EP4247756A1 - Method and plant for purifying silicon from a mixture obtained by cutting silicon bricks into wafers - Google Patents
Method and plant for purifying silicon from a mixture obtained by cutting silicon bricks into wafersInfo
- Publication number
- EP4247756A1 EP4247756A1 EP21810045.1A EP21810045A EP4247756A1 EP 4247756 A1 EP4247756 A1 EP 4247756A1 EP 21810045 A EP21810045 A EP 21810045A EP 4247756 A1 EP4247756 A1 EP 4247756A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- silicon
- mixture
- filtration device
- weight
- filtration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 139
- 239000010703 silicon Substances 0.000 title claims abstract description 139
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 138
- 238000000034 method Methods 0.000 title claims abstract description 73
- 238000005520 cutting process Methods 0.000 title claims abstract description 30
- 239000011449 brick Substances 0.000 title claims abstract description 28
- 235000012431 wafers Nutrition 0.000 title claims abstract description 24
- 239000000203 mixture Substances 0.000 title claims description 90
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 101
- 238000001914 filtration Methods 0.000 claims abstract description 94
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 78
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 56
- 239000001301 oxygen Substances 0.000 claims abstract description 56
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 56
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 55
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 50
- 238000007711 solidification Methods 0.000 claims abstract description 31
- 230000008023 solidification Effects 0.000 claims abstract description 31
- 239000007787 solid Substances 0.000 claims abstract description 29
- 229910052751 metal Inorganic materials 0.000 claims abstract description 25
- 239000002184 metal Substances 0.000 claims abstract description 19
- 239000007791 liquid phase Substances 0.000 claims abstract description 15
- 238000002844 melting Methods 0.000 claims abstract description 15
- 230000008018 melting Effects 0.000 claims abstract description 15
- 239000008247 solid mixture Substances 0.000 claims abstract description 7
- 230000008569 process Effects 0.000 claims description 29
- 239000000843 powder Substances 0.000 claims description 24
- 229910002804 graphite Inorganic materials 0.000 claims description 23
- 239000010439 graphite Substances 0.000 claims description 23
- 238000005204 segregation Methods 0.000 claims description 16
- 150000002739 metals Chemical class 0.000 claims description 15
- 238000009434 installation Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 11
- 238000000746 purification Methods 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000002425 crystallisation Methods 0.000 claims description 8
- 230000008025 crystallization Effects 0.000 claims description 8
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- 230000000284 resting effect Effects 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 230000007935 neutral effect Effects 0.000 claims description 3
- 230000004927 fusion Effects 0.000 claims description 2
- 239000002245 particle Substances 0.000 abstract description 28
- 239000012535 impurity Substances 0.000 abstract description 17
- 229910052681 coesite Inorganic materials 0.000 abstract description 15
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 15
- 229910052682 stishovite Inorganic materials 0.000 abstract description 15
- 229910052905 tridymite Inorganic materials 0.000 abstract description 15
- 239000002893 slag Substances 0.000 abstract description 8
- 230000008901 benefit Effects 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 description 21
- 235000012239 silicon dioxide Nutrition 0.000 description 14
- 239000006260 foam Substances 0.000 description 9
- 238000001816 cooling Methods 0.000 description 7
- 238000011109 contamination Methods 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- 239000002244 precipitate Substances 0.000 description 5
- 238000004064 recycling Methods 0.000 description 5
- 238000005054 agglomeration Methods 0.000 description 4
- 230000002776 aggregation Effects 0.000 description 4
- 230000000717 retained effect Effects 0.000 description 4
- 239000011856 silicon-based particle Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000000181 anti-adherent effect Effects 0.000 description 2
- 239000003911 antiadherent Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000005056 compaction Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000002173 cutting fluid Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000007885 magnetic separation Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011214 refractory ceramic Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- -1 silicon metals Chemical class 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/037—Purification
Definitions
- the invention relates to a process making it possible to reduce the contents of metals, oxygen and carbon, in a single melting and solidification cycle, of the micron particles of silicon in the solid mixture resulting from the cutting of silicon bricks into wafers (called also kerf), said method involving a device for filtering slag consisting of SiO2 and SiC.
- the filtration system has the advantage of being able to adapt in particular to a standard industrial furnace for directional solidification DSS (Directional Solidification System) as used in the photovoltaic industry.
- DSS Directional Solidification System
- Photovoltaic cells are made from silicon wafers obtained by sawing silicon bricks.
- the brick sawing step was traditionally carried out using a steel wire and an abrasive mixture, called slurry, made up of SiC particles about ten microns in diameter.
- slurry an abrasive mixture
- the dominant cutting technology is using diamond wires.
- the sawing of silicon bricks generates material losses of the order of 30 to 40% due to the saw cut and this in the form of micron particles of silicon, also called kerf.
- the recycling of this production scrap therefore represents an issue of cost reduction and loss of raw material.
- Kerf has a much lower purity than silicon before cutting. Indeed, the kerf is highly contaminated with metals coming from the cutting wire as well as from the support on which the silicon brick is glued, which is generally a polymer containing hardening particles. In addition to metals, kerf also contains high carbon and oxygen contents, several percent by weight, from this same medium. as well as cutting fluid. In the case of slurry cutting, the kerf also contains carbon in the form of SiC particles.
- kerf Without taking into account carbon and oxygen, kerf has a purity ranging from 98% to 99.9% by weight of silicon, and cannot be recycled as is in the field of photovoltaics which requires a higher purity. (at least 99.9999% by weight of silicon). For this application, the recycling of kerf therefore requires prior purification at a lower cost in order to reduce the contents of metallic elements, oxygen and carbon.
- Acid attack does not significantly reduce the carbon and oxygen contents in the kerf, but other processes can reduce the concentration of these two elements.
- Si MG metallurgical grade silicon
- the Si MG obtained contains oxygen and carbon but in lower proportions than kerf (0.3% by weight of oxygen and 0.06% by weight of carbon, compared to total weight of silicon according to D. Sarti et al., Silicon feedstock for the multicrystalline photovoltaic industry, Solar Energy Materials & Solar Cells 72 (2002) p. 27-40).
- Plasma purification is another method for reducing oxygen and carbon concentrations in Si MG as described by D. Sarti et al. (Silicon feedstock for the multi-crystalline photovoltaic industry, Solar Energy Materials & Solar Cells 72 (2002) p. 27-40).
- Another method consists in filtering the liquid Si MG in a graphite crucible with a density of less than 1.85 g/cm 3 provided with orifices in its bottom as described in DE341 1955.
- the solid impurities to be filtered are silica ( SiO2), carbon and silicon carbide (SiC).
- the diameter of the openings at the bottom of the crucible is very small, in the range of a few microns, so that the liquid silicon flows through the openings under the effect of capillary forces and that the solid particles of size greater than 10 microns are retained in the crucible.
- the graphite is not necessarily a crucible, it can be in the form of a film.
- EP0160294 describes a method for separating solid reaction products, such as SiO2 and SiC, from molten Si MG produced in an arc furnace.
- the separation is carried out using a filter consisting of a SiC/Si plate placed at the bottom of a graphite crucible.
- the method is characterized in that it consists in adjusting the SiC content of the SiC/Si composite material so as to form, during filtration, in the SiC/Si layer, channels with a diameter of less than 3 microns. .
- Zhang et al. (Recycling of solar cell silicon scraps through filtration, Part I: Experimental investigation, Solar Energy Materials & Solar Cells, 92 (2008) pp. 1450-1461 ), seek to recycle the upper part of the crystallized photovoltaic silicon ingots which is rejected because containing a large quantity of SiC and SiaIXk inclusions originating, respectively, from contamination by the crystallization furnace and by the crucible coated with an anti-adherent layer of SiaIXk.
- the inclusions present on the surface of the ingot trimmings have a size of a few millimeters, while inside the trimmings, the SiaIXk inclusions have a diameter of the order of 20 microns, and the SiC inclusions have a size less than 500 microns.
- the liquid silicon is purified of its inclusions thanks to a particle filter consisting of a SiC foam containing 15% AhOa used as a binder.
- the foam is placed at the bottom of a graphite crucible pierced with an orifice.
- the pore size of the foam is 0.5-3 mm, even more than 5 mm from the photographs of cross-sections given in Zhang et al.
- This process makes it possible to effectively filter SiaIXk particles in the form of needles several millimeters long which remain on the surface of the foam because their size is comparable to that of the pores.
- the SiC inclusions mostly smaller than 200 microns, penetrate inside the foam and are retained in the pores.
- the filtration of these particles of size smaller than that of the pores is explained by the tortuosity of the porosity.
- the tortuosity creates, in fact, a flow of the liquid having recirculation loops which transport the particles towards the walls of the filter on which they adhere and remain fixed.
- the structure of the foam is therefore essential for the filtration of small particles.
- WO201 2113461 relates to a process for obtaining high purity silicon, comprising the treatment of a silicon melt.
- the molten silicon is poured into a filter device comprising a porous molded body whose surface consists of SiO2.
- the porous molded body with an SiO2 surface is prepared by impregnating a carrier consisting of zirconium oxide with SiCk and subsequent hydrolysis of the SiCk with formation of an SiO2 coating on the carrier.
- JP 2014076927 describes a process for obtaining high purity silicon from a silicon sludge using a system of three crucibles and two filters.
- the impurity removal furnace is divided into two zones separated by a wall: a first zone whose temperature is from 1530° C. to 1650° C., comprising a first crucible and a first filter placed below the first crucible; and a second zone whose temperature is from 1410°C to 1450°C, comprising a second and a third crucible with a second filter placed below the second crucible.
- the first filter allows the filtration of particles whose size is between 1 and 5mm and the second filter allows the filtration of particles of size between 0.1 and 0.5 mm.
- the first and second "crucibles" described in JP 2014076927 are not crucibles in the sense of a solidification crucible but rather a receptacle provided at its bottom with a first filter and a second filter, respectively.
- the purity of a mixture when expressed in % by weight of silicon "without taking into account oxygen and carbon", this means that the mixture comprises the % by weight of silicon and possibly impurities other than oxygen and carbon, such as for example metallic elements or doping elements.
- the purpose of the present invention is precisely to meet these needs by providing a process for purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, which mixture comprises silicon , oxygen, carbon and metals, with a silicon content of at least 96% by weight, an oxygen content greater than or equal to 1% by weight and a carbon content greater than or equal to 0.1 % by weight, relative to the total weight of the mixture, characterized in that it comprises the steps in which a) the mixture is brought to a temperature between 1450 and 1650°C; b) the mixture is filtered through a filtration device comprising a bottom provided with through holes with a diameter of between 0.5 and 2 mm and preferably between 1 and 1.5 mm, and a surface density of between 0, 2 and 2 cm -2 , preferably between 0.5 and 1 cm -2 ; and c) the filtered liquid phase of the mixture is subjected to controlled solidification.
- through holes is meant holes which do not exhibit tortuosity from one
- the mixture in the solid state is introduced into the filtration device and to be brought there to a temperature between 1450 and 1650°C.
- the invention also relates to an installation for the purification of silicon from a solid mixture, in particular in the form of powder, resulting from the cutting of silicon bricks into wafers and comprising silicon, oxygen, carbon and optionally metals, the silicon content being at least 96% by weight, the oxygen content being greater than or equal to 1% by weight and the carbon content being greater than or equal to 0, 1% by weight, relative to the total weight of the mixture, said installation comprising
- the filtration means capable of filtering the mixture, the filtration means comprising through-holes with a diameter of between 0.1 and 5 mm, preferably between 0.5 and 2 mm.
- the installation of the invention further comprises means capable of carrying out a directed solidification of the filtered liquid phase of the mixture.
- the filtration is advantageously carried out through a single filtration device comprising a bottom provided with through holes preferably all having the same diameter, between 0.5 and 2 mm and preferably between 1 and 1 .5mm.
- the installation according to the invention comprises only one heating zone.
- Another object of the invention relates to the use of a process for purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, according to the invention. , or an installation according to the invention, for the manufacture of photovoltaic cells.
- the invention also relates to a method for manufacturing photovoltaic cells implementing a step of purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, according to the method of the invention, or an installation according to the invention.
- FIG 1 represents an embodiment of the method of the invention in which the filtration device in the form of a crucible is placed above another crucible within which the directed solidification of the mixture is carried out.
- FIG 2 represents an embodiment of the method of the invention in which the filtration device in the form of a crucible is placed at the bottom of another crucible within which the directed solidification of the mixture is carried out.
- FIG 3 represents an embodiment of the method of the invention in which the filtration device in the form of a crucible is coupled to a continuous kerf supply system.
