS PARA LA MEDICION DE LA CONDUCTIVIDAD TERMICA DE GASES. EL APARATO UTILIZA UN UNICO ELEMENTO CATAROMETRICO (10), QUE SE MANTIENE A UNA TEMPERATURA DE OPERACION CONSTANTE. SI LA TEMPERATURA DEL ELEMENTO (10) CAMBIA, CAMBIA SU RESISTENCIA, DEBIDO AL PASAJE DE UN GAS DE DISTINTA CARACTERISTICA TERMICA, UN AMPLIFICADOR (32) CAMBIA LA POTENCIA SUMINISTRADA AL ELEMENTO DE CATAROMETRO (10) PARA REESTABLECER LA TEMPERATURA PREDETERMINADA, SIENDO LA SALIDA DEL AMPLIFICADOR (32) UNA MEDICION DE LA CONDUCTIVIDAD TERMICA DEL GAS. POR LO TANTO LA OPERACION DEL APARATO ES INDEPENDIENTE DE LA CARACTERISTICA DE RESISTENCIA/TEMPERATURA DEL ELEMENTO (10) Y ES RELATIVAMENTE INSENSIBLE A LOS CAMBIOS DE TEMPERATURA AMBIENTE. PREFERENTEMENTE SE UTILIZA UN TERMISTOR COMO ELEMENTO CATAROMETRICO (10). SE REVELAN VARIOS CIRCUITOS DE OPERACION PARA EL CATAROMETRO. EL INVENTO TAMBIEN PROVEE NUEVOS METODOS DE OPERACION PARA CATAROMETROS PARA REDUCIR LA SENSIBILIDAD DE LAS MEDICIONES EN CUANTO A PERDIDAS TERMICAS Y CAMBIOS DE TEMPERATURA EN EL CUERPO DEL CATAROMETRO, Y PARA PERMITIR UNA COMPARACION DE TENSIONES A TRAVES DE UNA CONEXION EN SERIE DEL ELEMENTO DE CATAROMETRO (10) Y LA RESISTENCIA (18) A UN PUNTO DE REFERENCIA COMUN.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/307,318 US4918974A (en) | 1989-02-06 | 1989-02-06 | Method and apparatus for the measurement of the thermal conductivity of gases |
US07/448,548 US5081869A (en) | 1989-02-06 | 1989-12-11 | Method and apparatus for the measurement of the thermal conductivity of gases |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2069678T3 true ES2069678T3 (es) | 1995-05-16 |
Family
ID=26975664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES90301086T Expired - Lifetime ES2069678T3 (es) | 1989-02-06 | 1990-02-02 | Metodo y aparato para la medicion de la conductividad termica de gases. |
Country Status (13)
Country | Link |
---|---|
US (1) | US5081869A (es) |
EP (1) | EP0382414B1 (es) |
JP (1) | JP2928306B2 (es) |
KR (1) | KR0183398B1 (es) |
AT (1) | ATE117083T1 (es) |
AU (1) | AU631176B2 (es) |
BR (1) | BR9000506A (es) |
CA (1) | CA2009260C (es) |
DE (1) | DE69015838T2 (es) |
ES (1) | ES2069678T3 (es) |
MX (1) | MX172280B (es) |
MY (1) | MY105178A (es) |
NO (1) | NO302320B1 (es) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2806765B2 (ja) * | 1993-11-24 | 1998-09-30 | 日本電気株式会社 | 熱伝導率測定装置および測定方法 |
DE69516274T2 (de) * | 1994-12-29 | 2000-08-31 | Mitsuteru Kimura | Feuchtigkeitssensor |
JP3114139B2 (ja) * | 1995-01-24 | 2000-12-04 | 株式会社山武 | 熱伝導率計 |
US5834627A (en) * | 1996-12-17 | 1998-11-10 | Sandia Corporation | Calorimetric gas sensor |
IT1312311B1 (it) | 1999-05-07 | 2002-04-15 | Thermoquest Italia Spa | Dispositivo per la misurazione della conducibilita' termica di unfluido |
US6357279B1 (en) | 2001-01-29 | 2002-03-19 | Leco Corporation | Control circuit for thermal conductivity cell |
DE10119788C2 (de) * | 2001-04-23 | 2003-08-07 | Siemens Ag | Wärmeleitfähigkeitsdetektor |
