EP4209120A4 - SHORT WAVELENGTH RADIATION SOURCE WITH MULTI-SECTION COLLECTOR MODULE - Google Patents

SHORT WAVELENGTH RADIATION SOURCE WITH MULTI-SECTION COLLECTOR MODULE Download PDF

Info

Publication number: EP4209120A4
Authority: EP; European Patent Office
Prior art keywords: radiation source; short wavelength; collector module; wavelength radiation; section collector
Prior art date: 2020-09-04
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

EP21864799.8A

Other languages

German (de)

French (fr)

Other versions

EP4209120A1 (en

Inventor

Aleksandr Yurievich Vinokhodov

Vladimir Vitalievich Ivanov

Denis Aleksandrovich GLUSHKOV

Samir Ellwi

Konstantin Nikolaevich Koshelev

Mikhail Sergeyevich Krivokorytov

Vladimir Mikhailovich KRIVTSUN

Aleksandr Andreevich LASH

Vyacheslav Valerievich Medvedev

Yury Viktorovich Sidelnikov

Oleg Borisovich Khristoforov

Oleg Feliksovich YAKUSHEV

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Isteq Group Holding BV

Isteq BV

Original Assignee

Isteq Group Holding BV

Isteq BV

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2020-09-04

Filing date

2021-08-26

Publication date

2024-08-28

2020-09-04 Priority claimed from RU2020129329A external-priority patent/RU2743572C1/en

2020-11-19 Priority claimed from US16/952,587 external-priority patent/US11252810B2/en

2021-08-26 Application filed by Isteq Group Holding BV, Isteq BV filed Critical Isteq Group Holding BV

2023-07-12 Publication of EP4209120A1 publication Critical patent/EP4209120A1/en

2024-08-28 Publication of EP4209120A4 publication Critical patent/EP4209120A4/en

Status Pending legal-status Critical Current

Classifications

- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
- H05G2/009—Auxiliary arrangements not involved in the plasma generation
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
- H05G2/009—Auxiliary arrangements not involved in the plasma generation
- H05G2/0094—Reduction, prevention or protection from contamination; Cleaning

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Optics & Photonics (AREA)
Plasma & Fusion (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
X-Ray Techniques (AREA)
Plasma Technology (AREA)

EP21864799.8A 2020-09-04 2021-08-26 SHORT WAVELENGTH RADIATION SOURCE WITH MULTI-SECTION COLLECTOR MODULE Pending EP4209120A4 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
RU2020129329A RU2743572C1 (en)	2020-09-04	2020-09-04	High-brightness source of short-wave radiation (options)
US16/952,587 US11252810B2 (en)	2017-11-24	2020-11-19	Short-wavelength radiation source with multisectional collector module and method of collecting radiation
PCT/RU2021/050277 WO2022050875A1 (en)	2020-09-04	2021-08-26	Short- wavelength radiation source with multisectional collector module

Publications (2)

Publication Number	Publication Date
EP4209120A1 EP4209120A1 (en)	2023-07-12
EP4209120A4 true EP4209120A4 (en)	2024-08-28

Family

ID=80491908

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP21864799.8A Pending EP4209120A4 (en)	2020-09-04	2021-08-26	SHORT WAVELENGTH RADIATION SOURCE WITH MULTI-SECTION COLLECTOR MODULE

Country Status (4)

Country	Link
EP (1)	EP4209120A4 (en)
JP (1)	JP7549313B2 (en)
CN (1)	CN116195369B (en)
WO (1)	WO2022050875A1 (en)

Families Citing this family (2)

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Publication number	Priority date	Publication date	Assignee	Title
EP4209120A4 (en) *	2020-09-04	2024-08-28	Isteq B.V.	SHORT WAVELENGTH RADIATION SOURCE WITH MULTI-SECTION COLLECTOR MODULE
US12429783B2 (en) *	2022-04-11	2025-09-30	Taiwan Semiconductor Manufacturing Company, Ltd.	EUV lithography apparatus and operating method for mitigating contamination

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US11252810B2 (en) *	2017-11-24	2022-02-15	Isteq B.V.	Short-wavelength radiation source with multisectional collector module and method of collecting radiation
RU2706713C1 (en) *	2019-04-26	2019-11-20	Общество С Ограниченной Ответственностью "Эуф Лабс"	High-brightness short-wave radiation source
RU2670273C2 (en) *	2017-11-24	2018-10-22	Общество с ограниченной ответственностью "РнД-ИСАН"	Device and method for emission generation from laser plasma
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EP4209120A4 (en) *	2020-09-04	2024-08-28	Isteq B.V.	SHORT WAVELENGTH RADIATION SOURCE WITH MULTI-SECTION COLLECTOR MODULE
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EP4427549B1 (en) *	2021-11-03	2025-12-31	Isteq B.V.	High-brightness laser-generated plasma source and method for generating and collecting radiation

2021
- 2021-08-26 EP EP21864799.8A patent/EP4209120A4/en active Pending
- 2021-08-26 WO PCT/RU2021/050277 patent/WO2022050875A1/en not_active Ceased
- 2021-08-26 JP JP2023514896A patent/JP7549313B2/en active Active
- 2021-08-26 CN CN202180054712.XA patent/CN116195369B/en active Active

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Publication number	Priority date	Publication date	Assignee	Title
US20090272917A1 (en) *	2008-04-29	2009-11-05	Asml Netherlands B.V.	Radiation source
RU2726316C1 (en) *	2020-01-25	2020-07-13	Общество С Ограниченной Ответственностью "Эуф Лабс"	High-brightness source of short-wave radiation based on laser plasma

Non-Patent Citations (1)

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Title
See also references of WO2022050875A1 *

Also Published As

Publication number	Publication date
WO2022050875A1 (en)	2022-03-10
JP7549313B2 (en)	2024-09-11
EP4209120A1 (en)	2023-07-12
CN116195369A (en)	2023-05-30
CN116195369B (en)	2024-10-18
JP2023540119A (en)	2023-09-21

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Legal Events

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2022-03-11	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE
2023-06-09	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2023-06-09	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE
2023-07-12	17P	Request for examination filed	Effective date: 20230322
2023-07-12	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
2023-12-13	DAV	Request for validation of the european patent (deleted)
2023-12-13	DAX	Request for extension of the european patent (deleted)
2024-08-28	A4	Supplementary search report drawn up and despatched	Effective date: 20240730
2024-08-28	RIC1	Information provided on ipc code assigned before grant	Ipc: H05G 2/00 20060101AFI20240724BHEP