- FIG 4 represents an embodiment of the method of the invention in which the filtration device comprises a plurality of unitary filtration devices in the form of crucibles.
- FIG 5 represents an embodiment of the method of the invention in which the filtration device in the form of a crucible comprises an inert gas blowing system consisting of a graphite tube placed in its center. This system being above the mixture/kerf, it will favor the evacuation of the oxygen dissolved in the mixture in the form of the volatile species SiO.
- the present invention relates to a method for purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, which mixture comprises silicon, oxygen, carbon and metals, with a silicon content of at least 96% by weight, an oxygen content greater than or equal to 1% by weight and a carbon content greater than or equal to 0.1% by weight, based on the total weight of the mixture, characterized in that it comprises the steps in which a) the mixture is brought to a temperature between 1450 and 1650°C; b) the mixture is filtered through a filtration device comprising a bottom provided with through holes with a diameter of between 0.5 and 2 mm and preferably between 1 and 1.5 mm, and with a surface density of between 0.2 and 2 cm -2 , preferably between 0.5 and 1 cm -2 ; and c) the filtered liquid phase of the mixture is subjected to controlled solidification.
- the solid mixture in particular in powder form, resulting from the cutting of silicon bricks into wafers, comprises silicon, oxygen, carbon and metals, with a silicon content of at least 96% by weight, an oxygen content greater than or equal to 1% by weight and a carbon content greater than or equal to 0.1% by weight, relative to the total weight of the mixture.
- the term "kerf" can also be used to designate this mixture.
- the mixture used as defined above is solid, in particular in powder form.
- the particle size of this powder is generally such that the average diameter of the particles can range from 0.1 to 10 microns.
- the method comprises a step c), in which the liquid phase filtered at the end of step b) is subjected to directed solidification.
- step c) the liquid phase filtered at the end of step b) undergoes an operation of segregation of metallic impurities by directed solidification.
- the segregation of metallic impurities by directional solidification is a process well known to those skilled in the art.
- Directed solidification can be implemented, for example, according to the HEM method (Heat Extraction Method in English) described by Khattak and Schmid (Growth of silicon ingots by HEM for photovoltaic applications, Silicon Processing for Photovoltaics II, edited by C.P. Khattak and K.V. Ravi, Elsevier Science Publishers B.V., 1987).
- the process of the invention relates to the purification of silicon from the mixture or from kerf containing silicon contents of at least 96% by weight, oxygen contents greater than or equal to 1% by weight and carbon contents greater than or equal to 0.1% by weight, relative to the total weight of the mixture.
- the mixture/kerf can come from the cutting of silicon bricks, with slurry or with diamond wire.
- the method consists in carrying out a filtration of the solid particles of SiO2 and SiC, then a segregation, by directed solidification, of the silicon metals present in the filtered liquid, the filtration and segregation operations advantageously being able to be carried out during the same cycle. heating/cooling in a standard DSS (Directional Solidification System) industrial furnace used in the photovoltaic industry.
- DSS Directional Solidification System
- the geometry of the filtration device used is adapted to the volume of kerf or mixture.
- the filtration device used in the process of the invention has the advantage of being able to adapt in particular to a standard industrial furnace for directed solidification DSS (Directional Solidification System) as used in the photovoltaic industry.
- DSS Directional Solidification System
- the filtration device is in the form of a crucible.
- a filtration device is used in the form of a crucible comprising a bottom provided with through holes with a diameter of between 0.5 and 2 mm, and preferably between 1 and 1.5 mm.
- the filtration device can be in the form of a plate.
- a continuous supply of kerf can be considered.
- through holes is meant holes through which one can see and which exhibit no tortuosity from one end to the other.
- the silicon particles In the mixture (or kerf), in solid form, in particular in powder form, the silicon particles have a micron size, which is also the case for compounds based on carbon and oxygen.
- micron size particles particles having a diameter of 0.1 to 10 microns.
- the oxygen is mainly found in the form of a SiC film around the Si particles.
- the carbon coming from the cutting fluid is in the form of organic species grafted onto the Si particles.
- the carbon is also found in the form of micron particles of polymer which constitutes the support for the silicon bricks and ingots during cutting and which is partially cut.
- the carbon is also in the form of SiC particles, the size of which is around 10 microns.
- millimetric holes allow effective filtration of the precipitates present in the molten kerf. Indeed, during heating and melting, oxygen and carbon react with silicon to form SiO2 and SiC which are stable compounds at high temperature in molten silicon.
- the SiO2 particles agglomerate between them during fusion, and the SiC particles adhere to SiO2, the whole forming large agglomerates, from a few mm to a few cm which are retained inside the filter even if the holes are millimeter in size.
- the filtration device in particular in the form of a crucible, is made of a material chosen from the group consisting of graphite, silicon carbide (SiC), silicon nitride (SiNa), silica (SiC), or a mixture of these materials, or a mixture of graphite with silicon carbide (SiC), silicon nitride (SiNa), and silica (SiC).
- the filtration device is made of a mixture of graphite with silicon carbide (SiC), silicon nitride (SiNa), and silica (SiOa), it may be in the form of a multilayer.
- SiC silicon carbide
- SiNa silicon nitride
- SiOa silica
- This type of filter is described in patent application FR1661788.
- the filter is preferably made of graphite, in particular of isostatic graphite for its mechanical properties, in particular its mechanical resistance during the infiltration of liquid silicon into its porosity.
- the isostatic graphite may for example be the 2020 grade from Mersen having a porosity of 9% and a bending strength of 45 MPa, or the R7500 grade from SGL having a porosity of 14% and a bending strength of 50 MPa.
- the filter can be made of another refractory ceramic material, such as for example Al2O3 or ZrO2 .
- the size of the filter device holes is such that the holes are easily made with standard machining tools. As already indicated, the diameter of the holes is between 0.5 and 2 mm, and preferably between 1 and 1.5 mm.
- the surface density of holes must be within a range of optimal values. Indeed, the holes must not be too close together otherwise the filter risks cracking during the machining of the holes or during its use under the effect of the stresses generated by the infiltration of the liquid silicon into the pores of the graphite. and its transformation into silicon carbide. On the other hand, the holes must not be too far apart, otherwise the flow rate of the filtered liquid silicon will be low and the productivity of the purification process mediocre.
- the standard masses of silicon ingots manufactured by directional solidification are for example 13 kg (furnace of size called Gen 1), 60 kg (furnace of size called Gen 2) or even 650 kg on an industrial scale (furnace of size called Gen 6).
- a filtration device is used in the form of a crucible comprising a bottom provided with a surface density of holes of between 0.2 cm -2 and 2 cm -2 , preferably between 0.5 cm -2 and 1 cm -2 .
- the thickness of the filtration device could condition its mechanical strength. Typical thicknesses can range from 5mm to 20mm.
- the solid state mixture may be introduced into the filtration device prior to the heating cycle.
- the method may include a step of introducing the mixture/kerf into the filtration device when the maximum temperature is reached in the furnace.
- the mixture is brought to a temperature greater than or equal to the melting point of silicon, in particular to a temperature between 1450 and 1650°C, preferably between 1500°C and 1600°C.
- the duration of the plateau at the maximum temperature depends on the maximum temperature and the quantity of kerf/mixture. For example, for a maximum temperature of 1535°C and a mass of kerf/mixture of 10 kg, the stage duration is approximately 1 hour. Those skilled in the art will be able to determine the duration of this plateau based on the maximum temperature and the amount of kerf/mixture.
- the filtered liquid phase freed in particular of slag consisting of SiO2 and SiC, is subjected to controlled solidification, during which the segregation of the impurities, in particular metal impurities, of the mixture is obtained.
- Directed solidification is a method well known to those skilled in the art. It can be carried out according to the HEM method (Heat Extraction Method in English) described by Khattak and Schmid (Growth of silicon ingots by HEM for photovoltaic applications, Silicon Processing for Photovoltaics II, edited by CP Khattak and KV Ravi, Elsevier Science Publishers BV, 1987).
- the method of the invention may comprise a step d) of cooling, in particular to ambient temperature, of the silicon in the solid state obtained at the end of step c).
- Ambient temperature means a temperature of 20°C + 5°C.
- the method may also comprise a step e) of recovering the silicon in the solid state purified after the cooling of step d).
- the expression "after cooling” means the return to ambient temperature, i.e. to a temperature of 20°C + 5°C.
- the filtration device is placed above another crucible, on which it rests, in a photovoltaic silicon segregation or crystallization furnace as shown in [Fig 1].
- Kerf charge is placed in the filtration device and, on melting, the liquid phase comprising the silicon and the metallic impurities flows through the holes present in the bottom of said device, while the slag is retained in said device.
- a cooling ramp is then applied to allow the controlled solidification of the silicon within the crucible and the segregation of the impurities present in the dissolved state in the initial mixture comprising the silicon.
- the filtration device initially rests at the bottom of another crucible as shown in [Fig 2].
- the volume of the filtration device is adjusted to contain only the slag to be filtered.
- the kerf/mixture is loaded into the filtration device and the crucible.
- the filtration device is raised above the filtered mixture by mechanical means using rods, in particular made of graphite.
- the advantage of this embodiment is that for the same volume of crucible, it makes it possible to filter much larger quantities of kerf than in the case of the embodiment illustrated in [Fig 1] where only the filter is loaded with kerf .
- the filtration device is coupled to a continuous kerf supply system.
- FIG. 3 shows an example of this embodiment in which the filtration device is arranged above another crucible, on which it rests, this other crucible being intended for the segregation of the metallic elements of the liquid phase filtered from the mixture.
- the filtration device comprises a plurality of unitary filtration devices resting on bars, in particular of graphite, themselves resting on the side plates, in particular of graphite, holding the crucible as shown in [ Fig 4],
- This filtration device is intended in particular for large size crucibles for the production of industrial size silicon ingots.
- the interior walls of the filtration device, or the interior and exterior walls of the filtration device can be covered with an anti-adherent deposit based on SiaIXk powder, such as conventionally used for photovoltaic silicon crystallization crucibles.
- the filtration device comprises an additional blowing system making it possible to inject neutral gas above the filtered liquid phase contained in the crucible.
- the neutral gas can, for example, be injected through a graphite tube placed in the center of the filter as shown in [Fig 5].
- silicon wafers or pieces of broken silicon wafers can advantageously be placed at the bottom of the device filtration to cover the holes. These wafers are then made of photovoltaic or microelectronic grade silicon. Their thickness is advantageously at least 100 microns.
- the kerf can be densified beforehand by compaction techniques, for example isostatic compaction, or by agglomeration techniques, for example agglomeration by high shear mixing or agglomeration by spray drying. These techniques are well known to those skilled in the art.
- the process of the invention makes it possible to reduce the contents of metals, oxygen and carbon in the kerf, in a single melting and solidification cycle, which is particularly advantageous industrially compared to the processes of the state of the art.
- the filtration device fits into an industrial DSS furnace for the segregation or crystallization of photovoltaic silicon. This is not the case for the melting and pouring process in a segregation crucible, as described in WO201 2113461.
- the silicon is sought to purify the silicon from a mixture in the solid state, in particular in the form of powder, resulting from the cutting of silicon bricks into wafers, which mixture comprising silicon, oxygen , carbon and metals, with a silicon content of at least 96% by weight, an oxygen content greater than or equal to 1% by weight and a carbon content greater than or equal to 0.1% by weight, by relative to the total weight of the mixture.
- a mixture does not have the same characteristics as MG silicon and scrap crystallization ingots.
- Si MG contains oxygen and carbon in lower proportions than kerf (0.3% by weight of oxygen and 0.06% by weight of carbon according to D.
- the filters of the state of the art for the filtration of liquid Si MG have holes of small size, of a few microns in DE 3411955 and with a diameter of less than 3 microns in EP 0160294.
- the silicon seeps into micron-sized holes which can be blocked by inclusions penetrating inside.
- the solid mixture in powder form, resulting from the cutting of silicon bricks into wafers, initially contains a high oxygen content (an oxygen content greater than or equal to 1% by weight) relative to the total weight of the mixture.
- Oxygen is transformed into Si ⁇ 2 during heating and melting, and the agglomeration of Si ⁇ 2 leads to large particles, from a few millimeters to a few centimeters.
- the filtration device used in the process of the present invention is provided with through holes, that is to say holes which do not present any tortuosity from one end to the other, and through which one can see.
- the filtration device in the method of the invention is therefore simpler to produce than the SiC foam filter described by Zhang et al., and unlike the latter, the filtration device of the invention does not generate contamination. liquid silicon.
- the process of the invention makes it possible to obtain a mixture having the purity required for the photovoltaic application (up to 99.9999% by weight of silicon or more, without taking into account oxygen and carbon).