US20040184039A1 (en) * | 2001-07-16 | 2004-09-23 | Ralf Christoph | Co-ordinate measuring device with additional heat source |
US20040163445A1 (en) * | 2002-10-17 | 2004-08-26 | Dimeo Frank | Apparatus and process for sensing fluoro species in semiconductor processing systems |
US7080545B2 (en) * | 2002-10-17 | 2006-07-25 | Advanced Technology Materials, Inc. | Apparatus and process for sensing fluoro species in semiconductor processing systems |
US7193187B2 (en) * | 2004-02-09 | 2007-03-20 | Advanced Technology Materials, Inc. | Feedback control system and method for maintaining constant resistance operation of electrically heated elements |
US20060211253A1 (en) * | 2005-03-16 | 2006-09-21 | Ing-Shin Chen | Method and apparatus for monitoring plasma conditions in an etching plasma processing facility |
WO2007041454A2 (en) * | 2005-10-03 | 2007-04-12 | Advanced Technology Materials, Inc. | Systems and methods for determination of endpoint of chamber cleaning processes |
US20080291966A1 (en) * | 2007-05-24 | 2008-11-27 | Engel Steven J | Thermal conductivity detector (TCD) having compensated constant temperature element |
JP2008311372A (ja) * | 2007-06-13 | 2008-12-25 | Nomura Micro Sci Co Ltd | 超純水中の溶存窒素の測定方法及び溶存窒素測定装置 |
EP2037233A1 (en) | 2007-09-14 | 2009-03-18 | General Electric Company | Fluid detector |
JP5165627B2 (ja) * | 2009-03-30 | 2013-03-21 | アズビル株式会社 | 物性値測定システム及び物性値測定方法 |
US20110079074A1 (en) * | 2009-05-28 | 2011-04-07 | Saroj Kumar Sahu | Hydrogen chlorine level detector |
WO2010138942A2 (en) * | 2009-05-28 | 2010-12-02 | Deeya Energy, Inc. | Redox flow cell rebalancing |
WO2011064310A1 (de) * | 2009-11-25 | 2011-06-03 | Siemens Aktiengesellschaft | Verfahren und anordnung zur gaschromatographischen analyse einer gasprobe |
TW201227753A (en) * | 2010-12-28 | 2012-07-01 | British Virgin Islands Central Digital Inc | Sensor temperature compensation circuit and method thereof |
US8878598B2 (en) | 2010-12-28 | 2014-11-04 | British Virgin Islands Central Digital Inc. | Sensing module |
KR102365955B1 (ko) * | 2015-07-21 | 2022-02-25 | 한국전력공사 | 열전도도 측정 장치 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3864959A (en) * | 1971-12-16 | 1975-02-11 | Pye Ltd | Thermal conductivity detector apparatus |
GB1557921A (en) * | 1977-01-10 | 1979-12-19 | British Steel Corp | Gas monitors |
US4164862A (en) * | 1977-11-25 | 1979-08-21 | Jackson Milton L | Multicomponent thermal conductivity analyzer |
US4470298A (en) * | 1978-01-30 | 1984-09-11 | Gomidas Jibelian | Method and apparatus for analyzing gases |
JPS5716343A (en) * | 1980-07-04 | 1982-01-27 | Yokogawa Hokushin Electric Corp | Thermal conductivity detector |
JPS57189289A (en) * | 1981-05-15 | 1982-11-20 | Toubishi Kogyo Kk | Gas detection monitor |
US4461166A (en) * | 1982-02-26 | 1984-07-24 | Delta Associates, Inc. | Dynamic current drive method for powering thermal conductivity detectors |
