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EP4446587A3 - Micromembrane pumping device - Google Patents

Micromembrane pumping device Download PDF

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Publication number
EP4446587A3
EP4446587A3 EP24197698.4A EP24197698A EP4446587A3 EP 4446587 A3 EP4446587 A3 EP 4446587A3 EP 24197698 A EP24197698 A EP 24197698A EP 4446587 A3 EP4446587 A3 EP 4446587A3
Authority
EP
European Patent Office
Prior art keywords
membrane
plate
shaped
shaped actuator
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP24197698.4A
Other languages
German (de)
French (fr)
Other versions
EP4446587A2 (en
Inventor
Agnes Bussmann
Lorenz GRÜNERBEL
Christian Wald
Sebastian Kibler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to EP24197698.4A priority Critical patent/EP4446587A3/en
Publication of EP4446587A2 publication Critical patent/EP4446587A2/en
Publication of EP4446587A3 publication Critical patent/EP4446587A3/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/12—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by varying the length of stroke of the working members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0206—Length of piston stroke

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)

Abstract

Vorgeschlagen wird eine Mikromembranpumpeinrichtung zum Pumpen eines Fluids. Die Mikromembranpumpeinrichtung weist auf:
eine Pumpkammer, welcher ein Einlassventil zum Einlassen des Fluids in die Pumpkammer, ein Auslassventil zum Auslassen des Fluids aus der Pumpkammer und
eine Membraneinrichtung zum Variieren eines Volumens der Pump-kammer zugeordnet ist, wobei die Membraneinrichtung einen plattenförmigen Aktor zum Verformen der Membraneinrichtung aufweist; und
eine Beeinflussungseinrichtung zum Beeinflussen des plattenförmigen Aktors, um so das Volumen der Pumpkammer zu beeinflussen;
wobei die Membraneinrichtung einen die Pumpkammer begrenzenden platten-förmigen Membrankörper aufweist;
wobei der plattenförmige Aktor auf einer der Pumpkammer abgewandten Seite des plattenförmigen Membrankörpers angeordnet ist;
wobei der plattenförmige Aktor mittels einer elektrisch isolierenden Kleberschicht an dem plattenförmigen Membrankörper befestigt ist, so dass der plattenförmige Aktor elektrisch isoliert gegenüber dem Membrankörper ist;
wobei innerhalb der elektrisch isolierenden Kleberschicht zumindest ein eingebetteter Abschnitt eines Trägerkörpers angeordnet ist, an welchem oder in welchem ein Verformungssensor zur Erfassung einer Verformung der Membraneinrichtung angeordnet ist, um so das Volumen der Pumpkammer zu erfassen;
wobei die Beeinflussungseinrichtung, der plattenförmige Aktor und der Verformungssensor einen geschlossenen Regelkreis zur Regelung eines Volumen-stroms der Mikromembranpumpeinrichtung bilden.

Figure imgaf001
A micro-membrane pump device for pumping a fluid is proposed. The micro-membrane pump device has:
a pumping chamber having an inlet valve for admitting the fluid into the pumping chamber, an outlet valve for discharging the fluid from the pumping chamber and
a membrane device for varying a volume of the pump chamber is assigned, wherein the membrane device has a plate-shaped actuator for deforming the membrane device; and
an influencing device for influencing the plate-shaped actuator in order to influence the volume of the pumping chamber;
wherein the membrane device has a plate-shaped membrane body delimiting the pump chamber;
wherein the plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber;
wherein the plate-shaped actuator is attached to the plate-shaped membrane body by means of an electrically insulating adhesive layer, so that the plate-shaped actuator is electrically insulated from the membrane body;
wherein at least one embedded portion of a carrier body is arranged within the electrically insulating adhesive layer, on which or in which a deformation sensor is arranged for detecting a deformation of the membrane device in order to thereby detect the volume of the pump chamber;
wherein the influencing device, the plate-shaped actuator and the deformation sensor form a closed control loop for controlling a volume flow of the micro-membrane pump device.
Figure imgaf001
EP24197698.4A 2020-06-17 2020-06-17 Micromembrane pumping device Pending EP4446587A3 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP24197698.4A EP4446587A3 (en) 2020-06-17 2020-06-17 Micromembrane pumping device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP24197698.4A EP4446587A3 (en) 2020-06-17 2020-06-17 Micromembrane pumping device
EP20735496.0A EP4168676B1 (en) 2020-06-17 2020-06-17 Micro diaphragm pumping device
PCT/EP2020/066821 WO2021254611A1 (en) 2020-06-17 2020-06-17 Micro diaphragm pumping device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP20735496.0A Division EP4168676B1 (en) 2020-06-17 2020-06-17 Micro diaphragm pumping device