- the invention also relates to an installation for the purification of silicon from a solid mixture, in particular in the form of powder, resulting from the cutting of silicon bricks into wafers and comprising silicon, oxygen, carbon and optionally metals, the silicon content being at least 96% by weight, the oxygen content being greater than or equal to 1% by weight and the carbon content being greater than or equal to 0.1% by weight, relative to the total weight of the mixture, said installation comprising:
- the filtration means capable of filtering the mixture, the filtration means comprising through-holes with a diameter of between 0.5 and 2 mm, and preferably between 1 and 1.5 mm.
- the installation of the invention further comprises means capable of carrying out a directed solidification of the filtered liquid phase of the mixture.
- Another object of the invention relates to the use of a process for purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, according to the invention. , or an installation according to the invention, for the manufacture of photovoltaic cells.
- the invention also relates to a method for manufacturing photovoltaic cells implementing a step of purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, according to the method of the invention, or an installation according to the invention.
- the invention although described for a mixture resulting from the cutting of bricks, could also apply to a mixture resulting from the cutting of ingots.
- the mixture used is solid, in particular in the form of powder.
- the particle size of this powder is generally such that the average diameter of the particles can range from 80 to 100 microns.
- Kerf has a purity of 99.955% by weight of silicon (without taking into account oxygen and carbon), and is previously compacted in the form of granules a few millimeters in diameter.
- the filter has an internal section of 1246 cm 2 and is pierced at its bottom with 529 holes 1.5 mm in diameter.
- the filter and the crucible are placed in a DSS silicon segregation furnace for photovoltaic application with a capacity of 60 kg.
- the thermal cycle consists of a rise to 900°C under vacuum (residual pressure of 10'1 mbar), a rise to 1500°C under argon (partial pressure of 600 mbar) and a plateau at 1500°C for 6 hours.
- the melting of the silicon in the mixture begins during the ramp-up and ends after a 45-minute plateau.
- 4.2 kg of solid kerf in the form of granules are recharged in the filter by means of the supply system represented in FIG. 3. This recharge is carried out 10 times in succession, every 25 minutes.
- the liquid silicon has completely flowed into the crucible through the filter holes.
- a cooling ramp is then applied allowing a directed solidification of the silicon contained in the crucible at a speed of the order of 1 cm/h.
- the solidified silicon ingot has a mass of 43 kg and the material yield, ie the ratio between the mass of filtered silicon and the initial mass of kerf (60 kg), is 72%.
- the segregated part of the ingot contains 0.003% by weight of oxygen and less than 0.001% by weight of carbon, relative to the total weight of the ingot.
- the purity of the ingot is 99.9999% by weight of silicon, relative to the total weight of the ingot (without taking into account oxygen and carbon).
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Abstract
Description
DESCRIPTION DESCRIPTION
PROCEDE ET INSTALLATION DE PURIFICATION DE SILICIUM A PARTIR D’UN MELANGE ISSU DE LA DECOUPE DE BRIQUES DE SILICIUM EN PLAQUETTES METHOD AND PLANT FOR PURIFYING SILICON FROM A MIXTURE FROM THE CUTTING OF SILICON BRICKS INTO PLATES
Domaine technique de l'invention Technical field of the invention
L’invention concerne un procédé permettant de diminuer les teneurs en métaux, en oxygène et en carbone, en un seul cycle de fusion et solidification, des particules microniques de silicium dans le mélange solide issu de la découpe de briques de silicium en plaquettes (appelées également kerf), ledit procédé mettant en jeu un dispositif de filtration des scories constituées de SiÛ2 et de SiC. The invention relates to a process making it possible to reduce the contents of metals, oxygen and carbon, in a single melting and solidification cycle, of the micron particles of silicon in the solid mixture resulting from the cutting of silicon bricks into wafers (called also kerf), said method involving a device for filtering slag consisting of SiO2 and SiC.
Après filtration de ces résidus solides, la phase liquide subit une étape de ségrégation des impuretés métalliques du silicium par solidification dirigée. Le système de filtration a l’avantage de pouvoir s’adapter notamment à un four industriel standard de solidification dirigée DSS (Directional Solidification System en anglais) tel qu’utilisé dans l’industrie photovoltaïque. After filtration of these solid residues, the liquid phase undergoes a stage of segregation of the metallic impurities from the silicon by directed solidification. The filtration system has the advantage of being able to adapt in particular to a standard industrial furnace for directional solidification DSS (Directional Solidification System) as used in the photovoltaic industry.
Arrière-plan technique Technical background
Les cellules photovoltaïques sont fabriquées à partir de plaquettes de silicium obtenues par sciage de briques de silicium. L’étape de sciage de briques était traditionnellement réalisée au moyen d’un fil en acier et d’un mélange abrasif, appelé slurry, constitué de particules de SiC d’une dizaine de microns de diamètre. Actuellement, la technologie dominante de découpe se fait à l’aide de fils diamantés. Le sciage de briques de silicium génère des pertes de matière de l’ordre de 30 à 40% dues au trait de scie et cela sous forme de particules microniques de silicium, appelées également kerf. Le recyclage de ces rebuts de production représente donc un enjeu de réduction de coût et de perte de matière première. Photovoltaic cells are made from silicon wafers obtained by sawing silicon bricks. The brick sawing step was traditionally carried out using a steel wire and an abrasive mixture, called slurry, made up of SiC particles about ten microns in diameter. Currently, the dominant cutting technology is using diamond wires. The sawing of silicon bricks generates material losses of the order of 30 to 40% due to the saw cut and this in the form of micron particles of silicon, also called kerf. The recycling of this production scrap therefore represents an issue of cost reduction and loss of raw material.
Le kerf a une pureté bien plus faible que le silicium avant découpe. En effet, le kerf est fortement contaminé en métaux provenant du fil de découpe ainsi que du support sur lequel est collée la brique de silicium, qui est généralement un polymère contenant des particules durcissantes. Outre les métaux, le kerf contient également de fortes teneurs en carbone et en oxygène, de plusieurs pourcents en poids, provenant de ce même support ainsi que du fluide de découpe. Dans le cas de la découpe au slurry, le kerf contient aussi du carbone sous forme de particules de SiC. Kerf has a much lower purity than silicon before cutting. Indeed, the kerf is highly contaminated with metals coming from the cutting wire as well as from the support on which the silicon brick is glued, which is generally a polymer containing hardening particles. In addition to metals, kerf also contains high carbon and oxygen contents, several percent by weight, from this same medium. as well as cutting fluid. In the case of slurry cutting, the kerf also contains carbon in the form of SiC particles.
Sans prendre en compte le carbone et l’oxygène, le kerf a une pureté variant de 98% à 99,9% en poids de silicium, et ne peut être recyclé en l’état dans le domaine du photovoltaïque qui requiert une pureté plus élevée (au moins 99,9999% en poids de silicium). Pour cette application, le recyclage du kerf nécessite donc une purification préalable à moindre coût afin de réduire les teneurs en éléments métalliques, en oxygène et en carbone. Without taking into account carbon and oxygen, kerf has a purity ranging from 98% to 99.9% by weight of silicon, and cannot be recycled as is in the field of photovoltaics which requires a higher purity. (at least 99.9999% by weight of silicon). For this application, the recycling of kerf therefore requires prior purification at a lower cost in order to reduce the contents of metallic elements, oxygen and carbon.
De nombreux procédés ont été mis en oeuvre pour purifier le kerf et réduire les teneurs en impuretés notamment en éléments métalliques. On peut citer, à titre d’exemple : Numerous processes have been implemented to purify the kerf and reduce the content of impurities, in particular metallic elements. We can cite, for example:
- l’attaque chimique par des acides pour réduire la teneur en métaux dans le kerf, avec, dans certains cas, l’utilisation d’acide fluorhydrique pour éliminer le film de SiÛ2 autour des particules de Si, - chemical attack with acids to reduce the metal content in the kerf, with, in some cases, the use of hydrofluoric acid to eliminate the SiO2 film around the Si particles,
- la séparation électrostatique des impuretés solides, - electrostatic separation of solid impurities,
- la séparation magnétique du fer, du nickel et de leurs oxydes, - the magnetic separation of iron, nickel and their oxides,
- l’évaporation/condensation du silicium, - evaporation/condensation of silicon,
- le traitement par laitier. - treatment by slag.
Ces procédés sont bien connus de l’homme du métier. These methods are well known to those skilled in the art.
L’attaque acide ne permet pas de réduire significativement les teneurs en carbone et en oxygène dans le kerf, mais d’autres procédés permettent de diminuer la concentration de ces deux éléments. A ce titre on peut citer, par exemple, un traitement thermique sous air ou gaz neutre, la carbothermie sous vide, la purification par voie métallurgique basée sur la réaction SiC + 0,5 SiÛ2 1 ,5 Si + CO permettant d’obtenir un silicium de grade métallurgique, la séparation des impuretés solides à l’aide d’un brasseur mécanique, ou encore une fusion suivie d’une coulée dans un creuset de ségrégation. Acid attack does not significantly reduce the carbon and oxygen contents in the kerf, but other processes can reduce the concentration of these two elements. As such, mention may be made, for example, of heat treatment in air or inert gas, carbothermy under vacuum, purification by metallurgical means based on the reaction SiC + 0.5 SiO2 1.5 Si + CO making it possible to obtain a metallurgical grade silicon, separation of solid impurities using a mechanical stirrer, or even melting followed by casting in a segregation crucible.
La problématique du carbone et de l’oxygène existe également pour le silicium de grade métallurgique (ci-après Si MG) produit par carbothermie par réduction de la silice par du carbone. En effet, le Si MG obtenu contient de l’oxygène et du carbone mais dans des proportions moindres que le kerf (0,3% en poids d’oxygène et 0,06% en poids de carbone, par rapport au poids total du silicium selon D. Sarti ét al., Silicon feedstock for the multicrystalline photovoltaic industry, Solar Energy Materials & Solar Cells 72 (2002) p. 27-40). The issue of carbon and oxygen also exists for metallurgical grade silicon (hereinafter Si MG) produced by carbothermy by reduction of silica by carbon. Indeed, the Si MG obtained contains oxygen and carbon but in lower proportions than kerf (0.3% by weight of oxygen and 0.06% by weight of carbon, compared to total weight of silicon according to D. Sarti et al., Silicon feedstock for the multicrystalline photovoltaic industry, Solar Energy Materials & Solar Cells 72 (2002) p. 27-40).
La purification par plasma est un autre procédé permettant de réduire les concentrations en oxygène et en carbone dans le Si MG comme décrit par D. Sarti et al. (Silicon feedstock for the multi-crystalline photovoltaic industry, Solar Energy Materials & Solar Cells 72 (2002) p. 27-40). Plasma purification is another method for reducing oxygen and carbon concentrations in Si MG as described by D. Sarti et al. (Silicon feedstock for the multi-crystalline photovoltaic industry, Solar Energy Materials & Solar Cells 72 (2002) p. 27-40).
Une autre méthode consiste à filtrer le Si MG liquide dans un creuset en graphite de densité inférieure à 1 ,85 g/cm3 muni d’orifices dans son fond telle que décrite dans DE341 1955. Les impuretés solides à filtrer sont de la silice (SiO2), du carbone et du carbure de silicium (SiC). Le diamètre des ouvertures au fond du creuset est très faible, dans la gamme de quelques microns, de telle façon que le silicium liquide s’écoule par les ouvertures sous l’effet des forces capillaires et que les particules solides de dimension supérieure à 10 microns sont retenues dans le creuset. Le graphite n’est pas obligatoirement un creuset, il peut être sous forme de film. Another method consists in filtering the liquid Si MG in a graphite crucible with a density of less than 1.85 g/cm 3 provided with orifices in its bottom as described in DE341 1955. The solid impurities to be filtered are silica ( SiO2), carbon and silicon carbide (SiC). The diameter of the openings at the bottom of the crucible is very small, in the range of a few microns, so that the liquid silicon flows through the openings under the effect of capillary forces and that the solid particles of size greater than 10 microns are retained in the crucible. The graphite is not necessarily a crucible, it can be in the form of a film.
EP0160294 décrit un procédé de séparation de produits de réaction solides, comme SiÛ2 et SiC, du Si MG fondu produit au four à arc. La séparation est réalisée grâce à un filtre constitué d'une plaque en SiC/Si disposé au fond d’un creuset en graphite. Le procédé est caractérisé en ce qu'il consiste à régler la teneur en SiC du matériau composite SiC/Si de manière à former, lors de la filtration, dans la couche de SiC/Si, des canaux d'un diamètre inférieur à 3 microns. EP0160294 describes a method for separating solid reaction products, such as SiO2 and SiC, from molten Si MG produced in an arc furnace. The separation is carried out using a filter consisting of a SiC/Si plate placed at the bottom of a graphite crucible. The method is characterized in that it consists in adjusting the SiC content of the SiC/Si composite material so as to form, during filtration, in the SiC/Si layer, channels with a diameter of less than 3 microns. .