US4541988A (en) * | 1983-12-13 | 1985-09-17 | Bacharach Instrument Company | Constant temperature catalytic gas detection instrument |
US4533520A (en) * | 1984-07-02 | 1985-08-06 | Mine Safety Appliances Company | Circuit for constant temperature operation of a catalytic combustible gas detector |
GB2185577B (en) * | 1986-01-21 | 1989-11-29 | Draegerwerk Ag | Method and apparatus for detection of combustible gases |
US4685325A (en) * | 1986-02-03 | 1987-08-11 | Aluminum Company Of America | Measurement of gas content in molten metal using a constant current source |
DE3632698A1 (de) * | 1986-09-26 | 1988-03-31 | Draegerwerk Ag | Vorrichtung zur automatischen kalibrierung eines gassensors |
US4722217A (en) * | 1986-10-17 | 1988-02-02 | The Boc Group, Inc. | Method and apparatus for calibrating gas monitors |
US4813267A (en) * | 1987-03-05 | 1989-03-21 | The Perkin-Elmer Corporation | Thermal conductivity detector |
CA1276235C (en) * | 1987-05-28 | 1990-11-13 | Ghyslain Dube | Probe for the determination of gas concentration in molten metal |
US4829810A (en) * | 1988-01-04 | 1989-05-16 | Aluminum Company Of America | Filament drive circuit |
-
1989
- 1989-12-11 US US07/448,548 patent/US5081869A/en not_active Expired - Lifetime
-
1990
- 1990-02-02 CA CA002009260A patent/CA2009260C/en not_active Expired - Lifetime
- 1990-02-02 EP EP90301086A patent/EP0382414B1/en not_active Expired - Lifetime
- 1990-02-02 ES ES90301086T patent/ES2069678T3/es not_active Expired - Lifetime
- 1990-02-02 AT AT90301086T patent/ATE117083T1/de not_active IP Right Cessation
- 1990-02-02 DE DE69015838T patent/DE69015838T2/de not_active Expired - Lifetime
- 1990-02-05 MY MYPI90000174A patent/MY105178A/en unknown
- 1990-02-06 NO NO900569A patent/NO302320B1/no not_active IP Right Cessation
- 1990-02-06 MX MX019399A patent/MX172280B/es unknown
- 1990-02-06 KR KR1019900001519A patent/KR0183398B1/ko not_active IP Right Cessation
- 1990-02-06 AU AU49159/90A patent/AU631176B2/en not_active Expired
- 1990-02-06 JP JP2025302A patent/JP2928306B2/ja not_active Expired - Lifetime
- 1990-02-06 BR BR909000506A patent/BR9000506A/pt not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AU631176B2 (en) | 1992-11-19 |
EP0382414B1 (en) | 1995-01-11 |
MY105178A (en) | 1994-08-30 |
JP2928306B2 (ja) | 1999-08-03 |
AU4915990A (en) | 1990-08-09 |
KR0183398B1 (ko) | 1999-05-15 |
MX172280B (es) | 1993-12-10 |
EP0382414A2 (en) | 1990-08-16 |
ATE117083T1 (de) | 1995-01-15 |
NO900569D0 (no) | 1990-02-06 |
NO302320B1 (no) | 1998-02-16 |
CA2009260C (en) | 1996-09-17 |
EP0382414A3 (en) | 1991-10-09 |
JPH0361843A (ja) | 1991-03-18 |
DE69015838T2 (de) | 1995-08-10 |
DE69015838D1 (de) | 1995-02-23 |
BR9000506A (pt) | 1991-01-15 |
US5081869A (en) | 1992-01-21 |
NO900569L (no) | 1990-08-07 |
CA2009260A1 (en) | 1990-08-06 |
KR900013305A (ko) | 1990-09-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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