Publications (2)

Publication Number Publication Date
EP4446587A2 EP4446587A2 (en) 2024-10-16
EP4446587A3 true EP4446587A3 (en) 2024-12-18

Family

ID=71409361

Family Applications (2)

Application Number Title Priority Date Filing Date
EP20735496.0A Active EP4168676B1 (en) 2020-06-17 2020-06-17 Micro diaphragm pumping device
EP24197698.4A Pending EP4446587A3 (en) 2020-06-17 2020-06-17 Micromembrane pumping device

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP20735496.0A Active EP4168676B1 (en) 2020-06-17 2020-06-17 Micro diaphragm pumping device

Country Status (5)

Country Link
US (1) US20230121697A1 (en)
EP (2) EP4168676B1 (en)
JP (1) JP7583069B2 (en)
DE (1) DE112020007326A5 (en)
WO (1) WO2021254611A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023283448A2 (en) * 2021-07-09 2023-01-12 Frore Systems Inc. Anchor and cavity configuration for mems-based cooling systems
WO2025027318A1 (en) * 2023-07-31 2025-02-06 Cambridge Mechatronics Limited Fluid delivery device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19706513A1 (en) * 1997-02-19 1998-08-20 Inst Mikro Und Informationstec Apparatus for micro dosing
DE19918694A1 (en) * 1998-04-27 1999-11-04 Matsushita Electric Works Ltd Measuring pressure of fluid for miniature pump system, e.g. for blood pressure measurement
EP1128075A2 (en) * 2000-02-24 2001-08-29 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Micropump and/or micromixer with integrated sensor and process for its manufacture
DE102005058080A1 (en) * 2005-12-06 2007-06-14 Albert-Ludwigs-Universität Freiburg Monitoring unit for micro pump, has fluid reservoir arranged between inlet valve and outlet valve, and including flexible reservoir diaphragm area, and strain measuring strip detecting volume and/or pressure in reservoir
US20130000759A1 (en) * 2011-06-30 2013-01-03 Agilent Technologies, Inc. Microfluidic device and external piezoelectric actuator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3740673B2 (en) 1999-11-10 2006-02-01 株式会社日立製作所 Diaphragm pump
JP2012506279A (en) 2008-10-22 2012-03-15 デビオテック ソシエテ アノニム Microelectromechanical fluid pump with integrated pressure sensor for detecting pump malfunction
US10668212B2 (en) 2014-08-26 2020-06-02 Debiotech S.A. Detection of an infusion anomaly
US20180010589A1 (en) 2016-04-04 2018-01-11 Innovative Micro Technology Microfabricated fluid pump
JP6809866B2 (en) 2016-10-17 2021-01-06 京セラ株式会社 Micropump and fluid transfer device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19706513A1 (en) * 1997-02-19 1998-08-20 Inst Mikro Und Informationstec Apparatus for micro dosing
DE19918694A1 (en) * 1998-04-27 1999-11-04 Matsushita Electric Works Ltd Measuring pressure of fluid for miniature pump system, e.g. for blood pressure measurement
EP1128075A2 (en) * 2000-02-24 2001-08-29 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Micropump and/or micromixer with integrated sensor and process for its manufacture
DE102005058080A1 (en) * 2005-12-06 2007-06-14 Albert-Ludwigs-Universität Freiburg Monitoring unit for micro pump, has fluid reservoir arranged between inlet valve and outlet valve, and including flexible reservoir diaphragm area, and strain measuring strip detecting volume and/or pressure in reservoir
US20130000759A1 (en) * 2011-06-30 2013-01-03 Agilent Technologies, Inc. Microfluidic device and external piezoelectric actuator

Also Published As

Publication number Publication date
EP4446587A2 (en) 2024-10-16
EP4168676B1 (en) 2024-09-11
JP2023529992A (en) 2023-07-12
WO2021254611A1 (en) 2021-12-23
US20230121697A1 (en) 2023-04-20
JP7583069B2 (en) 2024-11-13
DE112020007326A5 (en) 2023-04-06
EP4168676A1 (en) 2023-04-26

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