Zhang et al. (Recycling of solar cell silicon scraps through filtration, Part I: Experimental investigation, Solar Energy Materials & Solar Cells, 92 (2008) pp. 1450-1461 ), cherchent à recycler la partie haute des lingots de silicium photovoltaïque cristallisés qui est rebutée car contenant une grande quantité d’inclusions de SiC et de SiaIXk provenant, respectivement, d’une contamination par le four de cristallisation et par le creuset revêtu d’une couche anti-adhérente en SiaIXk. Les inclusions présentes à la surface des éboutages de lingots ont une taille de quelques millimètres, tandis qu’à l’intérieur des éboutages, les inclusions de SiaIXk ont un diamètre de l’ordre de 20 microns, et les inclusions de SiC ont une taille inférieure à 500 microns. Le silicium liquide est purifié de ses inclusions grâce à un filtre à particules constitué d’une mousse de SiC contenant 15% d’AhOa utilisé en tant que liant. La mousse est disposée au fond d’un creuset en graphite percé d’un orifice. La taille des pores de la mousse est de 0,5-3 mm, voire de plus de 5 mm d’après les photographies de coupes transversales données dans Zhang ét al. Ce procédé permet de filtrer efficacement les particules de SiaIXk sous forme d’aiguilles de plusieurs millimètres de long qui restent à la surface de la mousse car leur taille est comparable à celle des pores. Les inclusions de SiC, majoritairement de taille inférieure à 200 microns, pénètrent à l’intérieur de la mousse et sont retenues dans les pores. La filtration de ces particules de taille inférieure à celle des pores s’explique par la tortuosité de la porosité. La tortuosité crée, en effet, un écoulement du liquide présentant des boucles de recirculation qui transportent les particules vers les parois du filtre sur lesquelles elles adhèrent et restent fixées. La structure de la mousse est donc essentielle pour la filtration des petites particules. Bien que le procédé de filtration soit opérant, le filtre et le creuset entraînent une contamination importante du silicium liquide, due notamment à la présence d’AhOa dans le filtre, et les auteurs concluent qu’il est nécessaire de mettre au point un procédé non contaminant pour envisager un développement à l’échelle industrielle. Zhang et al. (Recycling of solar cell silicon scraps through filtration, Part I: Experimental investigation, Solar Energy Materials & Solar Cells, 92 (2008) pp. 1450-1461 ), seek to recycle the upper part of the crystallized photovoltaic silicon ingots which is rejected because containing a large quantity of SiC and SiaIXk inclusions originating, respectively, from contamination by the crystallization furnace and by the crucible coated with an anti-adherent layer of SiaIXk. The inclusions present on the surface of the ingot trimmings have a size of a few millimeters, while inside the trimmings, the SiaIXk inclusions have a diameter of the order of 20 microns, and the SiC inclusions have a size less than 500 microns. The liquid silicon is purified of its inclusions thanks to a particle filter consisting of a SiC foam containing 15% AhOa used as a binder. The foam is placed at the bottom of a graphite crucible pierced with an orifice. The pore size of the foam is 0.5-3 mm, even more than 5 mm from the photographs of cross-sections given in Zhang et al. This process makes it possible to effectively filter SiaIXk particles in the form of needles several millimeters long which remain on the surface of the foam because their size is comparable to that of the pores. The SiC inclusions, mostly smaller than 200 microns, penetrate inside the foam and are retained in the pores. The filtration of these particles of size smaller than that of the pores is explained by the tortuosity of the porosity. The tortuosity creates, in fact, a flow of the liquid having recirculation loops which transport the particles towards the walls of the filter on which they adhere and remain fixed. The structure of the foam is therefore essential for the filtration of small particles. Although the filtration process is effective, the filter and the crucible lead to significant contamination of the liquid silicon, due in particular to the presence of AhOa in the filter, and the authors conclude that it is necessary to develop a process that is not contaminant to consider development on an industrial scale.
WO201 2113461 concerne un procédé d'obtention de silicium de haute pureté, comprenant le traitement d'une masse fondue de silicium. Le silicium fondu est versé dans un dispositif de filtration comprenant un corps moulé poreux dont la surface est constituée de SiÛ2. Le corps moulé poreux avec une surface en SiÛ2 est préparé par imprégnation d'un support constitué d'oxyde de zirconium avec du SiCk et par hydrolyse ultérieure du SiCk avec formation d'un revêtement de SiÛ2 sur le support. WO201 2113461 relates to a process for obtaining high purity silicon, comprising the treatment of a silicon melt. The molten silicon is poured into a filter device comprising a porous molded body whose surface consists of SiO2. The porous molded body with an SiO2 surface is prepared by impregnating a carrier consisting of zirconium oxide with SiCk and subsequent hydrolysis of the SiCk with formation of an SiO2 coating on the carrier.
JP 2014076927 décrit un procédé d'obtention de silicium de haute pureté à partir d’une boue de silicium utilisant un système de trois creusets et deux filtres. Le four d’élimination d’impuretés est divisé en deux zones séparées par une paroi : une première zone dont la température est de 1530°C à 1650°C, comportant un premier creuset et un premier filtre placé en dessous du premier creuset ; et une deuxième zone dont la température est de 1410°C à 1450°C, comportant un deuxième et un troisième creusets avec un deuxième filtre placé en dessous du deuxième creuset. JP 2014076927 describes a process for obtaining high purity silicon from a silicon sludge using a system of three crucibles and two filters. The impurity removal furnace is divided into two zones separated by a wall: a first zone whose temperature is from 1530° C. to 1650° C., comprising a first crucible and a first filter placed below the first crucible; and a second zone whose temperature is from 1410°C to 1450°C, comprising a second and a third crucible with a second filter placed below the second crucible.
Le premier filtre permet la filtration des particules dont la taille est entre 1 et 5mm et le deuxième filtre permet la filtration de particules de taille comprise entre 0,1 et 0,5 mm. The first filter allows the filtration of particles whose size is between 1 and 5mm and the second filter allows the filtration of particles of size between 0.1 and 0.5 mm.
Les premier et deuxième « creusets >> décrits dans JP 2014076927, ne sont pas des creusets au sens d’un creuset de solidification mais plutôt d’un réceptacle muni en son fond d’un premier filtre et d’un deuxième filtre, respectivement. The first and second "crucibles" described in JP 2014076927 are not crucibles in the sense of a solidification crucible but rather a receptacle provided at its bottom with a first filter and a second filter, respectively.
Malgré les différents procédés existants, il subsiste un réel besoin d’un procédé permettant de réduire significativement les teneurs en impuretés comme le carbone, l’oxygène et les éléments métalliques, en particulier, en oxygène et en carbone, dans le mélange à l’état solide, notamment sous forme de poudre, issu de la découpe de briques de silicium en plaquettes, lequel mélange comporte du silicium, de l’oxygène, du carbone et des métaux, Despite the various existing processes, there remains a real need for a process making it possible to significantly reduce the contents of impurities such as carbon, oxygen and metallic elements, in particular oxygen and carbon, in the mixture with solid state, in particular in the form of powder, resulting from the cutting of silicon bricks into wafers, which mixture comprises silicon, oxygen, carbon and metals,
- qui soit simple à réaliser, et/ou - which is simple to make, and/or
- qui ne génère pas de contamination supplémentaire du silicium fondu, et/ou- which does not generate additional contamination of the molten silicon, and/or
- qui soit efficace, c’est-à-dire qui permette d’obtenir du silicium ayant une pureté adaptée au domaine du photo voltaïque mais également à tout autre domaine où du silicium ayant une pureté supérieure ou égale à 99,9999% en poids de silicium est requis (sans tenir compte de l’oxygène et du carbone). En particulier, il existe un réel besoin d’un procédé permettant de réduire significativement les teneurs en impuretés comme le carbone, l’oxygène et les éléments métalliques, en particulier, en oxygène et en carbone, dans le mélange à l’état solide, notamment sous forme de poudre, issu de la découpe de briques de silicium en plaquettes, lequel mélange comporte du silicium, de l’oxygène, du carbone et des métaux, qui mette en oeuvre un système de filtration efficace permettant d’obtenir un mélange de pureté élevée comportant 99,9999% en poids de silicium (sans tenir compte de l’oxygène) et ne produisant pas de contamination par lui-même, notamment par des métaux comme Al, Fe, Ti, Cr, Zr, Ni etc. et/ou d’autres éléments dopants comme B, P etc., lequel procédé pouvant être utilisé dans des procédés industriels de purification et/ou de recyclage de silicium. - which is effective, that is to say which makes it possible to obtain silicon having a purity suitable for the field of photovoltaic but also for any other field where silicon having a purity greater than or equal to 99.9999% by weight of silicon is required (disregarding oxygen and carbon). In particular, there is a real need for a process which makes it possible to significantly reduce the contents of impurities such as carbon, oxygen and metallic elements, in particular oxygen and carbon, in the mixture in the solid state, in particular in the form of powder, resulting from the cutting of silicon bricks into wafers, which mixture comprises silicon, oxygen, carbon and metals, which implements an effective filtration system making it possible to obtain a mixture of purity high containing 99.9999% by weight of silicon (without taking oxygen into account) and not producing contamination by itself, in particular by metals such as Al, Fe, Ti, Cr, Zr, Ni etc. and/or other doping elements such as B, P etc., which process can be used in industrial processes for the purification and/or recycling of silicon.
Dans le cadre de la présente invention, lorsque la pureté d’un mélange est exprimée en % en poids de silicium « sans prendre en compte l’oxygène et le carbone >>, cela signifie que le mélange comporte le % en poids de silicium et éventuellement des impuretés autres que l’oxygène et le carbone, comme par exemple les éléments métalliques ou les éléments dopants. In the context of the present invention, when the purity of a mixture is expressed in % by weight of silicon "without taking into account oxygen and carbon", this means that the mixture comprises the % by weight of silicon and possibly impurities other than oxygen and carbon, such as for example metallic elements or doping elements.
Résumé de l'invention Summary of the invention
La présente invention a précisément pour but de répondre à ces besoins en fournissant un procédé de purification d’un mélange à l’état solide, notamment sous forme de poudre, issu de la découpe de briques de silicium en plaquettes, lequel mélange comporte du silicium, de l’oxygène, du carbone et des métaux, avec une teneur en silicium d’au moins 96% en poids, une teneur en oxygène supérieure ou égale à 1 % en poids et une teneur en carbone supérieure ou égale à 0,1% en poids, par rapport au poids total du mélange, caractérisé en ce qu’il comprend les étapes dans lesquelles a) on porte le mélange à une température comprise entre 1450 and 1650°C ; b) on filtre le mélange à travers d’un dispositif de filtration comportant un fond muni de trous traversants de diamètre compris entre 0,5 et 2 mm et de préférence entre 1 et 1 ,5 mm, et de densité surfacique comprise entre 0,2 et 2 cm-2, de préférence entre 0,5 et 1 cm-2 ; et c) on soumet la phase liquide filtrée du mélange à une solidification dirigée. Par « trous traversants >>, on entend des trous qui ne présentent pas de tortuosité d’une extrémité à l’autre, et à travers lesquels on peut voir. The purpose of the present invention is precisely to meet these needs by providing a process for purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, which mixture comprises silicon , oxygen, carbon and metals, with a silicon content of at least 96% by weight, an oxygen content greater than or equal to 1% by weight and a carbon content greater than or equal to 0.1 % by weight, relative to the total weight of the mixture, characterized in that it comprises the steps in which a) the mixture is brought to a temperature between 1450 and 1650°C; b) the mixture is filtered through a filtration device comprising a bottom provided with through holes with a diameter of between 0.5 and 2 mm and preferably between 1 and 1.5 mm, and a surface density of between 0, 2 and 2 cm -2 , preferably between 0.5 and 1 cm -2 ; and c) the filtered liquid phase of the mixture is subjected to controlled solidification. By "through holes" is meant holes which do not exhibit tortuosity from one end to the other, and through which one can see.
Le mélange à l’état solide est introduit dans le dispositif de filtration et pour y être porté à une température comprise entre 1450 et 1650°C. The mixture in the solid state is introduced into the filtration device and to be brought there to a temperature between 1450 and 1650°C.
