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ES2068740A1 - Compositions in solution for etching silicon chips and method for etching with such compositions - Google Patents

Compositions in solution for etching silicon chips and method for etching with such compositions

Info

Publication number
ES2068740A1
ES2068740A1 ES09300156A ES9300156A ES2068740A1 ES 2068740 A1 ES2068740 A1 ES 2068740A1 ES 09300156 A ES09300156 A ES 09300156A ES 9300156 A ES9300156 A ES 9300156A ES 2068740 A1 ES2068740 A1 ES 2068740A1
Authority
ES
Spain
Prior art keywords
etching
compositions
solution
silicon chips
tetramethylammonium hydroxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES09300156A
Other languages
Spanish (es)
Other versions
ES2068740B1 (en
Inventor
Tinto Jaume Esteve
Leal M Cruz Acero
Domingo Angel Merlos
Roige Joan Brausells
Min-Hang Bao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consejo Superior de Investigaciones Cientificas CSIC
Original Assignee
Consejo Superior de Investigaciones Cientificas CSIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consejo Superior de Investigaciones Cientificas CSIC filed Critical Consejo Superior de Investigaciones Cientificas CSIC
Priority to ES9300156A priority Critical patent/ES2068740B1/en
Publication of ES2068740A1 publication Critical patent/ES2068740A1/en
Application granted granted Critical
Publication of ES2068740B1 publication Critical patent/ES2068740B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Silicon Compounds (AREA)
  • Weting (AREA)

Abstract

Compositions in solution for etching silicon chips and method for etching with such compositions. Compositions based on the use of tetramethylammonium hydroxide, a non-toxic product compatible with the CMOS process, to which isopropanol is added, and method which is used to obtain micromechanical silicon structures. The addition of 2-propanol to the tetramethylammonium hydroxide allows the overetching value of the etching system to be reduced and controlled as a function of the concentration of tetramethylammonium hydroxide, of the concentration of 2-propanol added, and of the temperature at which the etching is carried out.
ES9300156A 1993-01-28 1993-01-28 COMPOSITIONS IN SOLUTION FOR THE ATTACK OF SILICON WAVES AND METHOD FOR THE ATTACK WITH SUCH COMPOSITIONS. Expired - Fee Related ES2068740B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES9300156A ES2068740B1 (en) 1993-01-28 1993-01-28 COMPOSITIONS IN SOLUTION FOR THE ATTACK OF SILICON WAVES AND METHOD FOR THE ATTACK WITH SUCH COMPOSITIONS.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES9300156A ES2068740B1 (en) 1993-01-28 1993-01-28 COMPOSITIONS IN SOLUTION FOR THE ATTACK OF SILICON WAVES AND METHOD FOR THE ATTACK WITH SUCH COMPOSITIONS.

Publications (2)

Publication Number Publication Date
ES2068740A1 true ES2068740A1 (en) 1995-04-16
ES2068740B1 ES2068740B1 (en) 1995-11-16

Family

ID=8280596

Family Applications (1)

Application Number Title Priority Date Filing Date
ES9300156A Expired - Fee Related ES2068740B1 (en) 1993-01-28 1993-01-28 COMPOSITIONS IN SOLUTION FOR THE ATTACK OF SILICON WAVES AND METHOD FOR THE ATTACK WITH SUCH COMPOSITIONS.

Country Status (1)

Country Link
ES (1) ES2068740B1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3765969A (en) * 1970-07-13 1973-10-16 Bell Telephone Labor Inc Precision etching of semiconductors
JPH03201533A (en) * 1989-12-28 1991-09-03 Toyota Central Res & Dev Lab Inc Silicon anisotropic etching solution

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3765969A (en) * 1970-07-13 1973-10-16 Bell Telephone Labor Inc Precision etching of semiconductors
JPH03201533A (en) * 1989-12-28 1991-09-03 Toyota Central Res & Dev Lab Inc Silicon anisotropic etching solution

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Vol. 15, n‘ 465, (E-1138)[4993], 26-Noviembre-1991 & JP-A-3201533 (TOYOTA), 3-09-91 *

Also Published As

Publication number Publication date
ES2068740B1 (en) 1995-11-16

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Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 20000707