L’invention a également pour objet une installation de purification de silicium à partir d’un mélange solide, notamment sous forme de poudre, issu de la découpe de briques de silicium en plaquettes et comportant du silicium, de l’oxygène, du carbone et éventuellement des métaux, la teneur en silicium étant d’au moins 96% en poids, la teneur en oxygène étant supérieure ou égale à 1% en poids et la teneur en carbone étant supérieure ou égale à 0,1% en poids, par rapport au poids total du mélange, ladite installation comportant The invention also relates to an installation for the purification of silicon from a solid mixture, in particular in the form of powder, resulting from the cutting of silicon bricks into wafers and comprising silicon, oxygen, carbon and optionally metals, the silicon content being at least 96% by weight, the oxygen content being greater than or equal to 1% by weight and the carbon content being greater than or equal to 0, 1% by weight, relative to the total weight of the mixture, said installation comprising
- des moyens aptes à chauffer le mélange au-delà de la température de fusion du silicium ; et - means capable of heating the mixture beyond the melting point of the silicon; and
- des moyens de filtration aptes à filtrer le mélange, les moyens de filtration comportant des trous traversants de diamètre compris entre 0,1 et 5 mm, de préférence entre 0,5 et 2 mm. - Filtration means capable of filtering the mixture, the filtration means comprising through-holes with a diameter of between 0.1 and 5 mm, preferably between 0.5 and 2 mm.
L’installation de l’invention comporte, en outre, des moyens aptes à réaliser une solidification dirigée de la phase liquide filtrée du mélange. The installation of the invention further comprises means capable of carrying out a directed solidification of the filtered liquid phase of the mixture.
Dans le procédé de l’invention, la filtration est avantageusement réalisée à travers un unique dispositif de filtration comportant un fond muni de trous traversants ayant de préférence tous le même diamètre, compris entre 0,5 et 2 mm et de préférence entre 1 et 1 ,5 mm. In the method of the invention, the filtration is advantageously carried out through a single filtration device comprising a bottom provided with through holes preferably all having the same diameter, between 0.5 and 2 mm and preferably between 1 and 1 .5mm.
De plus, avantageusement, l’installation selon l’invention ne comporte qu’une seule zone de chauffe. In addition, advantageously, the installation according to the invention comprises only one heating zone.
Un autre objet de l’invention se rapporte à l’utilisation d’un procédé de purification d’un mélange à l’état solide, notamment sous forme de poudre, issu de la découpe de briques de silicium en plaquettes, selon l’invention, ou d’une installation selon l’invention, pour la fabrication des cellules photovoltaïques. Another object of the invention relates to the use of a process for purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, according to the invention. , or an installation according to the invention, for the manufacture of photovoltaic cells.
L’invention concerne, en outre, un procédé de fabrication de cellules photovoltaïques mettant en oeuvre une étape de purification d’un mélange à l’état solide, notamment sous forme de poudre, issu de la découpe de briques de silicium en plaquettes, selon le procédé de l’invention, ou une installation selon l’invention. The invention also relates to a method for manufacturing photovoltaic cells implementing a step of purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, according to the method of the invention, or an installation according to the invention.
Brève description des figures Brief description of figures
D'autres caractéristiques et avantages de l'invention apparaitront au cours de la lecture de la description détaillée qui va suivre pour la compréhension de laquelle on se reportera aux dessins annexés dans lesquels : [Fig 1] représente un mode de réalisation du procédé de l’invention dans lequel le dispositif de filtration sous forme de creuset est placé au-dessus d’un autre creuset au sein duquel la solidification dirigée du mélange est réalisée. Other characteristics and advantages of the invention will appear during the reading of the detailed description which will follow for the understanding of which reference will be made to the appended drawings in which: [Fig 1] represents an embodiment of the method of the invention in which the filtration device in the form of a crucible is placed above another crucible within which the directed solidification of the mixture is carried out.
[Fig 2] représente un mode de réalisation du procédé de l’invention dans lequel le dispositif de filtration sous forme de creuset est disposé au fond d’un autre creuset au sein duquel la solidification dirigée du mélange est réalisée. [Fig 2] represents an embodiment of the method of the invention in which the filtration device in the form of a crucible is placed at the bottom of another crucible within which the directed solidification of the mixture is carried out.
[Fig 3] représente un mode de réalisation du procédé de l’invention dans lequel le dispositif de filtration sous forme de creuset est couplé à un système d’alimentation en continu en kerf. [Fig 3] represents an embodiment of the method of the invention in which the filtration device in the form of a crucible is coupled to a continuous kerf supply system.
[Fig 4] représente un mode de réalisation du procédé de l’invention dans lequel le dispositif de filtration comprend une pluralité de dispositifs de filtration unitaires sous forme de creusets. [Fig 4] represents an embodiment of the method of the invention in which the filtration device comprises a plurality of unitary filtration devices in the form of crucibles.
[Fig 5] représente un mode de réalisation du procédé de l’invention dans lequel le dispositif de filtration sous forme de creuset comprend un système de soufflage de gaz neutre constitué d’un tube en graphite disposé en son centre. Ce système étant au-dessus du mélange/kerf, il favorisera l’évacuation de l’oxygène dissous dans le mélange sous forme de l’espèce volatile SiO. [Fig 5] represents an embodiment of the method of the invention in which the filtration device in the form of a crucible comprises an inert gas blowing system consisting of a graphite tube placed in its center. This system being above the mixture/kerf, it will favor the evacuation of the oxygen dissolved in the mixture in the form of the volatile species SiO.
Description détaillée de l'invention Detailed description of the invention
La présente invention concerne un procédé de purification d’un mélange à l’état solide, notamment sous forme de poudre, issu de la découpe de briques de silicium en plaquettes, lequel mélange comporte du silicium, de l’oxygène, du carbone et des métaux, avec une teneur en silicium d’au moins 96% en poids, une teneur en oxygène supérieure ou égale à 1% en poids et une teneur en carbone supérieure ou égale à 0,1% en poids, par rapport au poids total du mélange, caractérisé en ce qu’il comprend les étapes dans lesquelles a) on porte le mélange à une température comprise entre 1450 and 1650°C ; b) on filtre le mélange à travers d’un dispositif de filtration comportant un fond muni de trous traversants de diamètre compris entre 0,5 et 2 mm et de préférence entre 1 et 1 ,5 mm, et de densité surfacique comprise entre 0,2 et 2 cm-2, de préférence entre 0,5 et 1 cm-2 ; et c) on soumet la phase liquide filtrée du mélange à une solidification dirigée. Le mélange solide, notamment sous forme de poudre, issu de la découpe de briques de silicium en plaquettes, comporte du silicium, de l’oxygène, du carbone et des métaux, avec une teneur en silicium d’au moins 96% en poids, une teneur en oxygène supérieure ou égale à 1 % en poids et une teneur en carbone supérieure ou égale à 0,1% en poids, par rapport au poids total du mélange. Dans la suite de l’exposé, le terme « kerf >> peut également être utilisé pour désigner ce mélange. The present invention relates to a method for purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, which mixture comprises silicon, oxygen, carbon and metals, with a silicon content of at least 96% by weight, an oxygen content greater than or equal to 1% by weight and a carbon content greater than or equal to 0.1% by weight, based on the total weight of the mixture, characterized in that it comprises the steps in which a) the mixture is brought to a temperature between 1450 and 1650°C; b) the mixture is filtered through a filtration device comprising a bottom provided with through holes with a diameter of between 0.5 and 2 mm and preferably between 1 and 1.5 mm, and with a surface density of between 0.2 and 2 cm -2 , preferably between 0.5 and 1 cm -2 ; and c) the filtered liquid phase of the mixture is subjected to controlled solidification. The solid mixture, in particular in powder form, resulting from the cutting of silicon bricks into wafers, comprises silicon, oxygen, carbon and metals, with a silicon content of at least 96% by weight, an oxygen content greater than or equal to 1% by weight and a carbon content greater than or equal to 0.1% by weight, relative to the total weight of the mixture. In the following description, the term "kerf" can also be used to designate this mixture.
Le mélange mis en oeuvre tel que défini ci-dessus est solide, notamment sous forme de poudre. La granulométrie de cette poudre est généralement telle que le diamètre moyen des particules peut aller de 0,1 à 10 microns. Le procédé comprend une étape c), dans laquelle on soumet la phase liquide filtrée à l’issue de l’étape b) à une solidification dirigée. The mixture used as defined above is solid, in particular in powder form. The particle size of this powder is generally such that the average diameter of the particles can range from 0.1 to 10 microns. The method comprises a step c), in which the liquid phase filtered at the end of step b) is subjected to directed solidification.
Au cours de l’étape c), la phase liquide filtrée à l’issue de l’étape b) subit une opération de ségrégation des impuretés métalliques par solidification dirigée. La ségrégation des impuretés métalliques par solidification dirigée est un procédé bien connu de l’homme de l’art. La solidification dirigée peut être mise en oeuvre, par exemple, selon la méthode HEM (Heat Extraction Method en anglais) décrite par Khattak et Schmid (Growth of silicon ingots by HEM for photovoltaic applications, Silicon Processing for Photovoltaics II, edited by C.P. Khattak and K.V. Ravi, Elsevier Science Publishers B.V., 1987). Dans le cas du silicium, il est connu que cette ségrégation est efficace si le silicium solidifié est monophasé, c’est-à-dire ne contenant pas de précipités ou d’inclusions. La ségrégation des impuretés métalliques sera donc inopérante si le mélange, en particulier le silicium qui y est présent, contient des teneurs en oxygène et en carbone dans la gamme du pourcent. En effet, compte tenu du fait que ces teneurs sont bien supérieures à la limite de solubilité de l’oxygène et du carbone dans le silicium à l’état fondu, le liquide contiendra des inclusions de SiÛ2 et de SiC. During step c), the liquid phase filtered at the end of step b) undergoes an operation of segregation of metallic impurities by directed solidification. The segregation of metallic impurities by directional solidification is a process well known to those skilled in the art. Directed solidification can be implemented, for example, according to the HEM method (Heat Extraction Method in English) described by Khattak and Schmid (Growth of silicon ingots by HEM for photovoltaic applications, Silicon Processing for Photovoltaics II, edited by C.P. Khattak and K.V. Ravi, Elsevier Science Publishers B.V., 1987). In the case of silicon, it is known that this segregation is effective if the solidified silicon is single-phase, that is to say not containing precipitates or inclusions. The segregation of the metallic impurities will therefore be inoperative if the mixture, in particular the silicon which is present therein, contains oxygen and carbon contents in the percent range. Indeed, given the fact that these contents are well above the solubility limit of oxygen and carbon in the silicon in the molten state, the liquid will contain inclusions of SiO2 and SiC.
Le procédé de l’invention concerne la purification du silicium à partir du mélange ou du kerf contenant des teneurs en silicium d’au moins 96% en poids, des teneurs en oxygène supérieures ou égale à 1 % en poids et des teneurs en carbone supérieures ou égales à 0,1 % en poids, par rapport au poids total du mélange. Le mélange/kerf peut être issu de la découpe de briques en silicium, au slurry ou au fil diamanté. Le procédé consiste à réaliser une filtration des particules solides de SiÛ2 et SiC, puis une ségrégation, par solidification dirigée, des métaux du silicium présents dans le liquide filtré, les opérations de filtration et de ségrégation pouvant avantageusement être réalisées lors d’un même cycle de chauffage/refroidissement dans un four industriel standard DSS (Directional Solidification System en anglais) utilisé dans l’industrie photovoltaïque. The process of the invention relates to the purification of silicon from the mixture or from kerf containing silicon contents of at least 96% by weight, oxygen contents greater than or equal to 1% by weight and carbon contents greater than or equal to 0.1% by weight, relative to the total weight of the mixture. The mixture/kerf can come from the cutting of silicon bricks, with slurry or with diamond wire. The method consists in carrying out a filtration of the solid particles of SiO2 and SiC, then a segregation, by directed solidification, of the silicon metals present in the filtered liquid, the filtration and segregation operations advantageously being able to be carried out during the same cycle. heating/cooling in a standard DSS (Directional Solidification System) industrial furnace used in the photovoltaic industry.
La géométrie du dispositif de filtration utilisé est adaptée au volume de kerf ou de mélange. The geometry of the filtration device used is adapted to the volume of kerf or mixture.
Le dispositif de filtration utilisé dans le procédé de l’invention a l’avantage de pouvoir s’adapter notamment à un four industriel standard de solidification dirigée DSS (Directional Solidification System en anglais) tel qu’utilisé dans l’industrie photovoltaïque. The filtration device used in the process of the invention has the advantage of being able to adapt in particular to a standard industrial furnace for directed solidification DSS (Directional Solidification System) as used in the photovoltaic industry.
De préférence, le dispositif de filtration est sous forme de creuset. Dans un mode de réalisation préféré de l’invention, pour l’étape de filtration, on utilise un dispositif de filtration sous forme de creuset comportant un fond muni de trous traversants de diamètre compris entre 0,5 et 2 mm, et de préférence entre 1 et 1 ,5 mm. Preferably, the filtration device is in the form of a crucible. In a preferred embodiment of the invention, for the filtration step, a filtration device is used in the form of a crucible comprising a bottom provided with through holes with a diameter of between 0.5 and 2 mm, and preferably between 1 and 1.5 mm.
Dans le cas où une petite quantité de kerf est utilisée, qui, à la fusion, formerait une goutte, le dispositif de filtration peut être sous forme d’une plaque. Dans ce cas, une alimentation continue en kerf peut être envisagée. Par « trous traversants >>, on entend des trous à travers lesquels on peut voir et qui ne présentent aucune tortuosité d’une extrémité à l’autre. In the case where a small quantity of kerf is used, which, upon melting, would form a drop, the filtration device can be in the form of a plate. In this case, a continuous supply of kerf can be considered. By "through holes" is meant holes through which one can see and which exhibit no tortuosity from one end to the other.
Dans le mélange (ou kerf), sous forme solide, notamment sous forme de poudre, les particules de silicium ont une taille micronique, ce qui est aussi le cas des composés à base de carbone et d’oxygène. In the mixture (or kerf), in solid form, in particular in powder form, the silicon particles have a micron size, which is also the case for compounds based on carbon and oxygen.
Par des particules de « taille micronique >>, on entend des particules ayant un diamètre de 0,1 à 10 microns. By "micron size" particles is meant particles having a diameter of 0.1 to 10 microns.
En effet, l’oxygène se trouve principalement sous forme de film de SiC autour des particules de Si. Le carbone provenant du fluide de découpe est sous forme d’espèces organiques greffées sur les particules de Si. Le carbone se trouve aussi sous forme de particules microniques de polymère qui constitue le support des briques et des lingots de silicium lors de la coupe et qui est partiellement découpé. Pour la découpe au slurry, le carbone est aussi sous forme de particules de SiC dont la taille est de l’ordre de 10 microns. Contre toute attente, des trous millimétriques permettent une filtration efficace des précipités présents dans le kerf fondu. En effet, lors du chauffage et de la fusion, l’oxygène et le carbone réagissent avec le silicium pour former SiÛ2 et SiC qui sont les composés stables à haute température dans le silicium fondu. Les particules de SiÛ2 s’agglomèrent entre elles lors de la fusion, et les particules de SiC adhèrent à SiO2, l’ensemble formant des agglomérats de grande dimension, de quelques mm à quelques cm qui sont retenus à l’intérieur du filtre même si les trous sont de taille millimétrique. Le dispositif de filtration, notamment sous forme de creuset, est en un matériau choisi dans le groupe constitué par le graphite, le carbure de silicium (SiC), le nitrure de silicium (SiNa), la silice (SiC ), ou un mélange de ces matériaux, ou en un mélange de graphite avec le carbure de silicium (SiC), le nitrure de silicium (SiNa), et la silice (SiC ). Dans le cas où le dispositif de filtration est en un mélange de graphite avec le carbure de silicium (SiC), le nitrure de silicium (SiNa), et la silice (SiOa), il peut être sous forme de multicouche. A ce titre, on peut, par exemple, citer un filtre en graphite d’épaisseur de quelques millimètres à 1 cm, recouvert, soit sur toutes ses faces, soit sur ses faces internes en contact avec le kerf, d’une couche de SiC ou de SiaIXk ou de SiO2, de 10 à 500 microns d’épaisseur. Ce type de filtre est décrit dans la demande de brevet FR1661788. Indeed, the oxygen is mainly found in the form of a SiC film around the Si particles. The carbon coming from the cutting fluid is in the form of organic species grafted onto the Si particles. The carbon is also found in the form of micron particles of polymer which constitutes the support for the silicon bricks and ingots during cutting and which is partially cut. For slurry cutting, the carbon is also in the form of SiC particles, the size of which is around 10 microns. Against all expectations, millimetric holes allow effective filtration of the precipitates present in the molten kerf. Indeed, during heating and melting, oxygen and carbon react with silicon to form SiO2 and SiC which are stable compounds at high temperature in molten silicon. The SiO2 particles agglomerate between them during fusion, and the SiC particles adhere to SiO2, the whole forming large agglomerates, from a few mm to a few cm which are retained inside the filter even if the holes are millimeter in size. The filtration device, in particular in the form of a crucible, is made of a material chosen from the group consisting of graphite, silicon carbide (SiC), silicon nitride (SiNa), silica (SiC), or a mixture of these materials, or a mixture of graphite with silicon carbide (SiC), silicon nitride (SiNa), and silica (SiC). In the case where the filtration device is made of a mixture of graphite with silicon carbide (SiC), silicon nitride (SiNa), and silica (SiOa), it may be in the form of a multilayer. As such, one can, for example, cite a graphite filter with a thickness of a few millimeters to 1 cm, covered, either on all its faces, or on its internal faces in contact with the kerf, with a layer of SiC or SiaIXk or SiO2, 10 to 500 microns thick. This type of filter is described in patent application FR1661788.
Pour l’application photovoltaïque, le filtre est de préférence constitué de graphite, notamment de graphite isostatique pour ses propriétés mécaniques, notamment sa résistance mécanique lors de l’infiltration du silicium liquide dans sa porosité. Le graphite isostatique peut par exemple être la nuance 2020 de Mersen présentant une porosité de 9% et une résistance à la flexion de 45 MPa, ou la nuance R7500 de SGL présentant une porosité de 14% et une résistance à la flexion de 50 MPa. Pour des applications visant une pureté du silicium inférieur à 99,9999% en poids de silicium (sans tenir compte de l’oxygène et du carbone), le filtre peut être constitué d’un autre matériau céramique réfractaire, comme par exemple AI2O3 ou ZrÛ2. For the photovoltaic application, the filter is preferably made of graphite, in particular of isostatic graphite for its mechanical properties, in particular its mechanical resistance during the infiltration of liquid silicon into its porosity. The isostatic graphite may for example be the 2020 grade from Mersen having a porosity of 9% and a bending strength of 45 MPa, or the R7500 grade from SGL having a porosity of 14% and a bending strength of 50 MPa. For applications aiming for a silicon purity of less than 99.9999% by weight of silicon (without taking into account oxygen and carbon), the filter can be made of another refractory ceramic material, such as for example Al2O3 or ZrO2 .
La taille des trous du dispositif de filtration est telle que les trous sont facilement réalisables avec des outils d’usinage standard. Comme déjà indiqué, le diamètre des trous est compris entre 0,5 et 2 mm, et de préférence entre 1 et 1 ,5 mm. The size of the filter device holes is such that the holes are easily made with standard machining tools. As already indicated, the diameter of the holes is between 0.5 and 2 mm, and preferably between 1 and 1.5 mm.
La densité surfacique de trous doit être comprise dans une gamme de valeurs optimales. En effet, les trous ne doivent pas être trop rapprochés sinon le filtre risque de se fissurer lors de l’usinage des trous ou encore lors de son utilisation sous l’effet des contraintes générées par l’infiltration du silicium liquide dans les pores du graphite et sa transformation en carbure de silicium. A l’opposé, les trous ne doivent pas être trop distants les uns des autres sinon le débit du silicium liquide filtré sera faible et la productivité du procédé de purification médiocre. The surface density of holes must be within a range of optimal values. Indeed, the holes must not be too close together otherwise the filter risks cracking during the machining of the holes or during its use under the effect of the stresses generated by the infiltration of the liquid silicon into the pores of the graphite. and its transformation into silicon carbide. On the other hand, the holes must not be too far apart, otherwise the flow rate of the filtered liquid silicon will be low and the productivity of the purification process mediocre.
Le débit volumique du liquide Q à travers le dispositif de filtration est donné par la formule Q = V.St.nt.Sf, dans laquelle V est la vitesse d’écoulement du liquide, St la section d’un trou (St = K.dt2/4, avec dt le diamètre du trou), nt la densité surfacique de trous, et St la section intérieure du filtre. The volume flow rate of the liquid Q through the filtration device is given by the formula Q = V.St.nt.Sf, where V is the flow velocity of the liquid, St the cross section of a hole (St = K .dt 2 /4, with dt the diameter of the hole), nt the surface density of holes, and St the internal section of the filter.
Dans l’hypothèse d’un régime inertiel, c’est-à-dire en négligeant les forces visqueuses et les forces de tension de surface du liquide, la valeur maximale de la vitesse d’écoulement est donnée par la formule V = (2.g.H)1/2, où p est la densité volumique de masse du silicium liquide, g l’accélération de la pesanteur, et H la hauteur de silicium liquide dans le filtre. Dans le domaine du photovoltaïque, les masses standards des lingots de silicium fabriqués par solidification dirigée sont par exemple 13 kg (four de taille dénommée Gen 1 ), 60 kg (four de taille dénommée Gen 2) ou encore 650 kg à échelle industrielle (four de taille dénommée Gen 6). Pour des hauteurs de silicium liquide H dans le filtre allant de 18 cm pour Gen 1 à 25 cm pour Gen 6, les inventeurs ont constaté que pour des trous de diamètre compris entre 0,5 mm et 5 mm, une densité surfacique de trous comprise entre 0,2 cm-2 et 2 cm-2 permet d’obtenir un débit maximal de liquide Q en début d’écoulement de quelques dizièmes à quelques dizaines de kg par seconde. Pour des masses de silicium allant de Gen 1 à Gen 6, cette gamme de débits correspond à un temps minimal de vidange du filtre allant de quelques secondes à quelques centaines de secondes, assurant ainsi une bonne productivité du procédé de purification. Assuming an inertial regime, i.e. neglecting the viscous forces and the surface tension forces of the liquid, the maximum value of the flow velocity is given by the formula V = (2 .gH) 1/2 , where p is the bulk density of liquid silicon, g the acceleration of gravity, and H the height of liquid silicon in the filter. In the field of photovoltaics, the standard masses of silicon ingots manufactured by directional solidification are for example 13 kg (furnace of size called Gen 1), 60 kg (furnace of size called Gen 2) or even 650 kg on an industrial scale (furnace of size called Gen 6). For heights of liquid silicon H in the filter ranging from 18 cm for Gen 1 to 25 cm for Gen 6, the inventors have found that for holes with a diameter of between 0.5 mm and 5 mm, a surface density of holes of between between 0.2 cm -2 and 2 cm -2 makes it possible to obtain a maximum flow rate of liquid Q at the start of the flow from a few tenths to a few tens of kg per second. For masses of silicon ranging from Gen 1 to Gen 6, this range of flow rates corresponds to a minimum filter emptying time ranging from a few seconds to a few hundred seconds, thus ensuring good productivity of the purification process.
Pour l’étape de filtration, on utilise un dispositif de filtration sous forme de creuset comportant un fond muni avec une densité surfacique de trous comprise entre 0,2 cm-2 et 2 cm-2, de préférence entre 0,5 cm-2 et 1 cm-2. L’épaisseur du dispositif de filtration pourrait conditionner sa tenue mécanique. Les épaisseurs typiques peuvent aller de de 5 mm à 20 mm. Le mélange à l’état solide peut être introduit dans le dispositif de filtration avant le cycle de chauffage. En variante, le procédé peut comporter une étape d’introduction du mélange/kerf dans le dispositif de filtration lorsque la température maximale est atteinte dans le four. For the filtration step, a filtration device is used in the form of a crucible comprising a bottom provided with a surface density of holes of between 0.2 cm -2 and 2 cm -2 , preferably between 0.5 cm -2 and 1 cm -2 . The thickness of the filtration device could condition its mechanical strength. Typical thicknesses can range from 5mm to 20mm. The solid state mixture may be introduced into the filtration device prior to the heating cycle. Alternatively, the method may include a step of introducing the mixture/kerf into the filtration device when the maximum temperature is reached in the furnace.
Le mélange est porté à une température supérieure ou égale à la température de fusion du silicium, notamment à une température comprise entre 1450 and 1650°C, de préférence entre 1500°C et 1600°C. The mixture is brought to a temperature greater than or equal to the melting point of silicon, in particular to a temperature between 1450 and 1650°C, preferably between 1500°C and 1600°C.
La durée de palier à la température maximale dépend de la température maximale et de la quantité de kerf/mélange. Par exemple, pour une température maximale de 1535°C et une masse de kerf/mélange de 10 kg, la durée de palier est d’environ 1 heure. L’homme du métier sera en mesure de déterminer la durée de ce palier sur la base de la température maximale et de la quantité de kerf/mélange. The duration of the plateau at the maximum temperature depends on the maximum temperature and the quantity of kerf/mixture. For example, for a maximum temperature of 1535°C and a mass of kerf/mixture of 10 kg, the stage duration is approximately 1 hour. Those skilled in the art will be able to determine the duration of this plateau based on the maximum temperature and the amount of kerf/mixture.
Après l’étape de filtration b), la phase liquide filtrée, débarrassée notamment des scories constituées de SiÛ2 et de SiC, est soumise à une solidification dirigée, au cours de laquelle on obtient la ségrégation des impuretés notamment métalliques du mélange. After filtration step b), the filtered liquid phase, freed in particular of slag consisting of SiO2 and SiC, is subjected to controlled solidification, during which the segregation of the impurities, in particular metal impurities, of the mixture is obtained.
La solidification dirigée est un procédé bien connu de l’homme du métier. Elle peut être réalisée selon la méthode HEM (Heat Extraction Method en anglais) décrite par Khattak et Schmid (Growth of silicon ingots by HEM for photovoltaic applications, Silicon Processing for Photovoltaics II, edited by C.P. Khattak and K.V. Ravi, Elsevier Science Publishers B.V., 1987). Le procédé de l’invention peut comporter une étape d) de refroidissement, notamment jusqu’à température ambiante, du silicium à l’état solide obtenu à l’issue de l’étape c). Directed solidification is a method well known to those skilled in the art. It can be carried out according to the HEM method (Heat Extraction Method in English) described by Khattak and Schmid (Growth of silicon ingots by HEM for photovoltaic applications, Silicon Processing for Photovoltaics II, edited by CP Khattak and KV Ravi, Elsevier Science Publishers BV, 1987). The method of the invention may comprise a step d) of cooling, in particular to ambient temperature, of the silicon in the solid state obtained at the end of step c).
Par température ambiante, on entend une température de 20°C + 5°C. Le procédé peut comporter, en outre, une étape e) de récupération du silicium à l’état solide purifié à l’issue du refroidissement de l’étape d). On entend par l’expression « à l’issue du refroidissement >>, le retour à la température ambiante, c’est-à-dire à une température de 20°C + 5°C. Après filtration et à l’issue du refroidissement, une fine couche de silicium demeure au fond du dispositif de filtration par capillarité, et les scories adhèrent peu à la surface dudit dispositif de telle sorte qu’elles peuvent être retirées manuellement et que le dispositif de filtration peut être réutilisé. Selon un mode de réalisation de l’invention, le dispositif de filtration est disposé au-dessus d’un autre creuset, sur lequel il repose, dans un four de ségrégation ou de cristallisation du silicium photovoltaïque comme montré en [Fig 1], La charge de kerf est disposée dans le dispositif de filtration et, à la fusion, la phase liquide comportant le silicium et les impuretés métalliques s’écoule par les trous présents dans le fond dudit dispositif, tandis que les scories sont retenues dans ledit dispositif. Une rampe de refroidissement est ensuite appliquée pour permettre la solidification dirigée du silicium au sein du creuset et la ségrégation des impuretés présentes à l’état dissout dans le mélange initial comportant le silicium. Ambient temperature means a temperature of 20°C + 5°C. The method may also comprise a step e) of recovering the silicon in the solid state purified after the cooling of step d). The expression "after cooling" means the return to ambient temperature, i.e. to a temperature of 20°C + 5°C. After filtration and at the end of cooling, a thin layer of silicon remains at the bottom of the capillary filtration device, and the slag adheres little to the surface of said device so that they can be removed manually and the device filtration can be reused. According to one embodiment of the invention, the filtration device is placed above another crucible, on which it rests, in a photovoltaic silicon segregation or crystallization furnace as shown in [Fig 1]. Kerf charge is placed in the filtration device and, on melting, the liquid phase comprising the silicon and the metallic impurities flows through the holes present in the bottom of said device, while the slag is retained in said device. A cooling ramp is then applied to allow the controlled solidification of the silicon within the crucible and the segregation of the impurities present in the dissolved state in the initial mixture comprising the silicon.
Dans un autre mode de réalisation de l’invention, le dispositif de filtration repose initialement au fond d’un autre creuset comme montré en [Fig 2], Le volume du dispositif de filtration est ajusté pour ne contenir que les scories à filtrer. Le kerf/mélange est chargé dans le dispositif de filtration et le creuset. A la fin du palier de fusion, le dispositif de filtration est remonté au-dessus du mélange filtré par un moyen mécanique à l’aide de tiges, notamment en graphite. L’intérêt de ce mode de réalisation est que pour un même volume de creuset, il permet de filtrer des quantités de kerf bien plus importantes que dans le cas du mode de réalisation illustré en [Fig 1] où seul le filtre est chargé en kerf. Dans un autre mode de réalisation de l’invention, le dispositif de filtration est couplé à un système d’alimentation en continu en kerf. La contenance du dispositif de filtration est dans ce cas réduite, le volume du dispositif étant ajusté pour ne contenir que les scories à filtrer. Un tel système d’alimentation en continu est bien connu de l’homme du métier, par exemple pour la croissance des lingots de silicium monocristallins par tirage Czochralski afin d’augmenter la productivité du procédé. La [Fig 3] représente un exemple de ce mode de réalisation dans lequel le dispositif de filtration est disposé au- dessus d’un autre creuset, sur lequel il repose, cet autre creuset étant destiné à la ségrégation des éléments métalliques de la phase liquide filtrée du mélange. In another embodiment of the invention, the filtration device initially rests at the bottom of another crucible as shown in [Fig 2]. The volume of the filtration device is adjusted to contain only the slag to be filtered. The kerf/mixture is loaded into the filtration device and the crucible. At the end of the melting stage, the filtration device is raised above the filtered mixture by mechanical means using rods, in particular made of graphite. The advantage of this embodiment is that for the same volume of crucible, it makes it possible to filter much larger quantities of kerf than in the case of the embodiment illustrated in [Fig 1] where only the filter is loaded with kerf . In another embodiment of the invention, the filtration device is coupled to a continuous kerf supply system. The capacity of the filtration device is in this case reduced, the volume of the device being adjusted to contain only the slag to be filtered. Such a continuous supply system is well known to those skilled in the art, for example for the growth of monocrystalline silicon ingots by Czochralski pulling in order to increase the productivity of the process. [Fig 3] shows an example of this embodiment in which the filtration device is arranged above another crucible, on which it rests, this other crucible being intended for the segregation of the metallic elements of the liquid phase filtered from the mixture.
Selon un autre mode de réalisation de l’invention, le dispositif de filtration comprend une pluralité de dispositifs de filtration unitaires reposant sur des barres notamment en graphite, elles-mêmes reposant sur les plaques latérales notamment en graphite, maintenant le creuset comme montré en [Fig 4], Ce dispositif de filtration est notamment destiné aux creusets de grandes dimensions pour la production de lingots de silicium de taille industrielle. According to another embodiment of the invention, the filtration device comprises a plurality of unitary filtration devices resting on bars, in particular of graphite, themselves resting on the side plates, in particular of graphite, holding the crucible as shown in [ Fig 4], This filtration device is intended in particular for large size crucibles for the production of industrial size silicon ingots.
Dans un autre mode de réalisation de l’invention, les parois intérieures du dispositif de filtration, ou les parois intérieures et extérieures du dispositif de filtration, peuvent être recouvertes d’un dépôt anti-adhérent à base de poudre de SiaIXk, tel qu’utilisé classiquement pour les creusets de cristallisation du silicium photovoltaïque. In another embodiment of the invention, the interior walls of the filtration device, or the interior and exterior walls of the filtration device, can be covered with an anti-adherent deposit based on SiaIXk powder, such as conventionally used for photovoltaic silicon crystallization crucibles.
Dans un autre mode de réalisation de l’invention, le dispositif de filtration comprend un système de soufflage additionnel permettant d’injecter du gaz neutre au-dessus de la phase liquide filtrée contenue dans le creuset. Dans ce mode de réalisation, le gaz neutre peut, par exemple, être injecté par l’intermédiaire d’un tube de graphite disposé au centre du filtre comme montré en [Fig 5]. In another embodiment of the invention, the filtration device comprises an additional blowing system making it possible to inject neutral gas above the filtered liquid phase contained in the crucible. In this embodiment, the neutral gas can, for example, be injected through a graphite tube placed in the center of the filter as shown in [Fig 5].
Afin que la poudre de kerf ne s’échappe pas par les trous du dispositif de filtration lors de son chargement dans ledit dispositif et lors de l’étape de chauffage, des wafers de silicium ou des morceaux de wafers de silicium cassés peuvent avantageusement être disposés au fond du dispositif de filtration de façon à recouvrir les trous. Ces wafers sont alors en silicium de grade photovoltaïque ou microélectronique. Leur épaisseur est avantageusement d’au moins 100 microns. So that the kerf powder does not escape through the holes of the filtration device when it is loaded into said device and during the heating step, silicon wafers or pieces of broken silicon wafers can advantageously be placed at the bottom of the device filtration to cover the holes. These wafers are then made of photovoltaic or microelectronic grade silicon. Their thickness is advantageously at least 100 microns.
Pour augmenter la quantité de kerf chargé dans le dispositif de filtration et ainsi améliorer la productivité du procédé, le kerf peut être préalablement densifié par des techniques de compaction, par exemple la compaction isostatique, ou par des techniques d’agglomération, par exemple l’agglomération par mélange à fort cisaillement ou l’agglomération par séchage par pulvérisation. Ces techniques sont bien connues de l’homme du métier. To increase the amount of kerf loaded into the filtration device and thus improve the productivity of the process, the kerf can be densified beforehand by compaction techniques, for example isostatic compaction, or by agglomeration techniques, for example agglomeration by high shear mixing or agglomeration by spray drying. These techniques are well known to those skilled in the art.
Comme déjà indiqué, le procédé de l’invention permet de diminuer les teneurs en métaux, en oxygène et en carbone dans le kerf, en un seul cycle de fusion et solidification, ce qui est particulièrement avantageux sur le plan industriel par rapport aux procédés de l’état de la technique. As already indicated, the process of the invention makes it possible to reduce the contents of metals, oxygen and carbon in the kerf, in a single melting and solidification cycle, which is particularly advantageous industrially compared to the processes of the state of the art.
Plus particulièrement, dans le procédé de l’invention, le dispositif de filtration s’adapte dans un four industriel DSS de ségrégation ou cristallisation du silicium photovoltaïque. Cela n’est pas le cas pour le procédé de fusion et versement dans un creuset de ségrégation, tel que décrit dans WO201 2113461. More particularly, in the method of the invention, the filtration device fits into an industrial DSS furnace for the segregation or crystallization of photovoltaic silicon. This is not the case for the melting and pouring process in a segregation crucible, as described in WO201 2113461.
Dans l’invention, on cherche à purifier le silicium à partir d’un mélange à l’état solide, notamment sous forme de poudre, issu de la découpe de briques de silicium en plaquettes, lequel mélange comportant du silicium, de l’oxygène, du carbone et des métaux, avec une teneur en silicium d’au moins 96% en poids, une teneur en oxygène supérieure ou égale à 1% en poids et une teneur en carbone supérieure ou égale à 0,1% en poids, par rapport au poids total du mélange. Un tel mélange n’a pas les mêmes caractéristiques que le silicium MG et que les rebuts des lingots de cristallisation. Le Si MG contient de l’oxygène et du carbone dans des proportions moindres que le kerf (0,3% en poids d’oxygène et 0,06% en poids de carbone selon D. Sarti étal., Silicon feedstock for the multi-crystalline photovoltaic industry, Solar Energy Materials & Solar Cells 72 (2002) p. 27-40), et les rebuts des lingots de cristallisation de silicium photovoltaïque ne contiennent pas de précipités d’oxygène mais des précipités de SiaIXk d’une taille de 20 microns, et des précipités de SiC majoritairement de taille inférieure à 200 microns. In the invention, it is sought to purify the silicon from a mixture in the solid state, in particular in the form of powder, resulting from the cutting of silicon bricks into wafers, which mixture comprising silicon, oxygen , carbon and metals, with a silicon content of at least 96% by weight, an oxygen content greater than or equal to 1% by weight and a carbon content greater than or equal to 0.1% by weight, by relative to the total weight of the mixture. Such a mixture does not have the same characteristics as MG silicon and scrap crystallization ingots. Si MG contains oxygen and carbon in lower proportions than kerf (0.3% by weight of oxygen and 0.06% by weight of carbon according to D. Sarti et al., Silicon feedstock for the multi- crystalline photovoltaic industry, Solar Energy Materials & Solar Cells 72 (2002) p. 27-40), and scrap from photovoltaic silicon crystallization ingots do not contain precipitates oxygen but precipitates of SiaIXk with a size of 20 microns, and precipitates of SiC mainly with a size of less than 200 microns.
Ainsi, contrairement au procédé de l’invention où les trous du dispositif de filtration ont un diamètre dans la gamme du millimètre, les filtres de l’état de la technique pour la filtration du Si MG liquide ont des trous de faible dimension, de quelques microns dans DE 3411955 et d'un diamètre inférieur à 3 microns dans EP 0160294. Le silicium s’infiltre dans les trous de taille micronique qui peuvent être bouchés par les inclusions pénétrant à l’intérieur. Thus, contrary to the process of the invention where the holes of the filtration device have a diameter in the range of one millimeter, the filters of the state of the art for the filtration of liquid Si MG have holes of small size, of a few microns in DE 3411955 and with a diameter of less than 3 microns in EP 0160294. The silicon seeps into micron-sized holes which can be blocked by inclusions penetrating inside.
Dans le système de filtration en mousse de SiC décrit dans Zhang ét al. (Recycling of solar cell silicon scraps through filtration, Part I: Experimental investigation, Solar Energy Materials & Solar Cells, 92 (2008) pp. 1450-1461 ) pour la filtration des rebuts de lingots de cristallisation du Si photovoltaïque, la tortuosité de la porosité de la mousse est nécessaire pour la filtration des particules qui sont de petite taille. La tortuosité crée en effet un écoulement du liquide présentant des boucles de recirculation qui transportent les particules vers les parois du filtre sur lesquelles elles adhèrent et restent fixées. Or, dans le procédé de l’invention, le mélange solide, sous forme de poudre, issu de la découpe de briques de silicium en plaquettes, contient au départ une teneur importante d’oxygène (une teneur en oxygène supérieure ou égale à 1% en poids) par rapport au poids total du mélange. L’oxygène se transforme en SiÛ2 lors du chauffage et de la fusion, et l’agglomération de SiÛ2 conduit à des particules de grande dimension, de quelques millimètres à quelques centimètres. Par ailleurs, le dispositif de filtration utilisé dans le procédé de la présente invention est muni de trous traversants c’est-à-dire des trous qui ne présentent pas de tortuosité d’une extrémité à l’autre, et à travers lesquels on peut voir. Le dispositif de filtration dans le procédé de l’invention est donc plus simple à réaliser que le filtre en mousse de SiC décrit par Zhang ét al., et contrairement à ce dernier, le dispositif de filtration de l’invention ne génère pas de contamination du silicium liquide. In the SiC foam filtration system described in Zhang et al. (Recycling of solar cell silicon scraps through filtration, Part I: Experimental investigation, Solar Energy Materials & Solar Cells, 92 (2008) pp. 1450-1461) for the filtration of scrap ingots from the crystallization of photovoltaic Si, the tortuosity of the Foam porosity is required for filtration of particles that are small in size. The tortuosity in fact creates a flow of the liquid having recirculation loops which transport the particles towards the walls of the filter on which they adhere and remain fixed. However, in the process of the invention, the solid mixture, in powder form, resulting from the cutting of silicon bricks into wafers, initially contains a high oxygen content (an oxygen content greater than or equal to 1% by weight) relative to the total weight of the mixture. Oxygen is transformed into SiÛ2 during heating and melting, and the agglomeration of SiÛ2 leads to large particles, from a few millimeters to a few centimeters. Furthermore, the filtration device used in the process of the present invention is provided with through holes, that is to say holes which do not present any tortuosity from one end to the other, and through which one can see. The filtration device in the method of the invention is therefore simpler to produce than the SiC foam filter described by Zhang et al., and unlike the latter, the filtration device of the invention does not generate contamination. liquid silicon.
Le procédé de l’invention permet d'obtenir un mélange ayant la pureté requise pour l’application photovoltaïque (jusqu’à 99,9999% en poids de silicium ou plus, sans tenir compte de l’oxygène et du carbone). L’invention a également pour objet une installation de purification de silicium à partir d’un mélange solide, notamment sous forme de poudre, issu de la découpe de briques de silicium en plaquettes et comportant du silicium, de l’oxygène, du carbone et éventuellement des métaux, la teneur en silicium étant d’au moins 96% en poids, la teneur en oxygène étant supérieure ou égale à 1% en poids et la teneur en carbone étant supérieure ou égale à 0,1% en poids, par rapport au poids total du mélange, ladite installation comportant : The process of the invention makes it possible to obtain a mixture having the purity required for the photovoltaic application (up to 99.9999% by weight of silicon or more, without taking into account oxygen and carbon). The invention also relates to an installation for the purification of silicon from a solid mixture, in particular in the form of powder, resulting from the cutting of silicon bricks into wafers and comprising silicon, oxygen, carbon and optionally metals, the silicon content being at least 96% by weight, the oxygen content being greater than or equal to 1% by weight and the carbon content being greater than or equal to 0.1% by weight, relative to the total weight of the mixture, said installation comprising:
- des moyens aptes à chauffer le mélange au-delà de la température de fusion du silicium ; et - means capable of heating the mixture beyond the melting point of the silicon; and
- des moyens de filtration aptes à filtrer le mélange, les moyens de filtration comportant des trous traversants de diamètre compris entre 0,5 et 2 mm, et de préférence entre 1 et 1 ,5 mm. - Filtration means capable of filtering the mixture, the filtration means comprising through-holes with a diameter of between 0.5 and 2 mm, and preferably between 1 and 1.5 mm.
L’installation de l’invention comporte, en outre, des moyens aptes à réaliser une solidification dirigée de la phase liquide filtrée du mélange. The installation of the invention further comprises means capable of carrying out a directed solidification of the filtered liquid phase of the mixture.
Un autre objet de l’invention se rapporte à l’utilisation d’un procédé de purification d’un mélange à l’état solide, notamment sous forme de poudre, issu de la découpe de briques de silicium en plaquettes, selon l’invention, ou d’une installation selon l’invention, pour la fabrication des cellules photovoltaïques. Another object of the invention relates to the use of a process for purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, according to the invention. , or an installation according to the invention, for the manufacture of photovoltaic cells.
L’invention concerne, en outre, un procédé de fabrication de cellules photovoltaïques mettant en oeuvre une étape de purification d’un mélange à l’état solide, notamment sous forme de poudre, issu de la découpe de de briques de silicium en plaquettes, selon le procédé de l’invention, ou une installation selon l’invention. The invention also relates to a method for manufacturing photovoltaic cells implementing a step of purifying a mixture in the solid state, in particular in powder form, resulting from the cutting of silicon bricks into wafers, according to the method of the invention, or an installation according to the invention.
L’invention, bien que décrite pour un mélange issu de la découpe de briques, pourrait également s’appliquer à un mélange issu de la découpe de lingots. Dans le cas de la découpe de lingots, le mélange mis en oeuvre est solide, notamment sous forme de poudre. La granulométrie de cette poudre est généralement telle que le diamètre moyen des particules peut aller de 80 à 100 microns. The invention, although described for a mixture resulting from the cutting of bricks, could also apply to a mixture resulting from the cutting of ingots. In the case of the cutting of ingots, the mixture used is solid, in particular in the form of powder. The particle size of this powder is generally such that the average diameter of the particles can range from 80 to 100 microns.
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EXEMPLE EXAMPLE
Une purification est réalisée selon le procédé de la présente invention sur du kerf contenant 4,3% en poids d’oxygène, et 1 ,8% en poids de carbone, par rapport au poids total du kerf. Le kerf présente une pureté de 99,955% en poids de silicium (sans prendre en compte l’oxygène et le carbone), et préalablement compacté sous forme de granules de quelques millimètres de diamètre. Purification is carried out according to the method of the present invention on kerf containing 4.3% by weight of oxygen, and 1.8% by weight of carbon, relative to the total weight of the kerf. Kerf has a purity of 99.955% by weight of silicon (without taking into account oxygen and carbon), and is previously compacted in the form of granules a few millimeters in diameter.
18 kg de kerf sont chargés dans un filtre en graphite (nuance R7550 de SGL) reposant sur un creuset en silice revêtu d’une couche de SiaIXk selon la configuration de la [Fig 3]. 18 kg of kerf are loaded into a graphite filter (grade R7550 from SGL) resting on a silica crucible coated with a layer of SiaIXk according to the configuration of [Fig 3].
Le filtre a une section intérieure de 1246 cm2 et est percé en son fond de 529 trous de 1 ,5 mm de diamètre. Le filtre et le creuset sont placés dans un four DSS de ségrégation du silicium pour application photovoltaïque de capacité 60 kg. The filter has an internal section of 1246 cm 2 and is pierced at its bottom with 529 holes 1.5 mm in diameter. The filter and the crucible are placed in a DSS silicon segregation furnace for photovoltaic application with a capacity of 60 kg.
Le cycle thermique consiste en une montée à 900°C sous vide (pression résiduelle de 10’1 mbar), une montée à 1500°C sous argon (pression partielle de 600 mbar) et un palier à 1500°C pendant 6 heures. La fusion du silicium du mélange commence durant la rampe de montée et se termine après 45 minutes de palier. Ensuite, 4,2 kg de kerf solide sous forme de granules sont rechargés dans le filtre au moyen du système d’alimentation représenté sur la Fig 3. Ce rechargement est effectué 10 fois de suite, toutes les 25 minutes. A la fin du palier à 1500°C, le silicium liquide s’est totalement écoulé dans le creuset par les trous du filtre. Une rampe de refroidissement est ensuite appliquée permettant une solidification dirigée du silicium contenu dans le creuset à une vitesse de l’ordre de 1 cm/h. The thermal cycle consists of a rise to 900°C under vacuum (residual pressure of 10'1 mbar), a rise to 1500°C under argon (partial pressure of 600 mbar) and a plateau at 1500°C for 6 hours. The melting of the silicon in the mixture begins during the ramp-up and ends after a 45-minute plateau. Then, 4.2 kg of solid kerf in the form of granules are recharged in the filter by means of the supply system represented in FIG. 3. This recharge is carried out 10 times in succession, every 25 minutes. At the end of the plateau at 1500°C, the liquid silicon has completely flowed into the crucible through the filter holes. A cooling ramp is then applied allowing a directed solidification of the silicon contained in the crucible at a speed of the order of 1 cm/h.
Le lingot de silicium solidifié a une masse de 43 kg et le rendement matière, c’est-à-dire le ratio entre la masse de silicium filtré et la masse initiale de kerf (60 kg), est de 72%. La partie ségrégée du lingot contient 0,003% en poids d’oxygène et moins de 0,001% en poids de carbone, par rapport au poids total du lingot. La pureté du lingot est de 99,9999% en poids de silicium, par rapport au poids total du lingot (sans prendre en compte l’oxygène et le carbone). The solidified silicon ingot has a mass of 43 kg and the material yield, ie the ratio between the mass of filtered silicon and the initial mass of kerf (60 kg), is 72%. The segregated part of the ingot contains 0.003% by weight of oxygen and less than 0.001% by weight of carbon, relative to the total weight of the ingot. The purity of the ingot is 99.9999% by weight of silicon, relative to the total weight of the ingot (without taking into account oxygen and carbon).
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FR2011999A FR3116527B1 (en) | 2020-11-23 | 2020-11-23 | METHOD AND PLANT FOR PURIFYING SILICON FROM A MIXTURE FROM THE CUTTING OF SILICON BRICKS INTO PLATES |
PCT/EP2021/082446 WO2022106675A1 (en) | 2020-11-23 | 2021-11-22 | Method and plant for purifying silicon from a mixture obtained by cutting silicon bricks into wafers |
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FR3146672A1 (en) * | 2023-03-15 | 2024-09-20 | HPQ Silicium Inc. | APPARATUS AND METHOD FOR PRODUCING SILICON OF 3N OR HIGHER PURITY BY PURIFYING SILICON OF 2N PURITY |
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DE3411955A1 (en) | 1984-03-30 | 1985-10-10 | Siemens AG, 1000 Berlin und 8000 München | Method and appliance for separating solid components from liquid silicon |
US4643833A (en) | 1984-05-04 | 1987-02-17 | Siemens Aktiengesellschaft | Method for separating solid reaction products from silicon produced in an arc furnace |
DE102011004753A1 (en) | 2011-02-25 | 2012-08-30 | Evonik Degussa Gmbh | Process for purifying silicon |
JP2014076927A (en) * | 2012-10-12 | 2014-05-01 | Panasonic Corp | Contaminant removal furnace |
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